Search for "RF magnetron sputtering" in Full Text gives 28 result(s) in Beilstein Journal of Nanotechnology.
Beilstein J. Nanotechnol. 2014, 5, 927–936, doi:10.3762/bjnano.5.106
Beilstein J. Nanotechnol. 2013, 4, 554–566, doi:10.3762/bjnano.4.64
Beilstein J. Nanotechnol. 2012, 3, 368–377, doi:10.3762/bjnano.3.43