Chemistry for electron-induced nanofabrication

Scholarly Works

• Chen, C. K.; Weng, P. E.; Chiang, C.-W.; Chen, P.; Wen, C.; Mette, G.; Hermanns, C. F.; Hofmann, T.; Edinger, K.; Li, Y. Repair processes on next generation EUV materials. In Photomask Technology 2024, SPIE, 2024; 19. doi:10.1117/12.3034694
• Solov'yov, A. V.; Verkhovtsev, A. V.; Mason, N. J.; Amos, R. A.; Bald, I.; Baldacchino, G.; Dromey, B.; Falk, M.; Fedor, J.; Gerhards, L.; Hausmann, M.; Hildenbrand, G.; Hrabovský, M.; Kadlec, S.; Kočišek, J.; Lépine, F.; Ming, S.; Nisbet, A.; Ricketts, K.; Sala, L.; Schlathölter, T.; Wheatley, A. E. H.; Solov'yov, I. A. Condensed Matter Systems Exposed to Radiation: Multiscale Theory, Simulations, and Experiment. Chemical reviews 2024, 124, 8014–8129. doi:10.1021/acs.chemrev.3c00902
• Córdoba, R. Additive nanofabrication using focused ion and electron beams. Encyclopedia of Condensed Matter Physics; Elsevier, 2024; pp 448–464. doi:10.1016/b978-0-323-90800-9.00035-4
• Reisecker, V.; Kuhness, D.; Haberfehlner, G.; Brugger‐Hatzl, M.; Winkler, R.; Weitzer, A.; Loibner, D.; Dienstleder, M.; Kothleitner, G.; Plank, H. Spectral Tuning of Plasmonic Activity in 3D Nanostructures via High‐Precision Nano‐Printing. Advanced Functional Materials 2023, 34. doi:10.1002/adfm.202310110
• Andreides, B.; Verkhovtsev, A. V.; Fedor, J.; Solov'yov, A. V. Role of the Molecular Environment in Quenching the Irradiation-Driven Fragmentation of Fe(CO)5: A Reactive Molecular Dynamics Study. The journal of physical chemistry. A 2023, 127, 3757–3767. doi:10.1021/acs.jpca.2c08756
• Rohdenburg, M.; Winkler, R.; Kuhness, D.; Plank, H.; Swiderek, P. Water-Assisted Process for Purification of Ruthenium Nanomaterial Fabricated by Electron Beam Induced Deposition. ACS Applied Nano Materials 2020, 3, 8352–8364. doi:10.1021/acsanm.0c01759
• Rohdenburg, M.; Boeckers, H.; Brewer, C. R.; McElwee-White, L.; Swiderek, P. Efficient NH3-based process to remove chlorine from electron beam deposited ruthenium produced from (η3-C3H5)Ru(CO)3Cl. Scientific reports 2020, 10, 10901. doi:10.1038/s41598-020-67803-y
• Späth, A. Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities. Micromachines 2019, 10, 834. doi:10.3390/mi10120834
• Indrajith, S.; Rousseau, P.; Huber, B. A.; Nicolafrancesco, C.; Domaracka, A.; Grygoryeva, K.; Nag, P.; Sedmidubská, B.; Fedor, J.; Kočišek, J. Decomposition of Iron Pentacarbonyl Induced by Singly and Multiply Charged Ions and Implications for Focused Ion Beam-Induced Deposition. The Journal of Physical Chemistry C 2019, 123, 10639–10645. doi:10.1021/acs.jpcc.9b00289

Explore citations to this article at