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1 article(s) from Martínez, Xochitl Aleyda Morán

Heterogeneous reactions in a HFCVD reactor: simulation using a 2D model

Xochitl Aleyda Morán Martínez,
José Alberto Luna López,
Zaira Jocelyn Hernández Simón,
Gabriel Omar Mendoza Conde,
José Álvaro David Hernández de Luz and
Godofredo García Salgado

Beilstein J. Nanotechnol. 2024, 15, 1627–1638, doi:10.3762/bjnano.15.128

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Figure 1: Flowchart of the modeling and simulation process and the use of different pieces of software.

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Figure 2: The HFCVD reactor zones and elements of the 2D model built in COMSOL Multiphysics 5.3.

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Figure 3: The red line along the y direction in the deposition area (zone 2) built in COSMOL Multiphysics.

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Figure 4: Experimental temperature measured by a thermocouple located on the deposition zone for (a) 20 sccm ...

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Figure 5: Temperature map of the HFCVD reactor.

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Figure 6: (a) Temperature map of the surroundings of the deposition zone. (b) Temperature profile along the y...

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Figure 7: Velocity profile in the HFCVD reactor obtained with (a) COMSOL and (b) ANSYS.

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Figure 8: (a) Concentration map of atomic H in the deposition zone. (b) Concentration as a function of the po...

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Figure 9: (a) Concentration map of SiO in the deposition zone. (b) SiO concentration vs y position.

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Figure 10: (a) Concentration of O₂ as a function of the y position. (b) O₂ concentration map in zone 2.

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Published 17 Dec 2024

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