Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism

Gregor Hlawacek, Vasilisa Veligura, Stefan Lorbek, Tijs F. Mocking, Antony George, Raoul van Gastel, Harold J. W. Zandvliet and Bene Poelsema
Beilstein J. Nanotechnol. 2012, 3, 507–512. https://doi.org/10.3762/bjnano.3.58

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Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism
Gregor Hlawacek, Vasilisa Veligura, Stefan Lorbek, Tijs F. Mocking, Antony George, Raoul van Gastel, Harold J. W. Zandvliet and Bene Poelsema
Beilstein J. Nanotechnol. 2012, 3, 507–512. https://doi.org/10.3762/bjnano.3.58

How to Cite

Hlawacek, G.; Veligura, V.; Lorbek, S.; Mocking, T. F.; George, A.; van Gastel, R.; Zandvliet, H. J. W.; Poelsema, B. Beilstein J. Nanotechnol. 2012, 3, 507–512. doi:10.3762/bjnano.3.58

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