Cite the Following Article
Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process
Nahid Hosseini, Matthias Neuenschwander, Oliver Peric, Santiago H. Andany, Jonathan D. Adams and Georg E. Fantner
Beilstein J. Nanotechnol. 2019, 10, 2357–2363.
https://doi.org/10.3762/bjnano.10.226
How to Cite
Hosseini, N.; Neuenschwander, M.; Peric, O.; Andany, S. H.; Adams, J. D.; Fantner, G. E. Beilstein J. Nanotechnol. 2019, 10, 2357–2363. doi:10.3762/bjnano.10.226
Download Citation
Citation data can be downloaded as file using the "Download" button or used for copy/paste from the text window
below.
Citation data in RIS format can be imported by all major citation management software, including EndNote,
ProCite, RefWorks, and Zotero.
Presentation Graphic
Picture with graphical abstract, title and authors for social media postings and presentations. | ||
Format: PNG | Size: 1.1 MB | Download |
Citations to This Article
Up to 20 of the most recent references are displayed here.
Scholarly Works
- Hosseini, N.; Neuenschwander, M.; Adams, J. D.; Andany, S. H.; Peric, O.; Winhold, M.; Giordano, M. C.; Bhat, V. S.; Penedo, M.; Grundler, D.; Fantner, G. E. A polymer–semiconductor–ceramic cantilever for high-sensitivity fluid-compatible microelectromechanical systems. Nature Electronics 2024, 7, 567–575. doi:10.1038/s41928-024-01195-z
- de Winter, J.; Manzaneque, T.; Krishna Ghatkesar, M. Damping of 3D-printed polymer microbeam resonators. Journal of Micromechanics and Microengineering 2023, 34, 15004–015004. doi:10.1088/1361-6439/ad08ef
- Nathani, M. U.; Nazemi, H.; Love, C.; Lopez, Y. B.; Swaminathan, S.; Emadi, A. Capacitive Based Micromachined Resonators for Low Level Mass Detection. Micromachines 2020, 12, 13. doi:10.3390/mi12010013
- Andany, S. H.; Hlawacek, G.; Hummel, S.; Brillard, C.; Kangül, M.; Fantner, G. E. An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization. Beilstein journal of nanotechnology 2020, 11, 1272–1279. doi:10.3762/bjnano.11.111
- Alunda, B. O.; Lee, Y. J. Review: Cantilever-Based Sensors for High Speed Atomic Force Microscopy. Sensors (Basel, Switzerland) 2020, 20, 4784. doi:10.3390/s20174784