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Beilstein J. Nanotechnol. 2020, 11, 1742–1749, doi:10.3762/bjnano.11.156
Figure 1: Comparison of the spot size (imaging resolution) as a function of the ion beam current for differen...
Figure 2: Mass spectrum of a Ga33Bi57Li10 LMAIS at an acceleration potential of 10 kV scanned by the ExB volt...
Figure 3: Examples using different ions: a) 30 keV He+, field of view (FOV): 1.5 × 1.5 µm2, trench width: 4 n...
Figure 4: Summary of the imaging resolution (80/20), experimentally achieved trench width, and simulated mini...
Figure 5: SRIM simulation [39] of the sputter profile from a 30 keV point-like beam in a gold substrate as a func...
Figure 6: Comparison of the normalized ion beam profiles (normalized half profiles = beam radius) obtained fr...