The description of friction of silicon MEMS with surface roughness: virtues and limitations of a stochastic Prandtl–Tomlinson model and the simulation of vibration-induced friction reduction

• W. Merlijn van Spengen,
• Viviane Turq and
• Joost W. M. Frenken

Beilstein J. Nanotechnol. 2010, 1, 163–171, doi:10.3762/bjnano.1.20

• in this study. The area enclosed by the friction loop corresponds to the energy dissipated during the friction process. To obtain an accurate measure for the energy dissipation, we have cut off the side lobes of the friction loop, where the device becomes stuck in one direction, taking the average

• rise to the energy dissipation) it is able to predict the important features of the typical motion observed of a polycrystalline silicon MEMS slider as it slides against an on-chip counter-surface of same material. This proves that the overall sliding behaviour is governed by the mechanical locking