Cite the Following Article
Level set simulation of focused ion beam sputtering of a multilayer substrate
Alexander V. Rumyantsev, Nikolai I. Borgardt, Roman L. Volkov and Yuri A. Chaplygin
Beilstein J. Nanotechnol. 2024, 15, 733–742.
https://doi.org/10.3762/bjnano.15.61
How to Cite
Rumyantsev, A. V.; Borgardt, N. I.; Volkov, R. L.; Chaplygin, Y. A. Beilstein J. Nanotechnol. 2024, 15, 733–742. doi:10.3762/bjnano.15.61
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