Comparative study of sculptured metallic thin films deposited by oblique angle deposition at different temperatures

Susann Liedtke, Christoph Grüner, Jürgen W. Gerlach and Bernd Rauschenbach
Beilstein J. Nanotechnol. 2018, 9, 954–962. https://doi.org/10.3762/bjnano.9.89

Cite the Following Article

Comparative study of sculptured metallic thin films deposited by oblique angle deposition at different temperatures
Susann Liedtke, Christoph Grüner, Jürgen W. Gerlach and Bernd Rauschenbach
Beilstein J. Nanotechnol. 2018, 9, 954–962. https://doi.org/10.3762/bjnano.9.89

How to Cite

Liedtke, S.; Grüner, C.; Gerlach, J. W.; Rauschenbach, B. Beilstein J. Nanotechnol. 2018, 9, 954–962. doi:10.3762/bjnano.9.89

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