Electron-induced deposition using Fe(CO)₄MA and Fe(CO)₅ – effect of MA ligand and process conditions

Supporting Information

Supporting Information features ESD (Figures S1 and S2) and post-irradiation TDS (Figure S3) data for Fe(CO)₅, ESD at 20 eV electron energy (Figure S4) and corresponding post-irradiation TDS (Figure S5) for Fe(CO)₄MA, a summary of AES intensities and data calculated from those for Fe(CO)₅ (Table S1) and Fe(CO)₄MA (Table S2), a plot of EAL values as function of electron energy and attenuation as function of overlayer thickness (Figure S6), TDS data for Fe(CO)₄MA as function of coverage (Figure S7), and ¹H NMR (Figure S8) and IR (Figure S9) spectra of Fe(CO)₄MA.

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