Direct electron beam writing of silver using a β-diketonate precursor: first insights

Katja Höflich, Krzysztof Maćkosz, Chinmai S. Jureddy, Aleksei Tsarapkin and Ivo Utke
Beilstein J. Nanotechnol. 2024, 15, 1117–1124. https://doi.org/10.3762/bjnano.15.90

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Direct electron beam writing of silver using a β-diketonate precursor: first insights
Katja Höflich, Krzysztof Maćkosz, Chinmai S. Jureddy, Aleksei Tsarapkin and Ivo Utke
Beilstein J. Nanotechnol. 2024, 15, 1117–1124. https://doi.org/10.3762/bjnano.15.90

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Höflich, K.; Maćkosz, K.; Jureddy, C. S.; Tsarapkin, A.; Utke, I. Beilstein J. Nanotechnol. 2024, 15, 1117–1124. doi:10.3762/bjnano.15.90

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