A top-down approach for fabricating three-dimensional closed hollow nanostructures with permeable thin metal walls

• Carlos Angulo Barrios and
• Víctor Canalejas-Tejero

Beilstein J. Nanotechnol. 2017, 8, 1231–1237, doi:10.3762/bjnano.8.124

• is typically required to create integrated systems based on multifunctional devices on a chip. For the latter purpose, top-down approaches based on fabrication methods used in the microelectronics industry are particularly well-suited because of the patterning design flexibility and controllability

The integration of graphene into microelectronic devices

• Guenther Ruhl,
• Sebastian Wittmann,
• Matthias Koenig and
• Daniel Neumaier

Beilstein J. Nanotechnol. 2017, 8, 1056–1064, doi:10.3762/bjnano.8.107

• graphene in 2004 [1] a lot of possible applications have been envisioned. Especially in the field of microelectronics graphene holds the promise for faster, more sensitive and even completely novel devices [2]. So, graphene was claimed as one possible material to overcome the foreseeable limits of silicon

• crucial for commercializing graphene for microelectronics. Additionally, substrate interactions are strongly degrading the graphene quality. Hexagonal boron nitride has been identified as the ideal substrate material, but it is not available yet in the required quality for producing wafers. In order to

• graphene metal contacts. From today’s perspective the main issues for wafer-scale integration of graphene are well known, and the future of graphene (and other two-dimensional materials, namely transition metal dichalkogenides) in microelectronics depends on the successful solution of these problems

CVD transfer-free graphene for sensing applications

• Chiara Schiattarella,
• Sten Vollebregt,
• Tiziana Polichetti,
• Brigida Alfano,
• Ettore Massera,
• Maria Lucia Miglietta,
• Girolamo Di Francia and
• Pasqualina Maria Sarro

Beilstein J. Nanotechnol. 2017, 8, 1015–1022, doi:10.3762/bjnano.8.102

• Microelectronics, Delft, The Netherlands ENEA C.R. Piazzale Enrico Fermi, 1, 80055 Portici (Naples), Italy 10.3762/bjnano.8.102 Abstract The sp2 carbon-based allotropes have been extensively exploited for the realization of gas sensors in the recent years because of their high conductivity and large specific

Vapor-phase-synthesized fluoroacrylate polymer thin films: thermal stability and structural properties

• Paul Christian and
• Anna Maria Coclite

Beilstein J. Nanotechnol. 2017, 8, 933–942, doi:10.3762/bjnano.8.95

• surfaces are used as biocompatible surfaces [1], antifouling coatings [2], and as low dielectric constant materials [3] for microelectronics. Perfluoroacrylates are particularly appealing for such applications, as they combine the hydrophobic properties of the fluorinated pendant groups with easy

Self-assembly of silicon nanowires studied by advanced transmission electron microscopy

• Marta Agati,
• Guillaume Amiard,
• Vincent Le Borgne,
• Paola Castrucci,
• Richard Dolbec,
• Maurizio De Crescenzi,
• My Alì El Khakani and
• Simona Boninelli

Beilstein J. Nanotechnol. 2017, 8, 440–445, doi:10.3762/bjnano.8.47

• dimensionality to be used as building blocks to improve the functionality of next-generation devices [2]. So far, conventional manufacturing processes based on top-down methods have been employed in Si-based microelectronics. These methods have encountered, among others, a non-trivial issue related to the cost

Influence of hydrofluoric acid treatment on electroless deposition of Au clusters

• Rachela G. Milazzo,
• Antonio M. Mio,
• Giuseppe D’Arrigo,
• Emanuele Smecca,
• Alessandra Alberti,
• Gabriele Fisichella,
• Filippo Giannazzo,
• Corrado Spinella and
• Emanuele Rimini

Beilstein J. Nanotechnol. 2017, 8, 183–189, doi:10.3762/bjnano.8.19

• Rachela G. Milazzo Antonio M. Mio Giuseppe D'Arrigo Emanuele Smecca Alessandra Alberti Gabriele Fisichella Filippo Giannazzo Corrado Spinella Emanuele Rimini CNR-IMM Institute for the Microelectronics and Microsystems, Z. I. VIII Strada 4, Catania, I-95121, Italy Department of Physics and

Photo-ignition process of multiwall carbon nanotubes and ferrocene by continuous wave Xe lamp illumination

• Paolo Visconti,
• Patrizio Primiceri,
• Daniele Longo,
• Luciano Strafella,
• Paolo Carlucci,
• Mauro Lomascolo,
• Arianna Cretì and
• Giuseppe Mele

Beilstein J. Nanotechnol. 2017, 8, 134–144, doi:10.3762/bjnano.8.14

• Paolo Visconti Patrizio Primiceri Daniele Longo Luciano Strafella Paolo Carlucci Mauro Lomascolo Arianna Creti Giuseppe Mele Department of Innovation Engineering, University of Salento, Lecce 73100, Italy Institute for Microelectronics and Microsystems - IMM-CNR, Department of Lecce, University

Annealing-induced recovery of indents in thin Au(Fe) bilayer films

• Anna Kosinova,
• Ruth Schwaiger,
• Leonid Klinger and
• Eugen Rabkin

Beilstein J. Nanotechnol. 2016, 7, 2088–2099, doi:10.3762/bjnano.7.199

• energy of the system. Since a wide range of applications of thin metal films in the microelectronics requires featureless and defect-free surfaces, the knowledge of the effect of localized plastic strain on dewetting is of high practical importance. Surface and interface defects, such as grooves at grain

Low temperature co-fired ceramic packaging of CMOS capacitive sensor chip towards cell viability monitoring

• Niina Halonen,
• Joni Kilpijärvi,
• Maciej Sobocinski,
• Timir Datta-Chaudhuri,
• Antti Hassinen,
• Someshekar B. Prakash,
• Peter Möller,
• Pamela Abshire,
• Sakari Kellokumpu and
• Anita Lloyd Spetz

Beilstein J. Nanotechnol. 2016, 7, 1871–1877, doi:10.3762/bjnano.7.179

• Niina Halonen Joni Kilpijarvi Maciej Sobocinski Timir Datta-Chaudhuri Antti Hassinen Someshekar B. Prakash Peter Moller Pamela Abshire Sakari Kellokumpu Anita Lloyd Spetz Microelectronics Research Unit, Faculty of Information Technology and Electrical Engineering, P.O.Box 4500, FI-90014 University

Dealloying of gold–copper alloy nanowires: From hillocks to ring-shaped nanopores

• Adrien Chauvin,
• Cyril Delacôte,
• Mohammed Boujtita,
• Benoit Angleraud,
• Junjun Ding,
• Chang-Hwan Choi,
• Pierre-Yves Tessier and
• Abdel-Aziz El Mel

Beilstein J. Nanotechnol. 2016, 7, 1361–1367, doi:10.3762/bjnano.7.127

• fields including microelectronics, optics, biotechnology and protective coatings [2]. In the last few years, PVD started to be used for the growth of one-dimensional (1D) nanostructures such as nanowires [3], nanorods [4] and nanosprings [5]. Although such approaches are very practical, controlling the

Effects of electronic coupling and electrostatic potential on charge transport in carbon-based molecular electronic junctions

• Richard L. McCreery

Beilstein J. Nanotechnol. 2016, 7, 32–46, doi:10.3762/bjnano.7.4

• possibility of electronic components that are smaller than existing transistors or diodes, have unusual properties not possible with conventional semiconductors, use less power, or are cheaper than existing microelectronics. A basic element of Molecular Electronics is the “molecular junction (MJ)” consisting

Low-cost formation of bulk and localized polymer-derived carbon nanodomains from polydimethylsiloxane

• Juan Carlos Castro Alcántara,
• Mariana Cerda Zorrilla,
• Lucia Cabriales,
• Luis Manuel León Rossano and
• Mathieu Hautefeuille

Beilstein J. Nanotechnol. 2015, 6, 744–748, doi:10.3762/bjnano.6.76

• resistant materials for aerospace and automotive industry, microelectronics, optics and even biotechnology [1]. Recent efforts have been made to properly control and characterize the production of various forms of PDC pyrolysing different preceramic polymers. Coatings, fibres and orderly porous components

Tunable white light emission by variation of composition and defects of electrospun Al₂O₃–SiO₂ nanofibers

• Jinyuan Zhou,
• Gengzhi Sun,
• Hao Zhao,
• Xiaojun Pan,
• Zhenxing Zhang,
• Yujun Fu,
• Yanzhe Mao and
• Erqing Xie

Beilstein J. Nanotechnol. 2015, 6, 313–320, doi:10.3762/bjnano.6.29

• elements [5][6][7][8][9]. Among those materials, Al2O3 is one of the most important materials in the history of ceramics, and has been extensively applied in catalysts, coatings, microelectronics and various devices, due to its excellent physical and chemical stability, high dielectric constant, wide band

Gas sensing properties of nanocrystalline diamond at room temperature

• Marina Davydova,
• Pavel Kulha,
• Alexandr Laposa,
• Karel Hruska,
• Pavel Demo and
• Alexander Kromka

Beilstein J. Nanotechnol. 2014, 5, 2339–2345, doi:10.3762/bjnano.5.243

• Marina Davydova Pavel Kulha Alexandr Laposa Karel Hruska Pavel Demo Alexander Kromka Institute of Physics, Academy of Science of the Czech Republic, Cukrovarnicka 10, 16200 Prague, Czech Republic Department of Microelectronics, Faculty of Electrical Engineering, CTU in Prague, Technicka 2, 16627

Carbon-based smart nanomaterials in biomedicine and neuroengineering

• Antonina M. Monaco and
• Michele Giugliano

Beilstein J. Nanotechnol. 2014, 5, 1849–1863, doi:10.3762/bjnano.5.196

• high mechanical strength [7], while at the same time exhibiting a very low weight. Combined with a large surface area, these electronic and mechanical properties give CNTs a great potential for microelectronics and optics, and also for biomedical applications (e.g., as nanoelectrodes for neural

Silicon and germanium nanocrystals: properties and characterization

• Ivana Capan,
• Alexandra Carvalho and
• José Coutinho

Beilstein J. Nanotechnol. 2014, 5, 1787–1794, doi:10.3762/bjnano.5.189

• each other, and one-particle calculations actually give accurate values for the excitonic gap(s). III.2.2 Doping of Si nanocrystals: The deliberate introduction of dopants into materials lies at the heart of microelectronics. A prototypical example is the replacement of a few lattice sites in a billion

Self-organization of mesoscopic silver wires by electrochemical deposition

• Sheng Zhong,
• Thomas Koch,
• Stefan Walheim,
• Harald Rösner,
• Eberhard Nold,
• Aaron Kobler,
• Torsten Scherer,
• Di Wang,
• Christian Kübel,
• Mu Wang,
• Horst Hahn and
• Thomas Schimmel

Beilstein J. Nanotechnol. 2014, 5, 1285–1290, doi:10.3762/bjnano.5.142

• wires as building blocks for microelectronics requires good chemical stability, especially the stability against oxidation under ambient conditions. For most metallic microstructures, however, stability against oxidation is a challenge. The reason is that reducing the length scale means increasing the

Organic and inorganic–organic thin film structures by molecular layer deposition: A review

• Pia Sundberg and
• Maarit Karppinen

Beilstein J. Nanotechnol. 2014, 5, 1104–1136, doi:10.3762/bjnano.5.123

• , including microelectronics, catalysis, energy applications and protective/barrier coatings. The history of ALD goes back to the 1960s and 1970s [1][2][3][4]. Traditionally, ALD has been used to fabricate rather simple well-known inorganic materials, such as binary oxides and nitrides. The range of materials

Routes to rupture and folding of graphene on rough 6H-SiC(0001) and their identification

• M. Temmen,
• O. Ochedowski,
• B. Kleine Bussmann,
• M. Schleberger,
• M. Reichling and
• T. R. J. Bollmann

Beilstein J. Nanotechnol. 2013, 4, 625–631, doi:10.3762/bjnano.4.69

• microelectronics technology [3], in which especially bilayer graphene (BLG) is of interest, as its band gap can be tuned [4]. Although the electronic properties of AB-stacked (Bernal) BLG is of special interest due to its tunable bandgap, rotationally stacked or twisted BLG is more attractive from an application

High-resolution electrical and chemical characterization of nm-scale organic and inorganic devices

• Pierre Eyben

Beilstein J. Nanotechnol. 2013, 4, 318–319, doi:10.3762/bjnano.4.35

• Pierre Eyben IMEC VZW, Kapeldreef 75, 3001 Leuven, Belgium 10.3762/bjnano.4.35 Almost ever since the advent of the microelectronics adventure, silicon-based MOSFET (metal–oxide–semiconductor field-effect transistor) technology has been largely dominant. However, for a few years now this

A look underneath the SiO₂/4H-SiC interface after N₂O thermal treatments

• Patrick Fiorenza,
• Filippo Giannazzo,
• Lukas K. Swanson,
• Alessia Frazzetto,
• Simona Lorenti,
• Mario S. Alessandrino and
• Fabrizio Roccaforte

Beilstein J. Nanotechnol. 2013, 4, 249–254, doi:10.3762/bjnano.4.26

• experimental values. Acknowledgements The authors would like to thank S. Di Franco for his support during fabrication of the device prototypes. ST Microelectronics R&D in Catania is acknowledged for funding and invaluable assistance. This work was partially funded by the Marie Curie ITN NetFISiC (EC FP7 grant

• agreement no. 264613), by the national project PON Ambition Power (PON01_00700), and by ST Microelectronics, Catania (under the research contract 04.03.2011.002 D.B. Legal Dept. 3774).

Micro- and nanoscale electrical characterization of large-area graphene transferred to functional substrates

• Gabriele Fisichella,
• Salvatore Di Franco,
• Patrick Fiorenza,
• Raffaella Lo Nigro,
• Fabrizio Roccaforte,
• Cristina Tudisco,
• Guido G. Condorelli,
• Nicolò Piluso,
• Noemi Spartà,
• Stella Lo Verso,
• Corrado Accardi,
• Cristina Tringali,
• Sebastiano Ravesi and
• Filippo Giannazzo

Beilstein J. Nanotechnol. 2013, 4, 234–242, doi:10.3762/bjnano.4.24

• properties of the graphene membrane. In this paper, we investigated the morphological and electrical properties of CVD graphene transferred onto SiO2 and on a polymeric substrate (poly(ethylene-2,6-naphthalene dicarboxylate), briefly PEN), suitable for microelectronics and flexible electronics applications

• microelectronics; poly(ethylene-2,6-naphthalene dicarboxylate) or PEN, a transparent polymer analogue to the more common PET, but with stronger mechanical resistance, higher degradation temperature and higher chemical inertness in acid and alkaline conditions, which can be useful for transparent and flexible

Electron-beam patterned self-assembled monolayers as templates for Cu electrodeposition and lift-off

• Zhe She,
• Andrea DiFalco,
• Georg Hähner and
• Manfred Buck

Beilstein J. Nanotechnol. 2012, 3, 101–113, doi:10.3762/bjnano.3.11

• -off (Figure 7b). We ascribe this to nonvertical growth of the trench walls due to transport-limited deposition, similar to subconformal Cu deposition in microelectronics [55][56]. Besides the definition of the lateral dimensions, another point of interest is the surface topography. Reminding ourselves

X-ray spectroscopy characterization of self-assembled monolayers of nitrile-substituted oligo(phenylene ethynylene)s with variable chain length

• Hicham Hamoudi,
• Ping Kao,
• Alexei Nefedov,
• David L. Allara and
• Michael Zharnikov

Beilstein J. Nanotechnol. 2012, 3, 12–24, doi:10.3762/bjnano.3.2

• semiconductor microelectronics devices, although very efficient and compact, are being pushed to their physical limits in terms of further miniaturization with associated issues such as electrical leakage and heat dissipation, and hence this is driving consideration of entirely new types of platforms. One

Self-assembled monolayers and titanium dioxide: From surface patterning to potential applications

• Yaron Paz

Beilstein J. Nanotechnol. 2011, 2, 845–861, doi:10.3762/bjnano.2.94

• areas of photovoltaics, microelectronics, microelectromechanics, photocatalysis, corrosion prevention and even biomedicine should be regarded as appetizers paving the way for further studies to be performed. Keywords: photocatalysis; remote degradation; self-assembled monolayers; titanium dioxide