The role of electron-stimulated desorption in focused electron beam induced deposition

Scholarly Works

• Jurczyk, J.; Pillatsch, L.; Berger, L.; Priebe, A.; Madajska, K.; Kapusta, C.; Szymańska, I. B.; Michler, J.; Utke, I. In Situ Time-of-Flight Mass Spectrometry of Ionic Fragments Induced by Focused Electron Beam Irradiation: Investigation of Electron Driven Surface Chemistry inside an SEM under High Vacuum. Nanomaterials (Basel, Switzerland) 2022, 12, 2710. doi:10.3390/nano12152710
• Gale, A.; Fröch, J. E.; Kianinia, M.; Bishop, J. W.; Aharonovich, I.; Toth, M. Recoil implantation using gas-phase precursor molecules. Nanoscale 2021, 13, 9322–9327. doi:10.1039/d1nr00850a
• Yao, X.; Lee, Y.; Ceresoli, D.; Cho, K. First-Principles Study on Electron-Induced Excitations of Atomic Layer Deposition Precursors: Inelastic Electron Wave Packet Scattering with Cobalt Tricarbonyl Nitrosyl Co(CO)3NO Using Time-Dependent Density Functional Theory. The journal of physical chemistry. A 2021, 125, 4524–4533. doi:10.1021/acs.jpca.0c11309
• Pablo-Navarro, J.; Sangiao, S.; Magén, C.; de Teresa, J. M. Nanofabrication - Focused electron beam induced deposition. Nanofabrication; IOP Publishing, 2020; pp 4–1-4-39. doi:10.1088/978-0-7503-2608-7ch4
• Malac, M.; Hettler, S.; Hayashida, M.; Kano, E.; Egerton, R. F.; Beleggia, M. Phase plates in the transmission electron microscope: operating principles and applications. Microscopy (Oxford, England) 2020, 70, 75–115. doi:10.1093/jmicro/dfaa070
• Mavukkandy, M. O.; McBride, S. A.; Warsinger, D. M.; Dizge, N.; Hasan, S. W.; Arafat, H. A. Thin film deposition techniques for polymeric membranes– A review. Journal of Membrane Science 2020, 610, 118258. doi:10.1016/j.memsci.2020.118258
• Hettler, S.; Onoda, J.; Wolkow, R. A.; Pitters, J. L.; Malac, M. Charging of electron beam irradiated amorphous carbon thin films at liquid nitrogen temperature. Ultramicroscopy 2018, 196, 161–166. doi:10.1016/j.ultramic.2018.10.010
• Sanz-Hernández, D.; Fernández-Pacheco, A. Modelling focused electron beam induced deposition beyond Langmuir adsorption. Beilstein journal of nanotechnology 2017, 8, 2151–2161. doi:10.3762/bjnano.8.214
• Hettler, S.; Kano, E.; Dries, M.; Gerthsen, D.; Pfaffmann, L.; Bruns, M.; Beleggia, M.; Malac, M. Charging of carbon thin films in scanning and phase-plate transmission electron microscopy. Ultramicroscopy 2017, 184, 252–266. doi:10.1016/j.ultramic.2017.09.009
• Pablo-Navarro, J.; Sanz-Hernández, D.; Magén, C.; Fernández-Pacheco, A.; de Teresa, J. M. Tuning shape, composition and magnetization of 3D cobalt nanowires grown by focused electron beam induced deposition (FEBID). Journal of Physics D: Applied Physics 2017, 50, 18LT01. doi:10.1088/1361-6463/aa63b4
• Ganner, T.; Sattelkow, J.; Rumpf, B.; Eibinger, M.; Reishofer, D.; Winkler, R.; Nidetzky, B.; Spirk, S.; Plank, H. Direct-Write Fabrication of Cellulose Nano-Structures via Focused Electron Beam Induced Nanosynthesis. Scientific reports 2016, 6, 32451. doi:10.1038/srep32451
• Weiss, T.; Warneke, J.; Zielasek, V.; Swiderek, P.; Bäumer, M. XPS study of thermal and electron-induced decomposition of Ni and Co acetylacetonate thin films for metal deposition. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 2016, 34, 041515. doi:10.1116/1.4953469
• Pablo-Navarro, J.; Magén, C.; de Teresa, J. M. Three-dimensional core-shell ferromagnetic nanowires grown by focused electron beam induced deposition. Nanotechnology 2016, 27, 285302. doi:10.1088/0957-4484/27/28/285302
• Szkudlarek, A.; Vaz, A. R.; Zhang, Y.; Rudkowski, A.; Kapusta, C.; Erni, R.; Moshkalev, S. A.; Utke, I. Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods. Beilstein journal of nanotechnology 2015, 6, 1508–1517. doi:10.3762/bjnano.6.156
• Cullen, J.; Bahm, A.; Lobo, C. J.; Ford, M. J.; Toth, M. Localized Probing of Gas Molecule Adsorption Energies and Desorption Attempt Frequencies. The Journal of Physical Chemistry C 2015, 119, 15948–15953. doi:10.1021/acs.jpcc.5b00918
• Schmied, R.; Fowlkes, J. D.; Winkler, R.; Rack, P. D.; Plank, H. Fundamental edge broadening effects during focused electron beam induced nanosynthesis. Beilstein journal of nanotechnology 2015, 6, 462–471. doi:10.3762/bjnano.6.47
• Winkler, R.; Szkudlarek, A.; Fowlkes, J. D.; Rack, P. D.; Utke, I.; Plank, H. Toward Ultraflat Surface Morphologies During Focused Electron Beam Induced Nanosynthesis: Disruption Origins and Compensation. ACS applied materials & interfaces 2015, 7, 3289–3297. doi:10.1021/am508052k
• Szkudlarek, A.; Szmyt, W.; Kapusta, C.; Utke, I. Lateral resolution in focused electron beam-induced deposition: scaling laws for pulsed and static exposure. Applied Physics A 2014, 117, 1715–1726. doi:10.1007/s00339-014-8751-2
• Toth, M. Advances in gas-mediated electron beam-induced etching and related material processing techniques. Applied Physics A 2014, 117, 1623–1629. doi:10.1007/s00339-014-8596-8
• Geier, B.; Gspan, C.; Winkler, R.; Schmied, R.; Fowlkes, J. D.; Fitzek, H. M.; Rauch, S.; Rattenberger, J.; Rack, P. D.; Plank, H. Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H2O Reactions. The Journal of Physical Chemistry C 2014, 118, 14009–14016. doi:10.1021/jp503442b

Explore citations to this article at