Focused electron beam induced deposition: A perspective

• Michael Huth,
• Fabrizio Porrati,
• Christian Schwalb,
• Marcel Winhold,
• Roland Sachser,
• Maja Dukic,
• Jonathan Adams and
• Georg Fantner

Beilstein J. Nanotechnol. 2012, 3, 597–619, doi:10.3762/bjnano.3.70

• independently controlled, is analyzed within a continuum model of FEBID that employs rate equations. Predictions are made for the tunability of the composition of the Co–Pt system by simply changing the dwell time of the electron beam during the writing process. The charge-transport regimes of nanogranular

• ]. Single precursor species continuum model of FEBID The single precursor species continuum model of FEBID assumes a weak precursor–substrate interaction of the van der Waals type and relies on a Langmuir adsorption description neglecting possible interactions between the adsorbed precursor molecules. The

• composition by variation of the dwell time can be devised. In the next subsection the continuum model will therefore be extended to a multicomponent variant. Multicomponent extension of the continuum model The extension of the model described above to the multicomponent case was first introduced by Lobo and

Modeling noncontact atomic force microscopy resolution on corrugated surfaces

• Kristen M. Burson,
• Mahito Yamamoto and
• William G. Cullen

Beilstein J. Nanotechnol. 2012, 3, 230–237, doi:10.3762/bjnano.3.26

• modeling of tip–surface interactions for the case of a corrugated surface. We discuss the issues that arise when the surface is corrugated on relatively small length scales (our best measurements on SiO2 yield a correlation length of 8–10 nm). We develop a continuum model that explicitly accounts for a

• 0.26 nm to the surface). The limits on wa–s carry over directly into limits on Wt–s, as we only integrate the tip potential where the integrand is defined. Thus within our continuum model with a perfectly rigid tip and substrate, we cannot generally take the tip into the regime in which the overall