Charged particle single nanometre manufacturing

Philip D. Prewett, Cornelis W. Hagen, Claudia Lenk, Steve Lenk, Marcus Kaestner, Tzvetan Ivanov, Ahmad Ahmad, Ivo W. Rangelow, Xiaoqing Shi, Stuart A. Boden, Alex P. G. Robinson, Dongxu Yang, Sangeetha Hari, Marijke Scotuzzi and Ejaz Huq
Beilstein J. Nanotechnol. 2018, 9, 2855–2882. https://doi.org/10.3762/bjnano.9.266

Cite the Following Article

Charged particle single nanometre manufacturing
Philip D. Prewett, Cornelis W. Hagen, Claudia Lenk, Steve Lenk, Marcus Kaestner, Tzvetan Ivanov, Ahmad Ahmad, Ivo W. Rangelow, Xiaoqing Shi, Stuart A. Boden, Alex P. G. Robinson, Dongxu Yang, Sangeetha Hari, Marijke Scotuzzi and Ejaz Huq
Beilstein J. Nanotechnol. 2018, 9, 2855–2882. https://doi.org/10.3762/bjnano.9.266

How to Cite

Prewett, P. D.; Hagen, C. W.; Lenk, C.; Lenk, S.; Kaestner, M.; Ivanov, T.; Ahmad, A.; Rangelow, I. W.; Shi, X.; Boden, S. A.; Robinson, A. P. G.; Yang, D.; Hari, S.; Scotuzzi, M.; Huq, E. Beilstein J. Nanotechnol. 2018, 9, 2855–2882. doi:10.3762/bjnano.9.266

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