Continuum models of focused electron beam induced processing

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• Glessi, C.; Polman, F. A.; Hagen, C. W. Water-assisted purification during electron beam-induced deposition of platinum and gold. Beilstein journal of nanotechnology 2024, 15, 884–896. doi:10.3762/bjnano.15.73
• Solov'yov, A. V.; Verkhovtsev, A. V.; Mason, N. J.; Amos, R. A.; Bald, I.; Baldacchino, G.; Dromey, B.; Falk, M.; Fedor, J.; Gerhards, L.; Hausmann, M.; Hildenbrand, G.; Hrabovský, M.; Kadlec, S.; Kočišek, J.; Lépine, F.; Ming, S.; Nisbet, A.; Ricketts, K.; Sala, L.; Schlathölter, T.; Wheatley, A. E. H.; Solov'yov, I. A. Condensed Matter Systems Exposed to Radiation: Multiscale Theory, Simulations, and Experiment. Chemical reviews 2024, 124, 8014–8129. doi:10.1021/acs.chemrev.3c00902
• Hari, S.; van Dorp, W. F.; Mulders, J. J. L.; Trompenaars, P. H. F.; Kruit, P.; Hagen, C. W. Sidewall angle tuning in focused electron beam-induced processing. Beilstein journal of nanotechnology 2024, 15, 447–456. doi:10.3762/bjnano.15.40
• Szkudlarek, A.; Michalik, J. M.; Serrano-Esparza, I.; Nováček, Z.; Novotná, V.; Ozga, P.; Kapusta, C.; De Teresa, J. M. Graphene removal by water-assisted focused electron-beam-induced etching - unveiling the dose and dwell time impact on the etch profile and topographical changes in SiO2 substrates. Beilstein journal of nanotechnology 2024, 15, 190–198. doi:10.3762/bjnano.15.18
• Höflich, K.; Hobler, G.; Allen, F. I.; Wirtz, T.; Rius, G.; McElwee-White, L.; Krasheninnikov, A. V.; Schmidt, M.; Utke, I.; Klingner, N.; Osenberg, M.; Córdoba, R.; Djurabekova, F.; Manke, I.; Moll, P.; Manoccio, M.; De Teresa, J. M.; Bischoff, L.; Michler, J.; De Castro, O.; Delobbe, A.; Dunne, P.; Dobrovolskiy, O. V.; Frese, N.; Gölzhäuser, A.; Mazarov, P.; Koelle, D.; Möller, W.; Pérez-Murano, F.; Philipp, P.; Vollnhals, F.; Hlawacek, G. Roadmap for focused ion beam technologies. Applied Physics Reviews 2023, 10. doi:10.1063/5.0162597
• Mason, N. J.; Pintea, M.; Csarnovics, I.; Fodor, T.; Szikszai, Z.; Kertész, Z. Structural Analysis of Si(OEt)4 Deposits on Au(111)/SiO2 Substrates at the Nanometer Scale Using Focused Electron Beam-Induced Deposition. ACS omega 2023, 8, 24233–24246. doi:10.1021/acsomega.3c00793
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• Jurczyk, J.; Höflich, K.; Madajska, K.; Berger, L.; Brockhuis, L.; Edwards, T. E. J.; Kapusta, C.; Szymańska, I. B.; Utke, I. Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition. Nanomaterials (Basel, Switzerland) 2023, 13, 1516. doi:10.3390/nano13091516
• Priebe, A.; Michler, J. Review of Recent Advances in Gas-Assisted Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometry (FIB-TOF-SIMS). Materials (Basel, Switzerland) 2023, 16, 2090. doi:10.3390/ma16052090
• Kuprava, A.; Huth, M. Fast and Efficient Simulation of the FEBID Process with Thermal Effects. Nanomaterials (Basel, Switzerland) 2023, 13, 858. doi:10.3390/nano13050858
• Prosvetov, A.; Verkhovtsev, A. V.; Sushko, G.; Solov'yov, A. V. Atomistic modeling of thermal effects in focused electron beam-induced deposition of Me$$_2$$Au(tfac). The European Physical Journal D 2023, 77. doi:10.1140/epjd/s10053-023-00598-5
• Gökırmak Söğüt, E.; Gülcan, M. Adsorption: basics, properties, and classification. Adsorption through Advanced Nanoscale Materials; Elsevier, 2023; pp 3–21. doi:10.1016/b978-0-443-18456-7.00001-8
• Dobrovolskiy, O. V.; Pylypovskyi, O. V.; Skoric, L.; Fernández-Pacheco, A.; Van Den Berg, A.; Ladak, S.; Huth, M. Complex-Shaped 3D Nanoarchitectures for Magnetism and Superconductivity. Topics in Applied Physics; Springer International Publishing, 2022; pp 215–268. doi:10.1007/978-3-031-09086-8_5
• Prosvetov, A.; Verkhovtsev, A. V.; Sushko, G.; Solov'yov, A. V. Atomistic simulation of the FEBID-driven growth of iron-based nanostructures. Physical chemistry chemical physics : PCCP 2022, 24, 10807–10819. doi:10.1039/d2cp00809b
• Utke, I.; Swiderek, P.; Höflich, K.; Madajska, K.; Jurczyk, J.; Martinović, P.; Szymańska, I. Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies. Coordination Chemistry Reviews 2022, 458, 213851. doi:10.1016/j.ccr.2021.213851
• Bilgilisoy, E.; Yu, J.-C.; Preischl, C.; McElwee-White, L.; Steinrück, H.-P.; Marbach, H. Nanoscale Ruthenium-Containing Deposits from Ru(CO)4I2via Simultaneous Focused Electron Beam-Induced Deposition and Etching in Ultrahigh Vacuum: Mask Repair in Extreme Ultraviolet Lithography and Beyond. ACS Applied Nano Materials 2022, 5, 3855–3865. doi:10.1021/acsanm.1c04481
• Elbadawi, C.; Kianinia, M.; Bendavid, A.; Lobo, C. J. Charged Particle Induced Etching and Functionalization of Two-Dimensional Materials. ECS Journal of Solid State Science and Technology 2022, 11, 35011–035011. doi:10.1149/2162-8777/ac5eb2
• Huth, M.; Porrati, F.; Barth, S. Living up to its potential—Direct-write nanofabrication with focused electron beams. Journal of Applied Physics 2021, 130, 170901. doi:10.1063/5.0064764
• Pablo-Navarro, J.; Sangiao, S.; Magén, C.; de Teresa, J. M. Magnetic Functionalization of Scanning Probes by Focused Electron Beam Induced Deposition Technology. Magnetochemistry 2021, 7, 140. doi:10.3390/magnetochemistry7100140

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