Gap-directed chemical lift-off lithographic nanoarchitectonics for arbitrary sub-micrometer patterning

• Chang-Ming Wang,
• Hong-Sheng Chan,
• Chia-Li Liao,
• Che-Wei Chang and
• Wei-Ssu Liao

Beilstein J. Nanotechnol. 2023, 14, 34–44, doi:10.3762/bjnano.14.4

• ][18][19]. Instead of transferring ink molecules from a stamp reservoir, this technique selectively removes alkanethiol molecules from a self-assembled monolayer (SAM) covered flat Au surface. An oxygen-plasma-activated polydimethylsiloxane (PDMS) stamp bearing patterns originating from a silicon

• ., Ltd. (Taipei, Taiwan). T238 developer was purchased from Control Chemitech Inc. (Taoyuan, Taiwan). Silicon wafers were obtained from Mustec Corp. (Hsinchu, Taiwan). SYLGARD 184 silicone elastomer base and curing agent were purchased from Dow Corning Corp. (Midland, MI, USA). Deionized water (>18 MΩ·cm

• ) was obtained from the ELGA PURELAB classic system (Taipei, Taiwan). CLL operation processes and bioactive substrates preparation In a manner similar to a previous study [26], silicon substrates with 100 nm thick Au and 5 nm Cr adhesive layers were prepared by thermal evaporation. To prepare a SAM

Electrical and optical enhancement of ITO/Mo bilayer thin films via laser annealing

• Abdelbaki Hacini,
• Ahmad Hadi Ali,
• Nurul Nadia Adnan and
• Nafarizal Nayan

Beilstein J. Nanotechnol. 2022, 13, 1589–1595, doi:10.3762/bjnano.13.133

• Microelectronic and Nanotechnology Shamsuddin Research Centre (MiNT-SRC), Universiti Tun Hussein Onn Malaysia, 86400 Parit Raja, Batu Pahat, Johor, Malaysia 10.3762/bjnano.13.133 Abstract ITO/Mo bilayer thin films were sputtered on n-type silicon and glass substrates and annealed with a Nd:YAG pulsed laser. The

• . Experimental IM bilayer thin films were sputtered on n-type silicon(111) substrates for structural, morphological, and electrical characterization. In addition, the bilayer thin films were deposited on glass substrates for optical characterization. This process was performed using RF magnetron sputtering

• decreased with the increase of laser energy. Consequently, the optimal laser energy can be estimated as 120 mJ for the ITO/Mo bilayer structure from the presented electrical and optical results. Conclusion ITO/Mo bilayer thin film structures were deposited on glass and silicon substrates using RF magnetron

Induced electric conductivity in organic polymers

• Konstantin Y. Arutyunov,
• Anatoli S. Gurski,
• Vladimir V. Artemov,
• Alexander L. Vasiliev,
• Azat R. Yusupov,
• Danfis D. Karamov and
• Alexei N. Lachinov

Beilstein J. Nanotechnol. 2022, 13, 1551–1557, doi:10.3762/bjnano.13.128

• without exposure to room atmosphere between cycles of formation of different layers. Glass or oxidized silicon were used as substrates. The substrates were preliminarily cleaned in ethanol and distilled water in an ultrasonic bath. The surfaces were hydrophilized by treating the substrates with

Hydroxyapatite–bioglass nanocomposites: Structural, mechanical, and biological aspects

• Olga Shikimaka,
• Mihaela Bivol,
• Bogdan A. Sava,
• Marius Dumitru,
• Christu Tardei,
• Beatrice G. Sbarcea,
• Daria Grabco,
• Constantin Pyrtsac,
• Daria Topal,
• Andrian Prisacaru,
• Vitalie Cobzac and
• Viorel Nacu

Beilstein J. Nanotechnol. 2022, 13, 1490–1504, doi:10.3762/bjnano.13.123

• by an unconventional wet route followed by melting [31][37][38]. As raw materials, the ultra-purity grade reagents boron oxide (B2O3), magnesium oxide (MgO,) potassium carbonate (K2CO3), phosphoric acid (H3PO4), silicon dioxide (SiO2), zinc oxide (ZnO), and cerium oxide (CeO2) have been used. The

Rapid and sensitive detection of box turtles using an electrochemical DNA biosensor based on a gold/graphene nanocomposite

• Abu Hashem,
• M. A. Motalib Hossain,
• Ab Rahman Marlinda,
• Mohammad Al Mamun,
• Khanom Simarani and
• Mohd Rafie Johan

Beilstein J. Nanotechnol. 2022, 13, 1458–1472, doi:10.3762/bjnano.13.120

• ssDNA recognition elements [31]. As per our observation, this is the first application of an electrochemical DNA biosensor for BT detection. Kusnin et al. [57] employed silicon nanowires/platinum nanoparticles (SiNWs/PtNPs) on a SPCE for the detection of porcine DNA. The few studies conducted earlier

Coherent amplification of radiation from two phase-locked Josephson junction arrays

• Mikhail A. Galin,
• Vladimir M. Krasnov,
• Ilya A. Shereshevsky,
• Nadezhda K. Vdovicheva and
• Vladislav V. Kurin

Beilstein J. Nanotechnol. 2022, 13, 1445–1457, doi:10.3762/bjnano.13.119

• self-aligning process using e-beam lithography and reactive ion etching [16][17]. Similar arrays were studied earlier in [9][12][13], where additional information about sample characterization can be found. Figure 1a,b shows the layout of “sample-1”. It has been fabricated on a 1 × 1 cm2 silicon

• distance between two arrays is approximately equal to the thickness of substrate plus the glue layer and, possibly, a slight misalignment in the lateral direction. Overall, it is about 0.4 mm through the silicon substrate. During measurements, the bottom array-a is biased with a variable dc current and the

• dielectric permittivity of silicon). Under this condition, the fundamental resonant mode can be excited in the substrate between the arrays. This condition is beneficial for inter-array coupling. Numerical Calculations The experimental results presented above show that phase locking of two large JJ arrays is

Double-layer symmetric gratings with bound states in the continuum for dual-band high-Q optical sensing

• Chaoying Shi,
• Jinhua Hu,
• Xiuhong Liu,
• Junfang Liang,
• Jijun Zhao,
• Haiyan Han and
• Qiaofen Zhu

Beilstein J. Nanotechnol. 2022, 13, 1408–1417, doi:10.3762/bjnano.13.116

• grating (HCG) structures in periodic subwavelengths [9][10]. Among them, HCG structures built on silicon-on-insulator (SOI) substrates establish a new platform for integrated optics as well as optical sensing [11][12] owing to its high reflectivity in bandwidth (>99%) and compatibility with the

• refractive index layer of the structure depicted in Figure 1 is silicon (nH = 3.47) and the low refractive index layer is SU-8 (nL = 1.57). The other structural parameters are w = 200 nm, h = 1000 nm, and Λ = 800 nm. Besides, the whole structure is suspended in vacuum (nc = 1.0) and normally incident by a TM

• structure can be fabricated as follows [56]. At first, the gratings of the bottom layer are fabricated using electron beam lithography (EBL) and reactive ion etching (RIE) on a SOI chip with a single crystalline silicon device layer and a buried oxide (BOX), where this SOI chip serves as the receiving

Dry under water: air retaining properties of large-scale elastomer foils covered with mushroom-shaped surface microstructures

• Matthias Mail,
• Stefan Walheim,
• Thomas Schimmel,
• Wilhelm Barthlott,
• Stanislav N. Gorb and
• Lars Heepe

Beilstein J. Nanotechnol. 2022, 13, 1370–1379, doi:10.3762/bjnano.13.113

• placed. The semi-transparent MSM surfaces were glued to a green silicon surface to enhance contrast (air layer/wet surface). The samples were photographed using a digital camera (EOS-650D, Canon, Krefeld) every 3 min until the samples were completely wetted and no retaining air was visible. The area of

• floating fern Salvinia oblongifolia submerged in water. The silvery shine indicates the kept air layer. b) Elastomer foil covered with mushroom-shaped surface microstructures (MSM) submerged in water. MSM-surfaces were glued to a green silicon surface to enhance contrast. Like on the biological role model

• , 10 and 20 cm) over time. b–d) Examples of the images taken in the experiment. MSM surfaces were glued to a green silicon surface to enhance contrast, and imaged in defined time steps. b) At the beginning of the experiment, the sample (indicated by a dotted line) was completely covered by air. c

Enhanced electronic transport properties of Te roll-like nanostructures

• E. R. Viana,
• N. Cifuentes and
• J. C. González

Beilstein J. Nanotechnol. 2022, 13, 1284–1291, doi:10.3762/bjnano.13.106

• ), nanorods (NRs), nanowires (NWs), nanobelts (NBs), nanotubes (NTs), nanoflowers (NFs) and chiral nanostructures [6][7][8][9][10]. Trigonal tellurium (t-Te) MLs have also been recently proposed as a silicon successor for nanoelectronics because of their high hole mobility and current density [3]. Combining

• mode. EDS point acquisitions were also performed during TEM analysis by using a silicon drift detector (SDD) from Oxford Instruments. Electronic transport The electronic transport properties of the sample were investigated by acquiring and modeling the transfer and gate curves of Te roll-like single

Studies of probe tip materials by atomic force microscopy: a review

• Ke Xu and
• Yuzhe Liu

Beilstein J. Nanotechnol. 2022, 13, 1256–1267, doi:10.3762/bjnano.13.104

• structure [37][38]. Due to these unique properties, CNT-AFM probes offer a longer lifetime, high spatial resolution, and unprecedented sensitivity than their conventional silicon counterparts. Carbon nanotubes are generally prepared by assembled and grown methods. Assembled carbon nanotube probe Nishijima

• , followed by imaging with commercially available silicon tips. Individual SWNTs are extracted from the substrates to produce superior SWNT probes in this process. This type of tip can be applied for etching by adjusting the length of the nanotubes under 2 nm control. In fluid and air, this type of

• assembly methods, direct growth of carbon nanotubes by chemical vapor deposition (CVD) allows for increased bond strength between CNT tips and AFM probes. A pore growth method was used by Hafner et al. [42]. The method uses AFM imaging in contact mode to flatten the silicon tip, followed by hydrogen

Roll-to-roll fabrication of superhydrophobic pads covered with nanofur for the efficient clean-up of oil spills

• Patrick Weiser,
• Robin Kietz,
• Marc Schneider,
• Matthias Worgull and
• Hendrik Hölscher

Beilstein J. Nanotechnol. 2022, 13, 1228–1239, doi:10.3762/bjnano.13.102

• using various dry/wet etching techniques including electrochemical HF etching, stain etching, metal-assisted etching, and reactive ion etching [9][11]. So-called “nanograss” or “black silicon” is a surface modification of silicon where the surface is covered with millions of tiny needle-like structures

• with high aspect ratio. These needles render superhydrophobic properties to the surface. Such surfaces can either be prepared using a RIE process [12] or a laser-assisted etching process described by Mazur et al. [13], which requires expensive silicon wafers as substrate as well as a femtosecond laser

Microneedle-based ocular drug delivery systems – recent advances and challenges

• Piotr Gadziński,
• Anna Froelich,
• Monika Wojtyłko,
• Antoni Białek,
• Julia Krysztofiak and
• Tomasz Osmałek

Beilstein J. Nanotechnol. 2022, 13, 1167–1184, doi:10.3762/bjnano.13.98

• fabrication, the drug loading technique, and the mode of drug delivery [117]. Concerning the materials used to manufacture the microneedle arrays, the range of available substances is wide. The first material employed for this purpose was silicon. It is important to note that it offers versatile properties

• and the ability to form different microneedle geometries, which can be considered as an advantage. However, the manufacturing process can be complicated and the material is relatively expensive. Also, silicon is a brittle, non-compatible, and non-biodegradable material, which may cause skin irritation

• are usually prepared from ceramic materials, silicon, or metal, they display higher stiffness than polymer-based systems. The risk of clogging the internal canals of the needles upon application is mentioned in the literature as a possible drawback of these systems [142]. Dissolving microneedles are

A cantilever-based, ultrahigh-vacuum, low-temperature scanning probe instrument for multidimensional scanning force microscopy

• Hao Liu,
• Zuned Ahmed,
• Sasa Vranjkovic,
• Manfred Parschau,
• Andrada-Oana Mandru and
• Hans J. Hug

Beilstein J. Nanotechnol. 2022, 13, 1120–1140, doi:10.3762/bjnano.13.95

• modulus of silicon, respectively; L, w, and t are the length, width, and thickness of the cantilever, respectively. While the first two geometrical dimensions are well-defined by the fabrication process and can easily be measured by electron microscopy, the thickness t of the cantilever is best obtained

Analytical and numerical design of a hybrid Fabry–Perot plano-concave microcavity for hexagonal boron nitride

• Felipe Ortiz-Huerta and
• Karina Garay-Palmett

Beilstein J. Nanotechnol. 2022, 13, 1030–1037, doi:10.3762/bjnano.13.90

• λ0/4n thickness layer of hBN (n = 1.72) was positioned on top of a 15-pair layer DBR with tantalum oxide (Ta2O5) and silicon oxide (SiO2) as the high- and low-index layers, respectively, on a (HL)15 configuration to ensure an electric field antinode at the surface of the hBN layer, making the hBN

Influence of water contamination on the sputtering of silicon with low-energy argon ions investigated by molecular dynamics simulations

• Grégoire R. N. Defoort-Levkov,
• Alan Bahm and
• Patrick Philipp

Beilstein J. Nanotechnol. 2022, 13, 986–1003, doi:10.3762/bjnano.13.86

• by molecular dynamics (MD) simulations how one of the most commonly found residual contaminations in vacuum chambers (i.e., water adsorbed on a silicon surface) influences sputtering by 100 eV argon ions. The incidence angle was changed from normal incidence to close to grazing incidence. For the

• simulation conditions used in this work, the adsorption of water favours the formation of defects in silicon by mixing hydrogen and oxygen atoms into the substrate. The sputtering yield of silicon is not significantly changed by the contamination, but the fraction of hydrogen and oxygen atoms that is

• ; molecular dynamics; silicon; simulations; water; Introduction Focused ion beams (FIB) play an increasingly important role in materials research areas such as nanoanalysis (e.g., secondary ion mass spectrometry (SIMS) [1][2][3] and sample preparation for transmission electron microscopy (TEM) [4], atom

Numerical modeling of a multi-frequency receiving system based on an array of dipole antennas for LSPE-SWIPE

• Alexander V. Chiginev,
• Anton V. Blagodatkin,
• Dmitrii A. Pimanov,
• Ekaterina A. Matrozova,
• Anna V. Gordeeva,
• Andrey L. Pankratov and
• Leonid S. Kuzmin

Beilstein J. Nanotechnol. 2022, 13, 865–872, doi:10.3762/bjnano.13.77

• GHz, the second half is occupied by cells for 240 GHz. Receiving cells with integrated CEBs are located on a 260 µm thick silicon substrate with a silicon dioxide layer. The difficulty of the considered receiving system is the existing specific sample holder, which allows the receiving of the signal

Ultrafast signatures of magnetic inhomogeneity in Pd_1−xFe_x (x ≤ 0.08) epitaxial thin films

• Andrey V. Petrov,
• Sergey I. Nikitin,
• Lenar R. Tagirov,
• Amir I. Gumarov,
• Igor V. Yanilkin and
• Roman V. Yusupov

Beilstein J. Nanotechnol. 2022, 13, 836–844, doi:10.3762/bjnano.13.74

• S2386-5K silicon photodiodes. The difference signal from the output of the photodiodes was used to determine the rotation angle Δθ = f(Δt), and the sum signal was used to measure the dynamics of the reflection coefficient ΔR/R = g(Δt). To extract the magnetic contribution ΔθΚ to the rotation of the

Temperature and chemical effects on the interfacial energy between a Ga–In–Sn eutectic liquid alloy and nanoscopic asperities

• Yujin Han,
• Pierre-Marie Thebault,
• Corentin Audes,
• Xuelin Wang,
• Haiwoong Park,
• Jian-Zhong Jiang and
• Arnaud Caron

Beilstein J. Nanotechnol. 2022, 13, 817–827, doi:10.3762/bjnano.13.72

• , France, International Center of New-Structured Materials (ICNSM), Laboratory of New-Structured Materials, State Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, People’s Republic of China 10.3762/bjnano.13.72 Abstract The

Gelatin nanoparticles with tunable mechanical properties: effect of crosslinking time and loading

• Agnes-Valencia Weiss,
• Daniel Schorr,
• Julia K. Metz,
• Metin Yildirim,
• Saeed Ahmad Khan and
• Marc Schneider

Beilstein J. Nanotechnol. 2022, 13, 778–787, doi:10.3762/bjnano.13.68

• , Germany). Fluorescein isothiocyanate-dextran 70 kDa (FITC-dextran) was purchased from TdB (Upsala Sweden). Pall Minimate™ tangential flow filtration capsules 300 kDa were obtained from VWR International GmbH (Darmstadt, Germany). Silicon wafers used as substrates in AFM experiments were derived from Plano

Fabrication and testing of polymer microneedles for transdermal drug delivery

• Vahid Ebrahiminejad,
• Zahra Faraji Rad,
• Philip D. Prewett and
• Graham J. Davies

Beilstein J. Nanotechnol. 2022, 13, 629–640, doi:10.3762/bjnano.13.55

• classified into solid, hollow, coated, hydrogel-forming, and dissolvable types, which depending on the specific medical applications [12][13], are fabricated using silicon, metal, ceramic, silica glass, carbohydrate, and polymers [7][14]. In recent years, polymeric MNs have gained a lot of interest due to

• arrays have the potential for collecting interstitial fluid more safely than using glass [40] or silicon MNs. Conclusion MN arrays have considerable potential for cost-effective, rapid, and non-invasive therapeutic drug delivery, vaccination, and point-of-care diagnostics, with potential for self

Sodium doping in brookite TiO₂ enhances its photocatalytic activity

• Boxiang Zhuang,
• Honglong Shi,
• Honglei Zhang and
• Zeqian Zhang

Beilstein J. Nanotechnol. 2022, 13, 599–609, doi:10.3762/bjnano.13.52

• ). (1) Brookite—platy grains. Energy-dispersive X-ray spectroscopy (EDX) results of platy grains (Figure 4b) indicate that Na can be well identified besides Ti and O (note that the characteristic peak of C comes from the carbon conducting resin, Al from the sample holder, and Si from the silicon wafer

• ]. The morphology and the chemical composition of the products were characterized by a field-emission scanning electron microscope (Hitachi S-4800) equipped with an energy-dispersive X-ray spectroscope working at 10 kV and 10 μA. Samples were dispersed into ethyl alcohol and then sprayed on a silicon

Revealing local structural properties of an atomically thin MoSe₂ surface using optical microscopy

• Lin Pan,
• Peng Miao,
• Anke Horneber,
• Alfred J. Meixner,
• Pierre-Michel Adam and
• Dai Zhang

Beilstein J. Nanotechnol. 2022, 13, 572–581, doi:10.3762/bjnano.13.49

• images of CuPc/MoSe2. The topographic images of CuPc/MoSe2 are obtained with an atomic force microscope (Multimode 8-HR, Bruker) operated in peak force tapping mode using a SCANASYST-AIR probe (silicon tip on nitride lever, Bruker). Optical properties of a triangular MoSe2 flake covered with a thin film

Electrostatic pull-in application in flexible devices: A review

• Teng Cai,
• Yuming Fang,
• Yingli Fang,
• Ruozhou Li,
• Ying Yu and
• Mingyang Huang

Beilstein J. Nanotechnol. 2022, 13, 390–403, doi:10.3762/bjnano.13.32

• electrode materials include CNTs, GR, and silicon/germanium nanowires. CNT-NEM switches CNTs are an ideal flexible material for NEM electrodes because of the high aspect ratio, current density, and excellent tensile strength. In 2000, Rueckes et al. [13] observed the electromechanical conversion in CNTs for

• collapse, the preparation technology is complex. Li et al. [30] prepared cantilever GR-NEM switches with two or three terminals using amorphous silicon as sacrificial layer. Sun et al. [6] prepared a three-terminal switch using PMMA polymer as the sacrifice layer. The graphene beam area was 2.5 µm × 0.5 µm

• with a switching ratio of about 103. Qian et al. [37] produced a U-shaped NEM switch with two Si nanowires, which support a square capacitive plate to form a U-shaped removable electrode, as shown in Figure 5b. The length of the silicon nanowires is 5 µm, the cross section is 90 × 90 nm square, the

Micro- and nanotechnology in biomedical engineering for cartilage tissue regeneration in osteoarthritis

• Zahra Nabizadeh,
• Mahmoud Nasrollahzadeh,
• Hamed Daemi,
• Mohamadreza Baghaban Eslaminejad,
• Ali Akbar Shabani,
• Mehdi Dadashpour,
• Majid Mirmohammadkhani and
• Davood Nasrabadi

Beilstein J. Nanotechnol. 2022, 13, 363–389, doi:10.3762/bjnano.13.31

• carbon, silicon, boron, and halloysite clay sheets and possess unique physicochemical properties. Among nanotube structures, much attention has been paid to carbon nanotubes (CNTs) because of their excellent mechanical and tensile strength properties, thermal and electrical conductivity, and high surface

Systematic studies into uniform synthetic protein nanoparticles

• Nahal Habibi,
• Ava Mauser,
• Jeffery E. Raymond and
• Joerg Lahann

Beilstein J. Nanotechnol. 2022, 13, 274–283, doi:10.3762/bjnano.13.22

• of mass for the substrate, with subsequent images taken at a set distance in each cardinal direction (+X, −X, +Y, −Y) in order to avoid bias. The SEM images were taken from a silicon wafer that was obtained from direct placement onto the substrate during jetting. This wafer was then sputter coated