Nano-structuring, surface and bulk modification with a focused helium ion beam

Scholarly Works

• Gu, H.; Tsukamoto, M.; Nakamura, Y.; Nakaharai, S.; Iwasaki, T.; Watanabe, K.; Taniguchi, T.; Ogawa, S.; Morita, Y.; Sasaki, K.; Kobayashi, K. Systematic characterization of nanoscale h -BN quantum sensor spots created by helium-ion microscopy. Physical Review Applied 2024, 22. doi:10.1103/physrevapplied.22.054026
• Gao, S.; Li, Q.; Gosalvez, M. A.; Lin, X.; Xing, Y.; Zhou, Z. Helium Focused Ion Beam Damage in Silicon: Physics-Informed Neural Network Modeling of Helium Bubble Nucleation and Early Growth. Elsevier BV 2024. doi:10.2139/ssrn.4898773
• Gao, S.; Li, Q.; Gosalvez, M. A.; Lin, X.; Xing, Y.; Zhou, Z. Helium Focused Ion Beam Damage in Silicon: Physics-Informed Neural Network Modeling of Helium Bubble Nucleation and Early Growth. Elsevier BV 2024. doi:10.2139/ssrn.4795077
• Höflich, K.; Hobler, G.; Allen, F. I.; Wirtz, T.; Rius, G.; McElwee-White, L.; Krasheninnikov, A. V.; Schmidt, M.; Utke, I.; Klingner, N.; Osenberg, M.; Córdoba, R.; Djurabekova, F.; Manke, I.; Moll, P.; Manoccio, M.; De Teresa, J. M.; Bischoff, L.; Michler, J.; De Castro, O.; Delobbe, A.; Dunne, P.; Dobrovolskiy, O. V.; Frese, N.; Gölzhäuser, A.; Mazarov, P.; Koelle, D.; Möller, W.; Pérez-Murano, F.; Philipp, P.; Vollnhals, F.; Hlawacek, G. Roadmap for focused ion beam technologies. Applied Physics Reviews 2023, 10. doi:10.1063/5.0162597
• Gao, S.; Chen, X.; Chen, Q.; Li, Q.; Xing, Y. Damage Profile Modeling and Experiment of Silicon Carbide Substrates in Micro-Nano Structure Fabricated By Helium Focused ION Beam. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), IEEE, 2023; pp 606–609. doi:10.1109/mems49605.2023.10052589
• Allen, F. I. A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope. Beilstein journal of nanotechnology 2021, 12, 633–664. doi:10.3762/bjnano.12.52
• Wang, Y.; Hattar, K. Special Issue: Radiation Damage in Materials-Helium Effects. Materials (Basel, Switzerland) 2020, 13, 2143. doi:10.3390/ma13092143
• Gümüş, H. Calculation of stopping power and range for heavy ions at intermediate energies by using Tietz screening function. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2019, 461, 93–97. doi:10.1016/j.nimb.2019.09.024
• Kim, C.-S.; Hobbs, R. G.; Agarwal, A.; Yang, Y.; Manfrinato, V. R.; Short, M. P.; Li, J.; Berggren, K. K. Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication. Nanotechnology 2019, 31, 045302. doi:10.1088/1361-6528/ab4a65
• Fang, F.; Zhang, N.; Guo, D.; Ehmann, K. F.; Cheung, B. C.; Liu, K.; Yamamura, K. Towards atomic and close-to-atomic scale manufacturing. International Journal of Extreme Manufacturing 2019, 1, 012001. doi:10.1088/2631-7990/ab0dfc
• van Kouwen, L. Introduction to focused ion beams, ion sources, and the nano-aperture ion source. Advances in Imaging and Electron Physics; Elsevier, 2019; Vol. 212, pp 181–216. doi:10.1016/bs.aiep.2019.09.001
• Fox, D.; Zhang, H. Helium Ion Microscopy. Springer Tracts in Modern Physics; Springer Singapore, 2018; pp 479–508. doi:10.1007/978-981-13-0454-5_8
• Stehling, N.; Masters, R. C.; Zhou, Y.; O'Connell, R. F.; Holland, C.; Zhang, H.; Rodenburg, C. New perspectives on nano-engineering by secondary electron spectroscopy in the helium ion and scanning electron microscope. MRS Communications 2018, 8, 226–240. doi:10.1557/mrc.2018.75
• Busch, R.; Krause, M.; Coyle, S.; Höche, T. Rapid and localized ion-beam etching of surfaces using initial notches. Micron (Oxford, England : 1993) 2018, 107, 35–42. doi:10.1016/j.micron.2018.01.002
• Wang, H.; Xie, W.; Wang, Y.; Zhu, J.; Mengwan, L.; Lu, W.; Deng, Y.; Wang, G.; Wang, D. Fabrication of 3D nanovolcano-shaped nanopores with helium ion microscopy. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 2017, 36, 011603. doi:10.1116/1.5001927
• Belianinov, A.; Burch, M. J.; Hysmith, H.; Ievlev, A. V.; Iberi, V.; Susner, M. A.; McGuire, M. A.; Maksymovych, P.; Chyasnavichyus, M.; Jesse, S.; Ovchinnikova, O. S. Chemical Changes in Layered Ferroelectric Semiconductors Induced by Helium Ion Beam. Scientific reports 2017, 7, 16619. doi:10.1038/s41598-017-16949-3
• Stanford, M. G.; Lewis, B. B.; Mahady, K.; Fowlkes, J. D.; Rack, P. D. Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 2017, 35, 030802. doi:10.1116/1.4981016
• Mahadik, M. A.; Subramanian, A.; Ryu, J.; Cho, M.; Jang, J. S. A hydrothermally grown CdS nanograin-sensitized 1D Zr:α-Fe2O3/FTO photoanode for efficient solar-light-driven photoelectrochemical performance. Dalton transactions (Cambridge, England : 2003) 2017, 46, 2377–2386. doi:10.1039/c6dt04472g
• Jesse, S.; Borisevich, A. Y.; Fowlkes, J. D.; Lupini, A. R.; Rack, P. D.; Unocic, R. R.; Sumpter, B. G.; Kalinin, S. V.; Belianinov, A.; Ovchinnikova, O. S. Directing Matter: Toward Atomic-Scale 3D Nanofabrication. ACS nano 2016, 10, 5600–5618. doi:10.1021/acsnano.6b02489
• Fox, D.; Maguire, P.; Zhou, Y.-B.; Rodenburg, C.; O’Neill, A.; Coleman, J. N.; Zhang, H. Sub-5 nm graphene nanopore fabrication by nitrogen ion etching induced by a low-energy electron beam. Nanotechnology 2016, 27, 195302. doi:10.1088/0957-4484/27/19/195302

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