Supporting Information
This supporting information file presents ∂C/∂V phase and sMIM-C results and analyses obtained for a staircase silicon sample.
| Supporting Information File 1: Additional results of scanning microwave impedance microscopy and dynamic spectroscopy-based mapping of integrated PIN diodes. | ||
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Cite the Following Article
Mapping of integrated PIN diodes with a 3D architecture by scanning microwave impedance microscopy and dynamic spectroscopy
Rosine Coq Germanicus, Peter De Wolf, Florent Lallemand, Catherine Bunel, Serge Bardy, Hugues Murray and Ulrike Lüders
Beilstein J. Nanotechnol. 2020, 11, 1764–1775.
https://doi.org/10.3762/bjnano.11.159
How to Cite
Coq Germanicus, R.; De Wolf, P.; Lallemand, F.; Bunel, C.; Bardy, S.; Murray, H.; Lüders, U. Beilstein J. Nanotechnol. 2020, 11, 1764–1775. doi:10.3762/bjnano.11.159
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- Germanicus, R. C.; Phulpin, T.; Niskanen, K.; Michez, A.; Lüders, U. AFM-sMIM Characterization of the Recombination-Enhancing Buffer Layer for Bipolar Degradation Free SiC MOSFETs. Solid State Phenomena 2024, 361, 85–91. doi:10.4028/p-hupmo0
- Villeneuve-Faure, C.; Boumaarouf, A.; Shah, V.; Gammon, P. M.; Lüders, U.; Coq Germanicus, R. SiC Doping Impact during Conducting AFM under Ambient Atmosphere. Materials (Basel, Switzerland) 2023, 16, 5401. doi:10.3390/ma16155401
