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Cite the Following Article
The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication
Victor Deinhart, Lisa-Marie Kern, Jan N. Kirchhof, Sabrina Juergensen, Joris Sturm, Enno Krauss, Thorsten Feichtner, Sviatoslav Kovalchuk, Michael Schneider, Dieter Engel, Bastian Pfau, Bert Hecht, Kirill I. Bolotin, Stephanie Reich and Katja Höflich
Beilstein J. Nanotechnol. 2021, 12, 304–318.
https://doi.org/10.3762/bjnano.12.25
How to Cite
Deinhart, V.; Kern, L.-M.; Kirchhof, J. N.; Juergensen, S.; Sturm, J.; Krauss, E.; Feichtner, T.; Kovalchuk, S.; Schneider, M.; Engel, D.; Pfau, B.; Hecht, B.; Bolotin, K. I.; Reich, S.; Höflich, K. Beilstein J. Nanotechnol. 2021, 12, 304–318. doi:10.3762/bjnano.12.25
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