Modeling and optimization of atomic layer deposition processes on vertically aligned carbon nanotubes

• Nuri Yazdani,
• Vipin Chawla,
• Eve Edwards,
• Vanessa Wood,
• Hyung Gyu Park and
• Ivo Utke

Beilstein J. Nanotechnol. 2014, 5, 234–244, doi:10.3762/bjnano.5.25

• been applied in battery [2][3][4][5] and supercapacitor electrodes [6][7][8][9][10][11][12], fuel cells [13], and sensors [14][15][16][17]. For many of the proposed applications of these CNT/ceramic hybrids, the performances of the devices depend crucially on the thickness and conformality of the