Effective sensor properties and sensitivity considerations of a dynamic co-resonantly coupled cantilever sensor

Julia Körner
Beilstein J. Nanotechnol. 2018, 9, 2546–2560. https://doi.org/10.3762/bjnano.9.237

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Effective sensor properties and sensitivity considerations of a dynamic co-resonantly coupled cantilever sensor
Julia Körner
Beilstein J. Nanotechnol. 2018, 9, 2546–2560. https://doi.org/10.3762/bjnano.9.237

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Körner, J. Beilstein J. Nanotechnol. 2018, 9, 2546–2560. doi:10.3762/bjnano.9.237

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  • Lampouras, I.; Holz, M.; Strehle, S.; Körner, J. Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride. Journal of Micromechanics and Microengineering 2023, 34, 15005–015005. doi:10.1088/1361-6439/ad0d80
  • Körner, J. Effective Sensor Properties of a Novel Co-Resonant Cantilever Sensor. In EUROSENSORS 2018, MDPI, 2019; pp 974 ff. doi:10.3390/proceedings2130974
  • Körner, J. A highly sensitive co-resonant cantilever sensor for materials research: Application to nanomaterial characterization. Journal of Materials Research 2018, 33, 2504–2514. doi:10.1557/jmr.2018.295
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