Numerical investigation of depth profiling capabilities of helium and neon ions in ion microscopy

Patrick Philipp, Lukasz Rzeznik and Tom Wirtz
Beilstein J. Nanotechnol. 2016, 7, 1749–1760. https://doi.org/10.3762/bjnano.7.168

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Numerical investigation of depth profiling capabilities of helium and neon ions in ion microscopy
Patrick Philipp, Lukasz Rzeznik and Tom Wirtz
Beilstein J. Nanotechnol. 2016, 7, 1749–1760. https://doi.org/10.3762/bjnano.7.168

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Philipp, P.; Rzeznik, L.; Wirtz, T. Beilstein J. Nanotechnol. 2016, 7, 1749–1760. doi:10.3762/bjnano.7.168

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