Search for "electron-beam lithography" in Full Text gives 113 result(s) in Beilstein Journal of Nanotechnology.
Beilstein J. Nanotechnol. 2012, 3, 860–883, doi:10.3762/bjnano.3.97
Beilstein J. Nanotechnol. 2012, 3, 798–808, doi:10.3762/bjnano.3.89
Beilstein J. Nanotechnol. 2012, 3, 773–777, doi:10.3762/bjnano.3.86
Beilstein J. Nanotechnol. 2012, 3, 703–711, doi:10.3762/bjnano.3.80
Beilstein J. Nanotechnol. 2012, 3, 620–628, doi:10.3762/bjnano.3.71
Beilstein J. Nanotechnol. 2012, 3, 570–578, doi:10.3762/bjnano.3.66
Beilstein J. Nanotechnol. 2012, 3, 564–569, doi:10.3762/bjnano.3.65
Beilstein J. Nanotechnol. 2012, 3, 533–534, doi:10.3762/bjnano.3.61
Beilstein J. Nanotechnol. 2012, 3, 397–403, doi:10.3762/bjnano.3.46
Beilstein J. Nanotechnol. 2012, 3, 101–113, doi:10.3762/bjnano.3.11
Beilstein J. Nanotechnol. 2011, 2, 501–508, doi:10.3762/bjnano.2.54
Beilstein J. Nanotechnol. 2011, 2, 448–458, doi:10.3762/bjnano.2.49
Beilstein J. Nanotechnol. 2011, 2, 318–326, doi:10.3762/bjnano.2.37