Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process

Nahid Hosseini, Matthias Neuenschwander, Oliver Peric, Santiago H. Andany, Jonathan D. Adams and Georg E. Fantner
Beilstein J. Nanotechnol. 2019, 10, 2357–2363. https://doi.org/10.3762/bjnano.10.226

Cite the Following Article

Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process
Nahid Hosseini, Matthias Neuenschwander, Oliver Peric, Santiago H. Andany, Jonathan D. Adams and Georg E. Fantner
Beilstein J. Nanotechnol. 2019, 10, 2357–2363. https://doi.org/10.3762/bjnano.10.226

How to Cite

Hosseini, N.; Neuenschwander, M.; Peric, O.; Andany, S. H.; Adams, J. D.; Fantner, G. E. Beilstein J. Nanotechnol. 2019, 10, 2357–2363. doi:10.3762/bjnano.10.226

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