Precise in situ etch depth control of multilayered III−V semiconductor samples with reflectance anisotropy spectroscopy (RAS) equipment

• Ann-Kathrin Kleinschmidt,
• Lars Barzen,
• Johannes Strassner,
• Christoph Doering,
• Henning Fouckhardt,
• Wolfgang Bock,
• Michael Wahl and
• Michael Kopnarski

Beilstein J. Nanotechnol. 2016, 7, 1783–1793, doi:10.3762/bjnano.7.171

• especially thank Thomas Loeber from the NSC for SEM micrographs (not shown in this paper) to measure the etch depth achieved in step II of the application part with an FEI FIB/SEM Helios Nanolab 650. The SEM images actually displayed here (for other reasons) have been recorded with a Hitachi SU8000 of the

Thickness-modulated tungsten–carbon superconducting nanostructures grown by focused ion beam induced deposition for vortex pinning up to high magnetic fields

• Ismael García Serrano,
• Javier Sesé,
• Isabel Guillamón,
• Hermann Suderow,
• Sebastián Vieira,
• Manuel Ricardo Ibarra and
• José María De Teresa

Beilstein J. Nanotechnol. 2016, 7, 1698–1708, doi:10.3762/bjnano.7.162

• ] and insertion of structural defects [35][37][43] are other common pinning strategies. The use of a focused ion beam (FIB) for enhanced vortex pinning through local removal of the superconducting material has been explored as well [40][42][46][47][48]. In contrast to our approach followed here, such

• previous work has focused on the use of FIB for milling instead of deposition and the pinning has not been observed up to high magnetic fields, as it was for our case. Additionally, thickness modulation is known to produce vortex-pinning effects due to the dependence of the vortex energy with its length

• in the present work from 60 to 140 nm, which allows us to determine the effect of its commensurability with the intervortex distance. The W–C deposits have been grown by FIBID inside commercial Helios 650 dual-beam equipment from FEI, which includes a Ga+ FIB column. The equipment includes a gas

Customized MFM probes with high lateral resolution

• Óscar Iglesias-Freire,
• Miriam Jaafar,
• Eider Berganza and
• Agustina Asenjo

Beilstein J. Nanotechnol. 2016, 7, 1068–1074, doi:10.3762/bjnano.7.100

• , either by using focused ion beam (FIB) milled tips [1][2], electron beam deposited tips [3][4] or stencil-deposited metal dots onto an AFM tip [5]. Following a different approach, probes with carbon nanotubes (CNTs) have been fabricated for MFM imaging either by mechanical attachment [6][7][8] or direct

Signal enhancement in cantilever magnetometry based on a co-resonantly coupled sensor

• Julia Körner,
• Christopher F. Reiche,
• Thomas Gemming,
• Bernd Büchner,
• Gerald Gerlach and
• Thomas Mühl

Beilstein J. Nanotechnol. 2016, 7, 1033–1043, doi:10.3762/bjnano.7.96

• insensitive cantilever. Sensor fabrication Based on the theoretical considerations we fabricated a magnetometry sensor consisting of a commercially available tipless silicon cantilever and an iron-filled carbon nanotube. All productions steps were carried out in a Zeiss FIB CrossBeam 1540 XB under high vacuum

• Bext = 1 T. Acknowledgements We thank Siegfried Menzel for supporting the FIB preparation work and Uhland Weissker for preparing the FeCNT sample. This work was funded by the DFG (Grant No. MU 1794/3-2).

Magnetic switching of nanoscale antidot lattices

• Ulf Wiedwald,
• Joachim Gräfe,
• Kristof M. Lebecki,
• Maxim Skripnik,
• Felix Haering,
• Gisela Schütz,
• Paul Ziemann,
• Eberhard Goering and
• Ulrich Nowak

Beilstein J. Nanotechnol. 2016, 7, 733–750, doi:10.3762/bjnano.7.65

• – into thin films. Such antidots act as an inner surface of the materials leading to strong variations of optical [1][2], electrical [3][4], superconducting [5][6], or magnetic properties [7]. Nowadays, top-down approaches like e-beam lithography [8][9] or focused ion beam milling (FIB) [10] and bottom

• × 2 × 10 nm3) [28]. As will be shown later in connection with the anisotropic magnetoresistance (AMR) the major part of the total resistance arises from the 2.5 × 20 µm2 FIB-cut constriction. But still the continuous antidot film surrounding the channel influences the magnetic switching via dipolar

• mm2 sample used for SQUID magnetometry or magnetotransport measurements. However, slight modifications by FIB cutting offers an easy way to address the anisotropic in-plane properties by means of magnetotransport measurements. This is achieved by channelling the electrical current through a narrow

Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

• Christian Ganser,
• Gerhard Fritz-Popovski,
• Roland Morak,
• Parvin Sharifi,
• Benedetta Marmiroli,
• Barbara Sartori,
• Heinz Amenitsch,
• Thomas Griesser,
• Christian Teichert and
• Oskar Paris

Beilstein J. Nanotechnol. 2016, 7, 637–644, doi:10.3762/bjnano.7.56

• actuation experiment was prepared with focused ion beam (FIB) cutting using an AURIGA Crossbeam Workstation (Zeiss). Scanning electron microscopy (SEM) images of the sample cross-section were taken with the same instrument with the electron microscope operated at a voltage of 2 keV. GISAXS: measurements and

• the backscattered electron contrast, revealing bright contrast for the Au coating at the top, and the additional Pt coating required for clean FIB cutting at the bottom of the image. A compact silica film with only few defects formed on the bottom (hydrophilic) side of the silicon substrate. This film

• contingent at the SAXS beamline. We thank B. Sartory (Materials Center Leoben) for FIB sample preparation and for SEM measurements, and E. Bucher (Chair of Physical Chemistry, Montanuniversitaet Leoben) for the calcination of the samples.

In situ observation of deformation processes in nanocrystalline face-centered cubic metals

• Aaron Kobler,
• Christian Brandl,
• Horst Hahn and
• Christian Kübel

Beilstein J. Nanotechnol. 2016, 7, 572–580, doi:10.3762/bjnano.7.50

• holes was measured by AFM to be 1.3 nm for the ncPda film (Supporting Information File 1, Figure S2). The thickness of the films (ncPda ≈50 nm; ncAuPda ≈50 nm) was measured from FIB cross sections. The ncPda metal films were annealed in situ for ≈1 min at 300 °C and ≈18 min at 300 °C plus an additional

• S1). A FEI Strata 400S dual beam FIB was used to transfer the metal C films to the push-to-pull (PTP) device (Hysitron) (Supporting Information File 1, Figure S1c,d) and to cut the films using an acceleration voltage of 30 kV and a beam current of 980 nA. The final shaping of the dog bone straining

• inspiring discussions and feedback. We thank Paul Vincze, Karlsruhe Institute of Technology (KIT) for the AFM measurements and Torsten Scherer as well as Robby Prang, Karlsruhe Institute of Technology (KIT) for their help with the FIB. Financial support by the German Science Foundation (DFG) as part of the

Near-field visualization of plasmonic lenses: an overall analysis of characterization errors

• Jing Wang,
• Yongqi Fu,
• Zongwei Xu and
• Fengzhou Fang

Beilstein J. Nanotechnol. 2015, 6, 2069–2077, doi:10.3762/bjnano.6.211

• elliptical slits. The focusing performance of the structures was studied before [22]. The structures can be fabricated and measured by using focused ion beam (FIB) direct writing technique and near-field scanning optical microscope (NSOM) respectively, as shown in Figure 1. However, from the point of view of

• structures, such as lensing structures based on elliptical slits, is presented and discussed in detail. Experimental The FIB milling and NSOM experiments were performed in a similar manner as described in [23]. To illuminate the lenses uniformly, sample scan is used in the near-field mapping. The aperture

• size of the fiber probe being used in this experiment is 200 nm in diameter. As a consequence, image resolution of the NSOM scanning is limited especially for probing the topography of the FIB-fabricated structure. But the phase image is still clear, as shown in Figure 1c. Considering the radius of the

Surface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte

• Sanghoon Ji,
• Waqas Hassan Tanveer,
• Wonjong Yu,
• Sungmin Kang,
• Gu Young Cho,
• Sung Han Kim,
• Jihwan An and
• Suk Won Cha

Beilstein J. Nanotechnol. 2015, 6, 1805–1810, doi:10.3762/bjnano.6.184

• deposited on BECs with different thicknesses, whose cross-sectional microstructure was investigated by focused ion beam and field emission scanning electron microscopy (FIB/FE-SEM) imaging: the BECs were 40 nm and 320 nm in thickness. In case of the thinner BEC, a significant amount of ALD YSZ certainly

• fabrication processes of the Pt films are close to the ways described in our preview work [24]. Thin film characterization The film density was determined by X-ray reflectometry analysis using the X’Pert Pro (PANalytical, Netherlands) instrument. The surface microstructure was investigated by FIB/FE-SEM

Lower nanometer-scale size limit for the deformation of a metallic glass by shear transformations revealed by quantitative AFM indentation

• Arnaud Caron and
• Roland Bennewitz

Beilstein J. Nanotechnol. 2015, 6, 1721–1732, doi:10.3762/bjnano.6.176

• metallic glass samples and relate them to our results. We will then discuss alternative concepts leading to homogeneous flow and finally the role of strain rates. The investigation of the plastic flow of micro- and nano-fabricated test samples prepared from metallic glasses by focus ion beam (FIB) with

Scalable, high performance, enzymatic cathodes based on nanoimprint lithography

• Dmitry Pankratov,
• Richard Sundberg,
• Javier Sotres,
• Dmitry B. Suyatin,
• Ivan Maximov,
• Sergey Shleev and
• Lars Montelius

Beilstein J. Nanotechnol. 2015, 6, 1377–1384, doi:10.3762/bjnano.6.142

• taken using a Nova NanoLab 600 Dual Beam focused ion beam and scanning electron microscope (FIB-SEM) from FEI Company (Hillsboro, Oregon, USA). The images were taken with an immersion lens at an acceleration voltage of 30 kV and a beam current of 2.4 nA. AFM images were obtained using a Multimode VIII

Influence of the shape and surface oxidation in the magnetization reversal of thin iron nanowires grown by focused electron beam induced deposition

• Luis A. Rodríguez,
• Lorenz Deen,
• Rosa Córdoba,
• César Magén,
• Etienne Snoeck,
• Bert Koopmans and
• José M. De Teresa

Beilstein J. Nanotechnol. 2015, 6, 1319–1331, doi:10.3762/bjnano.6.136

• magnetocrystalline anisotropy effects and, as a consequence, shape anisotropy will determine the magnetic anisotropy of the wires. The Fe content determined by EELS inside the wires is around 85%, in good agreement with the EDS performed inside the FIB-SEM equipment. According to previous studies, the saturation

Structural transitions in electron beam deposited Co–carbonyl suspended nanowires at high electrical current densities

• Gian Carlo Gazzadi and
• Stefano Frabboni

Beilstein J. Nanotechnol. 2015, 6, 1298–1305, doi:10.3762/bjnano.6.134

• Strata DB235M) combining a Ga-ion focused ion beam (FIB) with a thermal field emission SEM, equipped with a Co–carbonyl (Co2(CO)8) GIS operated at room temperature (RT). The GIS is mounted at a polar angle of 52° and an azimuthal angle of 115° with respect to the sample surface. An injection nozzle with

• for a fine control of the deposition process. The nozzle-to-sample distance during deposition was about 200 μm. The samples are Au-coated (100 nm thickness) silicon nitride membranes (500 nm thick). Pairs of contact pads were patterned on gold by FIB milling, and, at the gap between the pads, a slit

Hollow plasmonic antennas for broadband SERS spectroscopy

• Gabriele C. Messina,
• Mario Malerba,
• Pierfrancesco Zilio,
• Ermanno Miele,
• Michele Dipalo,
• Lorenzo Ferrara and
• Francesco De Angelis

Beilstein J. Nanotechnol. 2015, 6, 492–498, doi:10.3762/bjnano.6.50

• proposed method is fast with respect to other approaches regarding the fabrication of the plasmonic nanostructures [24][25] including those based on FIB milling. In fact, it has been calculated that fabrication on the order of 100k structures per hour with fine spatial control and geometrical accuracy [23

Electrical properties of single CdTe nanowires

• Elena Matei,
• Camelia Florica,
• Andreea Costas,
• María Eugenia Toimil-Molares and
• Ionut Enculescu

Beilstein J. Nanotechnol. 2015, 6, 444–450, doi:10.3762/bjnano.6.45

• 200 nm Au. A dual-beam, FIB/FEG machine was employed to connect the individual nanowire with the existing interdigitated contacts. During this FIBIM process, a metal–organic gas containing platinum was injected through a nozzle close to the surface of the sample and decomposed in a precise pattern

Bright photoluminescence from ordered arrays of SiGe nanowires grown on Si(111)

• D. J. Lockwood,
• N. L. Rowell,
• A. Benkouider,
• A. Ronda,
• L. Favre and
• I. Berbezier

Beilstein J. Nanotechnol. 2014, 5, 2498–2504, doi:10.3762/bjnano.5.259

• positioned [28]. We have evolved an efficient and simple electrochemical process that joins focused-ion-beam (FIB) lithography and galvanic reaction to selectively prepare gold nanoparticles in well-defined locations. Afterwards these nanoparticles are used for the molecular beam epitaxy (MBE) growth of

• ordered SiGe NW arrays with predefined NW positions and diameters. Here we report on the optical properties of such MBE grown NWs. Experimental A schematic overview of the various steps used in the growth process is given in Figure 1. The steps consisted of: (a) rapid thermal oxidation (RTO); (b) FIB

• -thin (5 nm thick) SiO2 thermal oxide (UTO) that was obtained by rapid thermal oxidation (RTO) in a clean vacuum. In the second step (Figure 1b), 2D arrays of small windows (with diameters in the range 50–200 nm) were opened in the UTO by FIB milling using a Tescan LYRA1 XMH dual-beam FIB workstation

Si/Ge intermixing during Ge Stranski–Krastanov growth

• Alain Portavoce,
• Khalid Hoummada,
• Antoine Ronda,
• Dominique Mangelinck and
• Isabelle Berbezier

Beilstein J. Nanotechnol. 2014, 5, 2374–2382, doi:10.3762/bjnano.5.246

• uses structures shaped by dual beam focus ion beam (FIB) as tips exhibiting a tip diameter between 50 nm (top of the tip) and 200 nm [38][39]. Figure 1 presents the different steps leading to the formation of APT samples by FIB. After the deposition of a Ni cap for the protection of the sample surface

• , the sample is loaded into a dual beam FIB. Here, an additional protective Pt layer is deposited by FIB (Figure 1a) and a wedge is cut (Figure 1b) and lifted off using an in situ tungsten finger (Figure 1c). Next, several pieces (approximately 3 × 3 µm2) of the sample wedge are glued onto preshaped Si

• pillars (Figure 1d) using FIB Pt deposition before being shaped as tips by FIB (Figure 1e–g). Generally, the surface density of Ge islands is between 1 × 109 to 5 × 1010 cm–2, their lateral size is between 100 and 1000 nm, and their height is between 10 and 100 nm [40]. Therefore, the difficulty lies in

PVP-coated, negatively charged silver nanoparticles: A multi-center study of their physicochemical characteristics, cell culture and in vivo experiments

• Sebastian Ahlberg,
• Alexandra Antonopulos,
• Jörg Diendorf,
• Ralf Dringen,
• Matthias Epple,
• Rebekka Flöck,
• Wolfgang Goedecke,
• Christina Graf,
• Nadine Haberl,
• Jens Helmlinger,
• Fabian Herzog,
• Frederike Heuer,
• Stephanie Hirn,
• Christian Johannes,
• Stefanie Kittler,
• Manfred Köller,
• Katrin Korn,
• Wolfgang G. Kreyling,
• Fritz Krombach,
• Jürgen Lademann,
• Kateryna Loza,
• Eva M. Luther,
• Marcelina Malissek,
• Martina C. Meinke,
• Daniel Nordmeyer,
• Anne Pailliart,
• Jörg Raabe,
• Fiorenza Rancan,
• Barbara Rothen-Rutishauser,
• Eckart Rühl,
• Carsten Schleh,
• Andreas Seibel,
• Christina Sengstock,
• Lennart Treuel,
• Annika Vogt,
• Katrin Weber and
• Reinhard Zellner

Beilstein J. Nanotechnol. 2014, 5, 1944–1965, doi:10.3762/bjnano.5.205

• demonstrated for hMSC, primary T-cells, primary monocytes, and astrocytes. A visualization of particles inside cells is possible by X-ray microscopy, fluorescence microscopy, and combined FIB/SEM analysis. By staining organelles, their localization inside the cell can be additionally determined. While primary

• dissolution process in cells (including the localization of low concentrations of small nanoparticles as well as silver ions) imaging at the Ag L3,2 edges is a promising option for future work. Focused ion beam (FIB) and optical microscopy (phase contrast microscopy; fluorescence microscopy; confocal laser

• reveal any formation of silver agglomerates (Figure 6A). In order to prove that the silver agglomerates are located inside the cells, focused ion beam milling (FIB) was applied which permits the view on cross sections of various materials by a beam of high-energy gallium ions [77][78]. After culturing

Patterning a hydrogen-bonded molecular monolayer with a hand-controlled scanning probe microscope

• Matthew F. B. Green,
• Taner Esat,
• Christian Wagner,
• Philipp Leinen,
• Alexander Grötsch,
• F. Stefan Tautz and
• Ruslan Temirov

Beilstein J. Nanotechnol. 2014, 5, 1926–1932, doi:10.3762/bjnano.5.203

• used a qPlus sensor [17] manufactured by CREATEC. The AFM/STM tip was made from a 0.3 mm long and 15 μm thick PtIr wire glued to the tuning fork of the qPlus sensor, and sharpened with a gallium focused ion beam (FIB). The resulting resonance frequency of the qPlus sensor was f0 = 30,300 Hz with a

Nanocrystalline ceria coatings on solid oxide fuel cell anodes: the role of organic surfactant pretreatments on coating microstructures and sulfur tolerance

• Chieh-Chun Wu,
• Ling Tang and
• Mark R. De Guire

Beilstein J. Nanotechnol. 2014, 5, 1712–1724, doi:10.3762/bjnano.5.181

• anodes. a) Treatment 1 (no coating). b) Treatment 2 (direct-treated). The ellipse indicates a gap in the coating. c) Treatment 3 (thiol-treated). d) Treatment 4 (sulfonate-treated). FIB cross-sections halfway through ceria-coated NiO/YSZ anodes, with superimposed EDXS maps (Ni: green; Zr: blue; Ce

• : yellow). a) Direct deposition (treatment 2). b) Deposition after thiol treatment (treatment 3). c) Deposition after sulfonate treatment (treatment 4). (Pink regions are the protective Pt layer applied as part of the FIB sectioning technique.) Cross-sectional view of an untreated Ni/GDC anode (treatment 1

Probing the electronic transport on the reconstructed Au/Ge(001) surface

• Franciszek Krok,
• Mark R. Kaspers,
• Alexander M. Bernhart,
• Marek Nikiel,
• Benedykt R. Jany,
• Paulina Indyka,
• Mateusz Wojtaszek,
• Rolf Möller and
• Christian A. Bobisch

Beilstein J. Nanotechnol. 2014, 5, 1463–1471, doi:10.3762/bjnano.5.159

• beam gun (FIB). In order to preserve the surface of the Au/Ge sample against the standard FIB operation during the lamella preparation, the sample surface at first was covered (capped) with a 20 nm layer of thermally evaporated carbon. Then, on top of the cap layer, a platinum layer was deposited using

• a gas injection system by the electron beam and the FIB beam was used to cut out the lamella. The high resolution (HR) TEM and high angle annular dark field (HAADF) scanning TEM images together with energy dispersive X-ray spectroscopy (EDX) analysis of the sample were obtained by the FEI Tecnai

Nanocavity crossbar arrays for parallel electrochemical sensing on a chip

• Enno Kätelhön,
• Dirk Mayer,
• Marko Banzet,
• Andreas Offenhäusser and
• Bernhard Wolfrum

Beilstein J. Nanotechnol. 2014, 5, 1137–1143, doi:10.3762/bjnano.5.124

• sections of the nanocavity sensor, cut by a focused ion beam (FIB), can be found in Figure 6. Fabrication Devices are structured by means of optical lithography and are processed in class-100 cleanroom facilities. Nanocavities at the intersections between platinum electrodes are formed via the deposition

• passivation layer is the access channel that connects the bulk reservoir on the chip surface to the nanocavity. b) Microscopic top view of a part of the array. c,d) Scanning electrochemical microscope images of FIB-induced cross sections of a nanocavity sensor before (c) and after (d) removal of the

A nanometric cushion for enhancing scratch and wear resistance of hard films

• Katya Gotlib-Vainshtein,
• Olga Girshevitz,
• Chaim N. Sukenik,
• David Barlam and
• Sidney R. Cohen

Beilstein J. Nanotechnol. 2014, 5, 1005–1015, doi:10.3762/bjnano.5.114

• layer used for these purposes was about 700 nm, based on cross-sectional FIB measurements. The Young's modulus of PDMS after hexane evaporation was measured with Peak-Force QNM® and found to be the same as in those samples with 10 µm thickness that had been obtained with no dilution with hexane – 1.5

• compensated by a thin Au coating (8 nm). NDFv9.4e software was used to fit the data [48]. Focused Ion Beam (FIB). The PDMS thickness was obtained using a dual beam FIB (FEI, Helios 600), with electron and ion beams operating simultaneously and independently at energies up to 30 kV (52 degrees between the

Integration of ZnO and CuO nanowires into a thermoelectric module

• Dario Zappa,
• Simone Dalola,
• Guido Faglia,
• Elisabetta Comini,
• Matteo Ferroni,
• Caterina Soldano,
• Vittorio Ferrari and
• Giorgio Sberveglieri

Beilstein J. Nanotechnol. 2014, 5, 927–936, doi:10.3762/bjnano.5.106

• , it is possible to use focused ion beam (FIB) lithography to deposit actively each gold nanoparticles, but it is very time consuming and there is no demonstration of improved performances of the device. The ability to control the size and dispersion of the catalyst is a key parameter to control both

Scale effects of nanomechanical properties and deformation behavior of Au nanoparticle and thin film using depth sensing nanoindentation

• Dave Maharaj and
• Bharat Bhushan

Beilstein J. Nanotechnol. 2014, 5, 822–836, doi:10.3762/bjnano.5.94

• operating pressure of about 0.001 Pa, substrate temperature of 100 °C at a rate of approximately 0.4 nm/s. To observe the grains within the Au film and nanoparticles, focused ion beam (FIB) milling and transmission electron microscopy (TEM) were employed. Cross-sections of samples were cut out by FIB