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Beilstein J. Nanotechnol. 2024, 15, 884–896, doi:10.3762/bjnano.15.73
Figure 1: Extreme cases for water-assisted purification pathways during e-beam deposition of MeCpPtMe3. (A1) ...
Figure 2: (a) C/Au atom % ratio and (b) Au content in atom % as function of the chamber pressure increase due...
Figure 3: (a) Positioning of the water GIS (right) and the Pt GIS (left), the blue dot indicates the depositi...
Figure 4: EDX maps for Si, C, Pt, and O presented in atom % for 1a (colour images generated by the Aztec soft...
Figure 5: SEM image of deposits 1b–1f obtained by co-injecting platinum precursor and water. All images are t...
Figure 6: Horizontal line EDX of deposits 1b–1e. The patterned area ranges between −0.125 and 0.125 µm. The (...
Figure 7: (a) High-resolution TEM image and (b) overlay of the HAADF image and the STEM-EDX map of the cross ...
Figure 8: SEM images of square patterns of 150 × 150 nm2 (patterned at 5 keV, 10 µs dwell time, 4 nm pitch, 1...
Figure 9: 52°-tilted SEM images of 2g (1 µm line, 5 kV, 0.54 nA, 1 µs dwell, 4 nm pitch, 100000 passes) befor...
Beilstein J. Nanotechnol. 2021, 12, 257–269, doi:10.3762/bjnano.12.21
Figure 1: Overview of previously reported FEBID gold precursors, Au(acac)Me2 [10,20-22], Au(tfac)Me2 [21,23-25], Au(hfac)Me2 [19], Au...
Figure 2: Substrate heater and precursor supply system of the deposition setup. Only the conical hole in the ...
Figure 3: The selected Au(NHC)X complexes studied and their molecular formulae.
Scheme 1: Synthesis routes for 1–7.
Figure 4: SEM images, tilted by 50°, of 250 × 250 nm2 square deposits made using a beam energy and current of...
Figure 5: Possible fragmentations of (N,Et)AuCl (6), with the loss of Cl and a volatile fragment 6b, and the ...
Figure 6: Typical SEM images, tilted by 50°, of pillar arrays deposited from all precursors. (a) 1 (Cl,Me)AuC...
Figure 7: Calculated volume of pillars grown using a 5 kV, 40 pA beam, as a function of the electron dose giv...