The description of friction of silicon MEMS with surface roughness: virtues and limitations of a stochastic Prandtl–Tomlinson model and the simulation of vibration-induced friction reduction

Scholarly Works

• Oliveira, E.; Strassner, J.; Doering, C.; Fouckhardt, H. Reflectance anisotropy spectroscopy (RAS) for in-situ identification of roughness morphologies evolving during reactive ion etching (RIE). Applied Surface Science 2023, 611, 155769. doi:10.1016/j.apsusc.2022.155769
• Jain, R.; Ginot, F.; Berner, J.; Bechinger, C.; Krüger, M. Two step micro-rheological behavior in a viscoelastic fluid. The Journal of chemical physics 2021, 154, 184904. doi:10.1063/5.0048320
• Claerbout, V. E. P.; Polcar, T.; Nicolini, P. Superlubricity achieved for commensurate sliding: MoS2 frictional anisotropy in silico. Computational Materials Science 2019, 163, 17–23. doi:10.1016/j.commatsci.2019.03.019
• Gkouzou, A.; Kokorian, J.; Janssen, G. C. A. M.; van Spengen, W. Friction and dynamically dissipated energy dependence on temperature in polycrystalline silicon MEMS devices. Microsystem Technologies 2017, 24, 1899–1907. doi:10.1007/s00542-017-3575-6
• Kokorian, J.; van Spengen, W. M. Improved analysis and visualization of friction loop data : unraveling the energy dissipation of meso-scale stick–slip motion. Measurement Science and Technology 2017, 28, 115011. doi:10.1088/1361-6501/aa870a
• Gkouzou, A.; Kokorian, J.; Janssen, G. C. A. M.; van Spengen, W. Controlling adhesion between multi-asperity contacting surfaces in MEMS devices by local heating. Journal of Micromechanics and Microengineering 2016, 26, 095020. doi:10.1088/0960-1317/26/9/095020
• Lu, R.; Zhang, H.; Komada, S.; Mitsuya, Y.; Fukuzawa, K.; Itoh, S. Surface functionalization by fine ultraviolet-patterning of nanometer-thick liquid lubricant films. Applied Surface Science 2014, 320, 102–111. doi:10.1016/j.apsusc.2014.09.083
• Zubelewicz, A. Liquid-liquid-solid transition in viscoelastic liquids. Scientific reports 2013, 3, 1323. doi:10.1038/srep01323
• Obermair, C.; Kress, M.; Wagner, A.; Schimmel, T. Reversible mechano-electrochemical writing of metallic nanostructures with the tip of an atomic force microscope. Beilstein journal of nanotechnology 2012, 3, 824–830. doi:10.3762/bjnano.3.92
• Huang, C.; Moosmann, M.; Jin, J.; Heiler, T.; Walheim, S.; Schimmel, T. Polymer blend lithography: A versatile method to fabricate nanopatterned self-assembled monolayers. Beilstein journal of nanotechnology 2012, 3, 620–628. doi:10.3762/bjnano.3.71
• Krim, J. Friction and energy dissipation mechanisms in adsorbed molecules and molecularly thin films. Advances in Physics 2012, 61, 155–323. doi:10.1080/00018732.2012.706401

Explore citations to this article at