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Search for "chemical vapor deposition (CVD)" in Full Text gives 109 result(s) in Beilstein Journal of Nanotechnology.

Localized growth of carbon nanotubes via lithographic fabrication of metallic deposits

  • Fan Tu,
  • Martin Drost,
  • Imre Szenti,
  • Janos Kiss,
  • Zoltan Kónya and
  • Hubertus Marbach

Beilstein J. Nanotechnol. 2017, 8, 2592–2605, doi:10.3762/bjnano.8.260

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  • morphology, for example, as individual nanotubes or as CNT forests. Electron beam induced deposition (EBID) with subsequent autocatalytic growth (AG) was applied to lithographically produce catalytically active seeds for the localized growth of CNTs via chemical vapor deposition (CVD). With the precursor Fe
  • storage [1][2][3][4]. The most common synthesis method for CNTs is chemical vapor deposition (CVD) [5][6][7][8], in which statistically distributed, metal-containing particles act as catalysts for CNT growth. Thereby, not only does the random position of the catalyst particles determine the position of
  • (300:30:30 sccm). (d) Auger electron spectrum of the indicated Fe deposit. SEM micrographs of Fe EBID deposits before and after the chemical vapor deposition (CVD) experiment (1163 K, N2:H2:C2H4 300:30:30 sccm). Fe deposits fabricated with (a) 0.25 nC, (b) 0.5 nC, (c) 1.2 nC electron dose per point. (d
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Published 05 Dec 2017

Interface conditions of roughness-induced superoleophilic and superoleophobic surfaces immersed in hexadecane and ethylene glycol

  • Yifan Li,
  • Yunlu Pan and
  • Xuezeng Zhao

Beilstein J. Nanotechnol. 2017, 8, 2504–2514, doi:10.3762/bjnano.8.250

Graphical Abstract
  • function layer (thickness ca. 20 nm) by chemical vapor deposition (CVD), one drop (about 0.1 mL) of methyltrichlorosilane (methylsilane, Sigma Aldrich) was placed next to the samples under sealing and left for 10 h. To prepare the superoleophobic surface, the same materials and processes as for
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Published 27 Nov 2017

Dissociative electron attachment to coordination complexes of chromium: chromium(0) hexacarbonyl and benzene-chromium(0) tricarbonyl

  • Janina Kopyra,
  • Paulina Maciejewska and
  • Jelena Maljković

Beilstein J. Nanotechnol. 2017, 8, 2257–2263, doi:10.3762/bjnano.8.225

Graphical Abstract
  • [1][2][3]. However, they also play an important role in nanotechnology. In fact, a number of organometallic complexes, originally designed for chemical vapor deposition (CVD) purposes, have also been recognized as promising precursors for focused electron beam induced deposition (FEBID), a process to
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Published 30 Oct 2017

A systematic study of the controlled generation of crystalline iron oxide nanoparticles on graphene using a chemical etching process

  • Peter Krauß,
  • Jörg Engstler and
  • Jörg J. Schneider

Beilstein J. Nanotechnol. 2017, 8, 2017–2025, doi:10.3762/bjnano.8.202

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  • Peter Krauss Jorg Engstler Jorg J. Schneider Fachbereich Chemie, Eduard-Zintl-Institut für Anorganische und Physikalische Chemie, Technische Universität Darmstadt, Alarich-Weiss Str. 12, 64287 Darmstadt, Germany 10.3762/bjnano.8.202 Abstract Chemical vapor deposition (CVD) of carbon precursors
  • -down and bottom-up approaches to synthesize and isolate graphene, each having their own advantages and disadvantages [5][6][7][8][9][10][11][12]. The most common route to synthesize continuous, large-area graphene is chemical vapor deposition (CVD) using a carbon precursor on a planar metal catalyst
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Published 26 Sep 2017

Bi-layer sandwich film for antibacterial catheters

  • Gerhard Franz,
  • Florian Schamberger,
  • Hamideh Heidari Zare,
  • Sara Felicitas Bröskamp and
  • Dieter Jocham

Beilstein J. Nanotechnol. 2017, 8, 1982–2001, doi:10.3762/bjnano.8.199

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  • , irrespective of whether the catheter is utilized as urethral balloon catheter or as ureteral stent. Due to the high aspect ratio of the catheters (20 to 30 cm in length at with a small lumen of maximal 1 or 3 mm), the only technique to achieve a double-sided coating is chemical vapor deposition (CVD). A
  • coating, because it forms the very stable complex [Ag(NH3)2]+, which dissolves a possible precipitate of AgCl [19]. 3. Among the various deposition techniques, chemical vapor deposition (CVD) is known for its outstanding conformal coatings, in particular on three-dimensional substrates. Because the
  • parylene N (N denotes an unsubstituted benzene ring, in contrast to, e.g., PPX-C, which denotes a benzene ring with one Cl atom). PPX, a material with teflon-like properties, has been certified as harmless by the FDA. Poly(p-xylylene) PPX is deposited by low-pressure chemical vapor deposition (CVD) in a
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Published 22 Sep 2017

Parylene C as a versatile dielectric material for organic field-effect transistors

  • Tomasz Marszalek,
  • Maciej Gazicki-Lipman and
  • Jacek Ulanski

Beilstein J. Nanotechnol. 2017, 8, 1532–1545, doi:10.3762/bjnano.8.155

Graphical Abstract
  • under the commercial name of parylenes, is unique in many ways. It is a synthetic path for polymer formation, at the same time it belongs to the category of chemical vapor deposition (CVD) and, as such, it yields products in a form of conformal solid films depositing at any surface exposed. As a CVD
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Published 28 Jul 2017

Adsorption and electronic properties of pentacene on thin dielectric decoupling layers

  • Sebastian Koslowski,
  • Daniel Rosenblatt,
  • Alexander Kabakchiev,
  • Klaus Kuhnke,
  • Klaus Kern and
  • Uta Schlickum

Beilstein J. Nanotechnol. 2017, 8, 1388–1395, doi:10.3762/bjnano.8.140

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  • at 1073 K for 5 min. A h-BN layer was grown by chemical vapor deposition (CVD) by heating the Rh(111) sample to 1073 K and exposing it to 110 L of borazine ((HBNH)3) gas. h-BN grows in a self-terminating growth process [22] on the (111) surface of the crystal. The KCl layers on various metal surfaces
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Published 06 Jul 2017

Micro- and nano-surface structures based on vapor-deposited polymers

  • Hsien-Yeh Chen

Beilstein J. Nanotechnol. 2017, 8, 1366–1374, doi:10.3762/bjnano.8.138

Graphical Abstract
  • technologies for vapor-based coatings largely depend on adaptation from these lithographical approaches (Figure 1). A DNA array was fabricated in a photolithographical liftoff process on a vapor-deposited (chemical vapor deposition, CVD) poly-p-xylylene surface, and the resulting array surface showed excellent
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Published 04 Jul 2017

Preparation of thick silica coatings on carbon fibers with fine-structured silica nanotubes induced by a self-assembly process

  • Benjamin Baumgärtner,
  • Hendrik Möller,
  • Thomas Neumann and
  • Dirk Volkmer

Beilstein J. Nanotechnol. 2017, 8, 1145–1155, doi:10.3762/bjnano.8.116

Graphical Abstract
  • study is the deposition of nanostructured silica onto the surface of carbon fibers. Among other techniques of covering the carbon fiber surface with a silicon dioxide layer (or other ceramic coatings), the most common ones are chemical vapor deposition (CVD) [4], liquid phase impregnation [5] and sol
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Published 26 May 2017

The integration of graphene into microelectronic devices

  • Guenther Ruhl,
  • Sebastian Wittmann,
  • Matthias Koenig and
  • Daniel Neumaier

Beilstein J. Nanotechnol. 2017, 8, 1056–1064, doi:10.3762/bjnano.8.107

Graphical Abstract
  • , epitaxy on silicon carbide or chemical vapor deposition (CVD) on catalytic metals [5]. Besides meeting the requirements of film quality and cost, the scalability to 200 or 300 mm wafer sizes is crucial for being suitable for industrial production. Currently, the highest-quality graphene synthesis method
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Published 15 May 2017

Needs and challenges for assessing the environmental impacts of engineered nanomaterials (ENMs)

  • Michelle Romero-Franco,
  • Hilary A. Godwin,
  • Muhammad Bilal and
  • Yoram Cohen

Beilstein J. Nanotechnol. 2017, 8, 989–1014, doi:10.3762/bjnano.8.101

Graphical Abstract
  • assessment of carbon nanotubes (CNTs) reported by Eckelman et al. [38]. This latter study compared the environmental impacts (in freshwater) of chemical releases resulting from the manufacture (e.g., arc ablation, chemical vapor deposition (CVD), and high-pressure carbon monoxide (HiPco)) for a hypothetical
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Published 05 May 2017

Investigation of growth dynamics of carbon nanotubes

  • Marianna V. Kharlamova

Beilstein J. Nanotechnol. 2017, 8, 826–856, doi:10.3762/bjnano.8.85

Graphical Abstract
  • developing the methods of their efficient synthesis. During last years, significant progress was made in this field. The arc-discharge, laser ablation and chemical vapor deposition (CVD) methods were optimized for the synthesis of SWCNTs in a high yield [5][6]. Synthesis parameters can be varied in a broad
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Published 11 Apr 2017

3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity

  • Brett B. Lewis,
  • Robert Winkler,
  • Xiahan Sang,
  • Pushpa R. Pudasaini,
  • Michael G. Stanford,
  • Harald Plank,
  • Raymond R. Unocic,
  • Jason D. Fowlkes and
  • Philip D. Rack

Beilstein J. Nanotechnol. 2017, 8, 801–812, doi:10.3762/bjnano.8.83

Graphical Abstract
  • sufficient to initiate carbon removal without inducing significant thermal drift and/or laser chemical vapor deposition (CVD). Laser pulses are delivered to the sample with an optical working distance of 9 mm using a multi-mode 100 µm diameter fiber optic cable housed within a stainless steel shaft with
  • situation at elevated temperatures. MeCpPt(IV)Me3 was originally developed for use as a thermal chemical vapor deposition (CVD) precursor [75]; the thermal decomposition temperature on the order of 120 °C in the presence of H2 results in pure Pt films. Thus, with LAEBID we leverage the pulsed thermal energy
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Published 07 Apr 2017

Vapor deposition routes to conformal polymer thin films

  • Priya Moni,
  • Ahmed Al-Obeidi and
  • Karen K. Gleason

Beilstein J. Nanotechnol. 2017, 8, 723–735, doi:10.3762/bjnano.8.76

Graphical Abstract
  • , USA 10.3762/bjnano.8.76 Abstract Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor
  • coats the substrate geometry (Figure 1c) [1]. Several chemical vapor deposition (CVD) techniques result in highly conformal polymer films. For instance, emerging techniques such as molecular layer deposition (MLD) and oxidative CVD (oCVD) form conformal metalucone and step-growth polymer films [10][11
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Published 28 Mar 2017

Ion beam profiling from the interaction with a freestanding 2D layer

  • Ivan Shorubalko,
  • Kyoungjun Choi,
  • Michael Stiefel and
  • Hyung Gyu Park

Beilstein J. Nanotechnol. 2017, 8, 682–687, doi:10.3762/bjnano.8.73

Graphical Abstract
  • vapor deposition (CVD) according to a previously developed method [19]. This method is optimized for maximal grain connectivity resulting in uniform graphene films. Then, graphene was transferred to silicon/silicon-nitride frames with openings of a few micrometers in diameter. A PMMA-based graphene
  • critical steps towards ion beam profiling using this method. Results and Discussion One of the most crucial aspects of ion beam profiling via the direct interaction with suspended graphene is the preparation of the ultraclean graphene membranes. First, graphene was grown on a copper foil using chemical
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Published 23 Mar 2017

Gas sensing properties of MWCNT layers electrochemically decorated with Au and Pd nanoparticles

  • Elena Dilonardo,
  • Michele Penza,
  • Marco Alvisi,
  • Riccardo Rossi,
  • Gennaro Cassano,
  • Cinzia Di Franco,
  • Francesco Palmisano,
  • Luisa Torsi and
  • Nicola Cioffi

Beilstein J. Nanotechnol. 2017, 8, 592–603, doi:10.3762/bjnano.8.64

Graphical Abstract
  • MWCNTs, for gas sensing applications. Experimental Preparation of metal-decorated MWCNT-based chemiresistors MWCNT networked films were grown by chemical vapor deposition (CVD) directly onto the surface of an alumina substrate that was previously coated with a cobalt (Co) sputtered catalytic layer (≈6 nm
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Published 10 Mar 2017

Advances in the fabrication of graphene transistors on flexible substrates

  • Gabriele Fisichella,
  • Stella Lo Verso,
  • Silvestra Di Marco,
  • Vincenzo Vinciguerra,
  • Emanuela Schilirò,
  • Salvatore Di Franco,
  • Raffaella Lo Nigro,
  • Fabrizio Roccaforte,
  • Amaia Zurutuza,
  • Alba Centeno,
  • Sebastiano Ravesi and
  • Filippo Giannazzo

Beilstein J. Nanotechnol. 2017, 8, 467–474, doi:10.3762/bjnano.8.50

Graphical Abstract
  • transferred to the target substrate. In this sense, the use of graphene grown by chemical vapor deposition (CVD) on various metals (Ni [7], Cu [13]) and using various precursors [14] represents the most suitable choice. Among the various device architectures, Gr-FET-based sensors can represent a great
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Published 20 Feb 2017

The longstanding challenge of the nanocrystallization of 1,3,5-trinitroperhydro-1,3,5-triazine (RDX)

  • Florent Pessina and
  • Denis Spitzer

Beilstein J. Nanotechnol. 2017, 8, 452–466, doi:10.3762/bjnano.8.49

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  • rate of a continuous hydrothermal process from 1–10 tons/year to 100 tons/year for inorganic nanomaterials [123]. Tsuzuki et al. [124] statistically studied which methods for inorganic nanosynthesis are mostly employed in industry: vapor (39% mainly chemical vapor deposition (CVD)) and liquid (45
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Published 17 Feb 2017

Role of oxygen in wetting of copper nanoparticles on silicon surfaces at elevated temperature

  • Tapas Ghosh and
  • Biswarup Satpati

Beilstein J. Nanotechnol. 2017, 8, 425–433, doi:10.3762/bjnano.8.45

Graphical Abstract
  • of CuO nanostructures on Si surfaces. There are several techniques such as physical vapor deposition (PVD), chemical vapor deposition (CVD), electroplating, etc., that can be used to create Cu films. For the PVD and CVD techniques, high vacuum is required, which takes enormous effort and also
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Published 13 Feb 2017

In-situ monitoring by Raman spectroscopy of the thermal doping of graphene and MoS2 in O2-controlled atmosphere

  • Aurora Piazza,
  • Filippo Giannazzo,
  • Gianpiero Buscarino,
  • Gabriele Fisichella,
  • Antonino La Magna,
  • Fabrizio Roccaforte,
  • Marco Cannas,
  • Franco Mario Gelardi and
  • Simonpietro Agnello

Beilstein J. Nanotechnol. 2017, 8, 418–424, doi:10.3762/bjnano.8.44

Graphical Abstract
  • ] and chemical vapor deposition (CVD) on catalytic metals [9][10] followed by the poly(methyl methacrylate) (PMMA) assisted transfer [11][12], enlarged the interest and perspectives for applications. In particular in view of the realization of electronic devices and to obtain Gr-based field effect
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Published 10 Feb 2017

Nitrogen-doped twisted graphene grown on copper by atmospheric pressure CVD from a decane precursor

  • Ivan V. Komissarov,
  • Nikolai G. Kovalchuk,
  • Vladimir A. Labunov,
  • Ksenia V. Girel,
  • Olga V. Korolik,
  • Mikhail S. Tivanov,
  • Algirdas Lazauskas,
  • Mindaugas Andrulevičius,
  • Tomas Tamulevičius,
  • Viktoras Grigaliūnas,
  • Šarunas Meškinis,
  • Sigitas Tamulevičius and
  • Serghej L. Prischepa

Beilstein J. Nanotechnol. 2017, 8, 145–158, doi:10.3762/bjnano.8.15

Graphical Abstract
  • from both fundamental and applied aspects. TG can be obtained by different methods, e.g., by means of graphene folding, graphene layer stacking, thermal decomposition of SiC [9] or chemical vapor deposition (CVD) on metal catalysts [10][11]. Generally speaking, CVD is one of the most common methods to
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Published 16 Jan 2017

Nanostructured SnO2–ZnO composite gas sensors for selective detection of carbon monoxide

  • Paul Chesler,
  • Cristian Hornoiu,
  • Susana Mihaiu,
  • Cristina Vladut,
  • Jose Maria Calderon Moreno,
  • Mihai Anastasescu,
  • Carmen Moldovan,
  • Bogdan Firtat,
  • Costin Brasoveanu,
  • George Muscalu,
  • Ion Stan and
  • Mariuca Gartner

Beilstein J. Nanotechnol. 2016, 7, 2045–2056, doi:10.3762/bjnano.7.195

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  • ]. However, the addition of another oxide component described in these papers involves complicated and expensive vapor preparation techniques (e.g., chemical vapor deposition (CVD) or physical vapor deposition (PVD), ion-beam or laser-assisted techniques, spray pyrolysis), expensive dedicated equipment (e.g
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Published 22 Dec 2016

Surface roughness rather than surface chemistry essentially affects insect adhesion

  • Matt W. England,
  • Tomoya Sato,
  • Makoto Yagihashi,
  • Atsushi Hozumi,
  • Stanislav N. Gorb and
  • Elena V. Gorb

Beilstein J. Nanotechnol. 2016, 7, 1471–1479, doi:10.3762/bjnano.7.139

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  • , hydrophobic monolayer-covered surfaces, terminated with octadecylsilyl (CH3(CH2)17-) or perfluoroalkyl (CF3(CF2)7CH2CH2-) groups, were prepared using chemical vapor deposition (CVD) of ODS or FAS17 [36], respectively. UV–ozone treated Si substrates (2 × 2 cm2 and 5 × 5 cm2) were placed on a heat-resistant
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Published 18 Oct 2016

Dealloying of gold–copper alloy nanowires: From hillocks to ring-shaped nanopores

  • Adrien Chauvin,
  • Cyril Delacôte,
  • Mohammed Boujtita,
  • Benoit Angleraud,
  • Junjun Ding,
  • Chang-Hwan Choi,
  • Pierre-Yves Tessier and
  • Abdel-Aziz El Mel

Beilstein J. Nanotechnol. 2016, 7, 1361–1367, doi:10.3762/bjnano.7.127

Graphical Abstract
  • [6][7]. The formation of hillocks has been encountered in case of various processes such as evaporation and sputtering [7][8][9], ion beam assisted deposition (IBAD) [10][11], chemical vapor deposition (CVD) [12][13] and electroplating [14]. Hillocks are the outcome of a nodular growth taking place
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Published 29 Sep 2016

Reasons and remedies for the agglomeration of multilayered graphene and carbon nanotubes in polymers

  • Rasheed Atif and
  • Fawad Inam

Beilstein J. Nanotechnol. 2016, 7, 1174–1196, doi:10.3762/bjnano.7.109

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  • SWNT, i.e., the area of a parallelogram OACB, and δ is the distance between nearest-neighbor C–C atoms in adjacent SWNTs (0.34 nm for the ideal case) [42]. The value obtained for close-packed SWNTs produced by catalytic chemical vapor deposition (CVD) is about one order of magnitude lesser than that of
  • feedstock on catalyst particles, i.e., chemical vapor deposition (CVD) [2][36]. CNT can be produced by using organo-metallic compounds as precursor (e.g., ferrocene), a carbon feedstock (e.g., toluene) and a carrier gas (e.g., hydrogen) [130]. It is difficult to control the diameter of the nanotubes
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Published 12 Aug 2016
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