High-throughput synthesis of modified Fresnel zone plate arrays via ion beam lithography

Kahraman Keskinbora, Umut Tunca Sanli, Margarita Baluktsian, Corinne Grévent, Markus Weigand and Gisela Schütz
Beilstein J. Nanotechnol. 2018, 9, 2049–2056. https://doi.org/10.3762/bjnano.9.194

Supporting Information

Additional SEM images of inner and outermost zones, CWT calculations about how the L:S affects the DE, SEM images of zones before and after the Pt deposition, and imaging simulations for modified and non-modified FZPs.

Supporting Information File 1: Additional experimental data.
Format: PDF Size: 1.6 MB Download

Cite the Following Article

High-throughput synthesis of modified Fresnel zone plate arrays via ion beam lithography
Kahraman Keskinbora, Umut Tunca Sanli, Margarita Baluktsian, Corinne Grévent, Markus Weigand and Gisela Schütz
Beilstein J. Nanotechnol. 2018, 9, 2049–2056. https://doi.org/10.3762/bjnano.9.194

How to Cite

Keskinbora, K.; Sanli, U. T.; Baluktsian, M.; Grévent, C.; Weigand, M.; Schütz, G. Beilstein J. Nanotechnol. 2018, 9, 2049–2056. doi:10.3762/bjnano.9.194

Download Citation

Citation data can be downloaded as file using the "Download" button or used for copy/paste from the text window below.
Citation data in RIS format can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Zotero.

Presentation Graphic

Picture with graphical abstract, title and authors for social media postings and presentations.
Format: PNG Size: 934.4 KB Download

Citations to This Article

Up to 20 of the most recent references are displayed here.

Scholarly Works

  • Rumyantsev, A. V.; Borgardt, N. I.; Volkov, R. L.; Chaplygin, Y. A. Level set simulation of focused ion beam sputtering of a multilayer substrate. Beilstein journal of nanotechnology 2024, 15, 733–742. doi:10.3762/bjnano.15.61
  • Goyal, M.; Singh, K.; Bhatnagar, N. Conductive polymers: A multipurpose material for protecting coating. Progress in Organic Coatings 2024, 187, 108083. doi:10.1016/j.porgcoat.2023.108083
  • Tong, X.; Chen, Y.; Mu, C.; Chen, Q.; Zhang, X.; Zeng, G.; Li, Y.; Xu, Z.; Zhao, J.; Zhen, X.; Mao, C.; Lu, H.; Tai, R. A compound Kinoform/Fresnel zone plate lens with 15 nm resolution and high efficiency in soft x-ray. Nanotechnology 2023, 34, 215301. doi:10.1088/1361-6528/acb946
  • Tong, X.; Chen, Y.; Xu, Z.; Li, Y.; Xing, Z.; Mu, C.; Zhao, J.; Zhen, X.; Mao, C.; Tai, R. High-efficiency focusing and imaging by dielectric kinoform zone plate lenses with soft X-rays. Journal of synchrotron radiation 2023, 30, 319–326. doi:10.1107/s1600577522012115
  • Jidling, C.; Fleming, A. J.; Wills, A. G.; Schön, T. B. Memory efficient constrained optimization of scanning-beam lithography. Optics express 2022, 30, 20564. doi:10.1364/oe.457334
  • Sanli, U. T.; Messer, T.; Weigand, M.; Lötgering, L.; Schütz, G.; Wegener, M.; Kern, C.; Keskinbora, K. High‐Resolution Kinoform X‐Ray Optics Printed via 405 nm 3D Laser Lithography. Advanced Materials Technologies 2022, 7. doi:10.1002/admt.202101695
  • Zhang, X.; Yang, W.; Zhang, H.; Xie, M.; Duan, X. PEDOT:PSS: From conductive polymers to sensors. Nanotechnology and Precision Engineering 2021, 4, 045004. doi:10.1063/10.0006866
  • Gao, Y.; Chen, J.; Chen, G.; Fan, C.; Liu, X. Recent Progress in the Transfer of Graphene Films and Nanostructures. Small methods 2021, 5, 2100771. doi:10.1002/smtd.202100771
  • Zhang, H.; Liu, H.; Xu, W.; Lu, Z. Large aperture diffractive optical telescope: A review. Optics & Laser Technology 2020, 130, 106356. doi:10.1016/j.optlastec.2020.106356
  • Pan, Y.; Xu, K. Recent Progress in Nano-electronic Devices Based on EBL and IBL. Current Nanoscience 2020, 16, 157–169. doi:10.2174/1573413715666190701111638
  • Chen, J.; Wang, J.; Ma, B.; Wang, X.; Yuan, D.; Liao, J.; Xu, M. Fabricating high-quality Fresnel zone plates by efficiently eliminating redeposition based on focused ion beam. Optical Engineering 2019, 58, 087104. doi:10.1117/1.oe.58.8.087104
Other Beilstein-Institut Open Science Activities