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Beilstein J. Nanotechnol. 2024, 15, 1627–1638, doi:10.3762/bjnano.15.128
Figure 1: Flowchart of the modeling and simulation process and the use of different pieces of software.
Figure 2: The HFCVD reactor zones and elements of the 2D model built in COMSOL Multiphysics 5.3.
Figure 3: The red line along the y direction in the deposition area (zone 2) built in COSMOL Multiphysics.
Figure 4: Experimental temperature measured by a thermocouple located on the deposition zone for (a) 20 sccm ...
Figure 5: Temperature map of the HFCVD reactor.
Figure 6: (a) Temperature map of the surroundings of the deposition zone. (b) Temperature profile along the y...
Figure 7: Velocity profile in the HFCVD reactor obtained with (a) COMSOL and (b) ANSYS.
Figure 8: (a) Concentration map of atomic H in the deposition zone. (b) Concentration as a function of the po...
Figure 9: (a) Concentration map of SiO in the deposition zone. (b) SiO concentration vs y position.
Figure 10: (a) Concentration of O2 as a function of the y position. (b) O2 concentration map in zone 2.
Beilstein J. Nanotechnol. 2018, 9, 216–223, doi:10.3762/bjnano.9.23
Figure 1: Schematic side view of the fabrication process.
Figure 2: Two cross sections at 90° of a 360 nm polystyrene nanoparticle colloidal crystal. Reprinted with pe...
Figure 3: Cross section of Al2O3 shells after complete removal of polystyrene nanoparticles. Conformal shells...
Figure 4: Cross section of Al2O3/TiO2 shells after TiO2 layer deposition. Conformal shells are observed cover...
Figure 5: Reflectance measurements showing that the high reflection peaks closely match with the expected pea...