Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector

Eduardo Serralta; Nico Klingner; Olivier De Castro; Michael Mousley; Santhana Eswara; Serge Duarte Pinto; Tom Wirtz; Gregor Hlawacek

doi:10.3762/bxiv.2020.101.v1

Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector

Eduardo Serralta ,
Nico Klingner ,
Olivier De Castro ,
Michael Mousley ,
Santhana Eswara ,
Serge Duarte Pinto ,
Tom Wirtz and
Gregor Hlawacek

Submitting author affiliation:

Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany

Beilstein Arch. 2020, 2020101. https://doi.org/10.3762/bxiv.2020.101.v1

Published 09 Sep 2020

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Read the peer-reviewed version of this preprint: https://doi.org/10.3762/bjnano.11.167

SUBJECT AREAS

Show All Preprints Nanotechnology Organic chemistry Bioorganic chemistry / chemical biology Catalysis Chemical methods and reactions Flow and process chemistry Green and sustainable chemistry Materials chemistry Medicinal and pharmaceutical chemistry Nano- and molecular-scale electronics Nano-biomaterials and bioscience Nanomagnetics Nanomaterials, thin films and nanointerfaces Nanomedicine Nanometrology and nanomechanics Nano-optics Nanopatterning, self-assembly and nanofabrication Nanostructures for energy and sensing applications Natural products chemistry Organo main group chemistry Other nanotechnology (unclassified) Other organic chemistry (unclassified) Photochemistry and photovoltaics Physical organic chemistry Supramolecular chemistry

Abstract

A detection system based on a microchannel plate with a delay line readout structure has been developed to perform scanning transmission ion microscopy (STIM) in the helium ion microscope (HIM). This system is an improvement over other existing approaches since it combines the information of the scanning beam position on the sample with the position (scattering angle) and time of the transmission events. Various imaging modes such as bright and dark field or the direct image of the transmitted signal can be created by post-processing the collected STIM data. Furthermore, the detector has high spatial and time resolution, is sensitive to both ions and neutral particles over a wide energy range, and shows robustness against ion beam-induced damage. A special in-vacuum movable support gives the possibility of moving the detector vertically, placing the detector closer to the sample for the detection of high-angle scattering events, or moving it down to increase the angular resolution and distance for time-of-flight measurements. With this new system, we show composition-dependent contrast for amorphous materials and the contrast difference between small and high angle scattering signals. We also detect channeling related contrast on polycrystalline silicon, thallium chloride nanocrystals, and single crystalline silicon by comparing the signal transmitted at different directions for the same data set.

Keywords: helium ion microscopy; scanning transmission ion microscopy; delay line detector; channeling; bright field; dark field

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Serralta, E.; Klingner, N.; De Castro, O.; Mousley, M.; Eswara, S.; Duarte Pinto, S.; Wirtz, T.; Hlawacek, G. Beilstein Arch. 2020, 2020101. doi:10.3762/bxiv.2020.101.v1

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© 2020 Serralta et al.; licensee Beilstein-Institut.
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aromatic	the word “aromatic”
aromatic aldehyde	the word “aromatic” OR “aldehyde”
+aromatic +aldehyde	both words “aromatic” AND “aldehyde”
+aromatic -aldehyde	the word “aromatic” but NOT “aldehyde”
“aromatic aldehyde”	the exact phrase “aromatic aldehyde”
benz*	words which begin with “benz”, such as “benzene” or “benzyl”
benz*yl	words that begin with “benz” and end with “yl”, such as “benzyl” or “benzoyl”
benzyl~	words that are close to the word “benzyl”, such as “benzoyl” (i.e., fuzzy search)