Beilstein J. Nanotechnol.2024,15, 1030–1040, doi:10.3762/bjnano.15.84
integration techniques make it important for real-time broadband imaging systems.
Keywords: 3Dmicro-nanoarchitecture; blackbody absorption; CNT microbolometer; high responsivity; high spatial resolution; Introduction
Non-cryogenic infrared (IR) microbolometers represent a cutting-edge technology with
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Figure 1:
Fabrication process of the pixel-based CNT microbolometer. (a) AlOx deposition, (b) lithography pro...