Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor

Mathias Franz, Mahnaz Safian Jouzdani, Lysann Kaßner, Marcus Daniel, Frank Stahr and Stefan E. Schulz

Beilstein J. Nanotechnol. 2023, 14, 951–963. https://doi.org/10.3762/bjnano.14.78

Supporting Information

Supporting Information File 1: Additional figures with XPS and ellipsometry raw data.
Format: PDF	Size: 1001.1 KB	Download

Cite the Following Article

Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor

Mathias Franz, Mahnaz Safian Jouzdani, Lysann Kaßner, Marcus Daniel, Frank Stahr and Stefan E. Schulz

Beilstein J. Nanotechnol. 2023, 14, 951–963. https://doi.org/10.3762/bjnano.14.78

How to Cite

Franz, M.; Safian Jouzdani, M.; Kaßner, L.; Daniel, M.; Stahr, F.; Schulz, S. E. Beilstein J. Nanotechnol. 2023, 14, 951–963. doi:10.3762/bjnano.14.78

Download Citation

Citation data can be downloaded as file using the "Download" button or used for copy/paste from the text window below.
Citation data in RIS format can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Zotero.

File format:

RIS

BibTeX

Include:

Citation for the article above

Citation and complete reference list for the article above

Download

TY  - JOUR
A1  - Franz, Mathias
A1  - Safian Jouzdani, Mahnaz
A1  - Kaßner, Lysann
A1  - Daniel, Marcus
A1  - Stahr, Frank
A1  - Schulz, Stefan E.
T1  - Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor
JF  - Beilstein Journal of Nanotechnology
PY  - 2023///
VL  - 14
SP  - 951
EP  - 963
SN  - 2190-4286
DO  - 10.3762/bjnano.14.78
PB  - Beilstein-Institut
JA  - Beilstein J. Nanotechnol.
UR  - https://doi.org/10.3762/bjnano.14.78
KW  - atomic layer deposition (ALD)
KW  - cobalt
KW  - low-temperature ALD
KW  - PEALD
KW  - plasma-enhanced ALD
KW  - XPS
N2  - In this work, we present the development of an atomic layer deposition (ALD) process for metallic cobalt. The process operates at low temperatures using dicobalt hexacarbonyl-1-heptyne [Co2(CO)6HC≡CC5H11] and hydrogen plasma. For this precursor an ALD window in the temperature range between 50 and 110 °C was determined with a constant deposition rate of approximately 0.1 Å/cycle. The upper limit of the ALD window is defined by the onset of the decomposition of the precursor. In our case, decomposition occurs at temperatures of 125 °C and above, resulting in a film growth in chemical vapour deposition mode. The lower limit of the ALD window is around 35 °C, where the reduction of the precursor is incomplete. The saturation behaviour of the process was investigated. X-ray photoelectron spectroscopy measurements could show that the deposited cobalt is in the metallic state. The finally established process in ALD mode shows a homogeneous coating at the wafer level.
ER  -

Presentation Graphic

Picture with graphical abstract, title and authors for social media postings and presentations.
Format: PNG	Size: 9.1 MB	Download

Citations to This Article

Up to 20 of the most recent references are displayed here.

Scholarly Works

Franz, M.; Jäckel, L.; Hu, X.; Kaßner, L.; Thurm, C.; Rittrich, D.; Helke, C.; Schuster, J.; Daniel, M.; Stahr, F.; Rüffer, N.; Kretschmer, R.; Schulz, S. E. Low-temperature ALD of metallic cobalt using the CoCOhept precursor: Simulation-assisted process development for deposition on temperature sensitive 3D-structures. Journal of Vacuum Science & Technology A 2025, 43. doi:10.1116/6.0004248

Explore citations to this article at

Back To Article

Other Beilstein-Institut Open Science Activities

aromatic	the word “aromatic”
aromatic aldehyde	the word “aromatic” OR “aldehyde”
+aromatic +aldehyde	both words “aromatic” AND “aldehyde”
+aromatic -aldehyde	the word “aromatic” but NOT “aldehyde”
“aromatic aldehyde”	the exact phrase “aromatic aldehyde”
benz*	words which begin with “benz”, such as “benzene” or “benzyl”
benz*yl	words that begin with “benz” and end with “yl”, such as “benzyl” or “benzoyl”
benzyl~	words that are close to the word “benzyl”, such as “benzoyl” (i.e., fuzzy search)