Modeling and optimization of atomic layer deposition processes on vertically aligned carbon nanotubes

• Nuri Yazdani,
• Vipin Chawla,
• Eve Edwards,
• Vanessa Wood,
• Hyung Gyu Park and
• Ivo Utke

Beilstein J. Nanotechnol. 2014, 5, 234–244, doi:10.3762/bjnano.5.25

• Nuri Yazdani Vipin Chawla Eve Edwards Vanessa Wood Hyung Gyu Park Ivo Utke Nanoscience for Energy Technology and Sustainability, Department of Mechanical and Process Engineering, ETH Zürich, Zürich CH-8092, Switzerland Laboratory for Nanoelectronics, Department of Information Technology and