Directed deposition of silicon nanowires using neopentasilane as precursor and gold as catalyst

Britta Kämpken, Verena Wulf, Norbert Auner, Marcel Winhold, Michael Huth, Daniel Rhinow and Andreas Terfort
Beilstein J. Nanotechnol. 2012, 3, 535–545. https://doi.org/10.3762/bjnano.3.62

Cite the Following Article

Directed deposition of silicon nanowires using neopentasilane as precursor and gold as catalyst
Britta Kämpken, Verena Wulf, Norbert Auner, Marcel Winhold, Michael Huth, Daniel Rhinow and Andreas Terfort
Beilstein J. Nanotechnol. 2012, 3, 535–545. https://doi.org/10.3762/bjnano.3.62

How to Cite

Kämpken, B.; Wulf, V.; Auner, N.; Winhold, M.; Huth, M.; Rhinow, D.; Terfort, A. Beilstein J. Nanotechnol. 2012, 3, 535–545. doi:10.3762/bjnano.3.62

Download Citation

Citation data can be downloaded as file using the "Download" button or used for copy/paste from the text window below.
Citation data in RIS format can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Zotero.

Citations to This Article

Up to 20 of the most recent references are displayed here.

Scholarly Works

  • Gerwig, M.; Böhme, U.; Friebel, M. Challenges in the Synthesis and Processing of Hydrosilanes as Precursors for Silicon Deposition. Chemistry (Weinheim an der Bergstrasse, Germany) 2024, 30, e202400013. doi:10.1002/chem.202400013
  • Gerwig, M.; Ali, A. S.; Neubert, D.; Polster, S.; Böhme, U.; Franze, G.; Rosenkranz, M.; Popov, A. A.; Ponomarev, I.; Jank, M. P. M.; Viehweger, C.; Brendler, E.; Frey, L.; Kroll, P.; Kroke, E. From Cyclopentasilane to Thin‐Film Transistors. Advanced Electronic Materials 2020, 7, 2000422. doi:10.1002/aelm.202000422
  • Jurczyk, J.; Brewer, C. R.; Hawkins, O. M.; Polyakov, M. N.; Kapusta, C.; McElwee-White, L.; Utke, I. Focused Electron Beam-Induced Deposition and Post-Growth Purification Using the Heteroleptic Ru Complex (η3-C3H5)Ru(CO)3Br. ACS applied materials & interfaces 2019, 11, 28164–28171. doi:10.1021/acsami.9b07634
  • Wang, Y.; Clancey, J. W.; Lu, G.; Liu, J.; Liu, L.; Chaudhuri, J.; George, S. M.; Xie, M.; Wei, S.; Guo, Z. Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes. Journal of The Electrochemical Society 2015, 163, F1–F10. doi:10.1149/2.1001514jes
  • Rivard, E. Group 14 inorganic hydrocarbon analogues. Chemical Society reviews 2015, 45, 989–1003. doi:10.1039/c5cs00365b
  • Kämpken, B.; Heinrich, M.; Vavaleskou, T.; Auner, N.; Terfort, A. Facile preparation of catalytically active, microstructured gold patterns on quartz and silicon substrates. Applied Surface Science 2014, 307, 197–201. doi:10.1016/j.apsusc.2014.04.014
  • Ke, X.; Bittencourt, C.; Bals, S.; Van Tendeloo, G. Low-dose patterning of platinum nanoclusters on carbon nanotubes by focused-electron-beam-induced deposition as studied by TEM. Beilstein journal of nanotechnology 2013, 4, 77–86. doi:10.3762/bjnano.4.9

Patents

  • ZHOU XIAOBING. Method of making aluminum-free neopentasilane. US 11117807 B2, Sept 14, 2021.
  • BLUSH JASON; TUCKER PATRICIA. SILVER NANO-METAL MESH INCLUSIVE ELECTRODE, TOUCH PANEL WITH SILVER NANO-METAL MESH INCLUSIVE ELECTRODE, AND/OR METHOD OF MAKING THE SAME. WO 2018148352 A1, Aug 16, 2018.
  • BLUSH JASON; TUCKER PATRICIA. SILVER NANO-METAL MESH INCLUSIVE ELECTRODE, TOUCH PANEL WITH SILVER NANO-METAL MESH INCLUSIVE ELECTRODE, AND/OR METHOD OF MAKING THE SAME. WO 2018125971 A1, July 5, 2018.
Other Beilstein-Institut Open Science Activities