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1 article(s) from Polman, Fabian A

Water-assisted purification during electron beam-induced deposition of platinum and gold

Cristiano Glessi,
Fabian A. Polman and
Cornelis W. Hagen

Beilstein J. Nanotechnol. 2024, 15, 884–896, doi:10.3762/bjnano.15.73

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Figure 1: Extreme cases for water-assisted purification pathways during e-beam deposition of MeCpPtMe₃. (A₁) ...

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Figure 2: (a) C/Au atom % ratio and (b) Au content in atom % as function of the chamber pressure increase due...

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Figure 3: (a) Positioning of the water GIS (right) and the Pt GIS (left), the blue dot indicates the depositi...

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Figure 4: EDX maps for Si, C, Pt, and O presented in atom % for 1a (colour images generated by the Aztec soft...

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Figure 5: SEM image of deposits 1b–1f obtained by co-injecting platinum precursor and water. All images are t...

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Figure 6: Horizontal line EDX of deposits 1b–1e. The patterned area ranges between −0.125 and 0.125 µm. The (...

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Figure 7: (a) High-resolution TEM image and (b) overlay of the HAADF image and the STEM-EDX map of the cross ...

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Figure 8: SEM images of square patterns of 150 × 150 nm² (patterned at 5 keV, 10 µs dwell time, 4 nm pitch, 1...

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Figure 9: 52°-tilted SEM images of 2g (1 µm line, 5 kV, 0.54 nA, 1 µs dwell, 4 nm pitch, 100000 passes) befor...

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Published 18 Jul 2024

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