Electron beam-induced deposition of platinum from Pt(CO)₂Cl₂ and Pt(CO)₂Br₂

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• Bilgilisoy, E.; Kamali, A.; Gentner, T. X.; Ballmann, G.; Harder, S.; Steinrück, H.-P.; Marbach, H.; Ingólfsson, O. A combined gas-phase dissociative ionization, dissociative electron attachment and deposition study on the potential FEBID precursor [Au(CH3)2Cl]2. Beilstein journal of nanotechnology 2023, 14, 1178–1199. doi:10.3762/bjnano.14.98
• Collings, M. A.; Junige, M.; Cavanagh, A. S.; Wang, V.; Kummel, A. C.; George, S. M. Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)3 and effect of forming gas anneal. Journal of Vacuum Science & Technology A 2023, 41. doi:10.1116/6.0002938
• Kamali, A.; Bilgilisoy, E.; Wolfram, A.; Gentner, T. X.; Ballmann, G.; Harder, S.; Marbach, H.; Ingólfsson, O. On the Electron-Induced Reactions of (CH3)AuP(CH3)3: A Combined UHV Surface Science and Gas-Phase Study. Nanomaterials (Basel, Switzerland) 2022, 12, 2727. doi:10.3390/nano12152727
• Utke, I.; Swiderek, P.; Höflich, K.; Madajska, K.; Jurczyk, J.; Martinović, P.; Szymańska, I. Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies. Coordination Chemistry Reviews 2022, 458, 213851. doi:10.1016/j.ccr.2021.213851
• Shih, P.-Y.; Tafrishi, R.; Cipriani, M.; Hermanns, C. F.; Oster, J.; Gölzhäuser, A.; Edinger, K.; Ingólfsson, O. Dissociative ionization and electron beam induced deposition of tetrakis(dimethylamino)silane, a precursor for silicon nitride deposition. Physical chemistry chemical physics : PCCP 2022, 24, 9564–9575. doi:10.1039/d2cp00257d
• Bilgilisoy, E.; Yu, J.-C.; Preischl, C.; McElwee-White, L.; Steinrück, H.-P.; Marbach, H. Nanoscale Ruthenium-Containing Deposits from Ru(CO)4I2via Simultaneous Focused Electron Beam-Induced Deposition and Etching in Ultrahigh Vacuum: Mask Repair in Extreme Ultraviolet Lithography and Beyond. ACS Applied Nano Materials 2022, 5, 3855–3865. doi:10.1021/acsanm.1c04481
• Yu, J.-C.; Abdel-Rahman, M. K.; Fairbrother, D. H.; McElwee-White, L. Charged Particle-Induced Surface Reactions of Organometallic Complexes as a Guide to Precursor Design for Electron- and Ion-Induced Deposition of Nanostructures. ACS applied materials & interfaces 2021, 13, 48333–48348. doi:10.1021/acsami.1c12327
• Fedoseev, I. V.; Vasekin, V. V.; Shevelkov, A. V. Potential of Molecular Nitrogen Fixation by Carbonyl Clusters of Platinum Metals in Lower Oxidation States: A Review. Russian Journal of Inorganic Chemistry 2021, 66, 1275–1282. doi:10.1134/s0036023621090023
• Cipriani, M.; Svavarsson, S.; da Silva, F. F.; Lu, H.; McElwee-White, L.; Ingólfsson, O. The Role of Low-Energy Electron Interactions in cis-Pt(CO)2Br2 Fragmentation. International journal of molecular sciences 2021, 22, 8984. doi:10.3390/ijms22168984
• Dang, Z.; Luo, Y.; Xu, Y.; Gao, P.; Wang, X.-S. Transformation and degradation of metal halide perovskites induced by energetic electrons and their practical implications. Nano Futures 2021, 5, 032001. doi:10.1088/2399-1984/ac0c24
• Glessi, C.; Mahgoub, A.; Hagen, C. W.; Tilset, M. Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition. Beilstein journal of nanotechnology 2021, 12, 257–269. doi:10.3762/bjnano.12.21

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