Beilstein J. Nanotechnol.2012,3, 703–711, doi:10.3762/bjnano.3.80
Prior to the electron-beam lithography process, a thin polyimide layer and a double layer of electron-beam resists, MMA-MAA/PMMA, were deposited by spincoating on the wafer and soft-baked in an oven at 170 °C. The polyimide layer served for both planarization of the commercial glass substrate and for
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Figure 1:
SEM image of the Au electrodes; the gap between the two segments, distinguishable by the border of ...