Bolometric IR photoresponse based on a 3D micro-nano integrated CNT architecture

• Yasameen Al-Mafrachi,
• Sandeep Yadav,
• Sascha Preu,
• Jörg J. Schneider and
• Oktay Yilmazoglu

Beilstein J. Nanotechnol. 2024, 15, 1030–1040, doi:10.3762/bjnano.15.84

• integration techniques make it important for real-time broadband imaging systems. Keywords: 3D micro-nano architecture; blackbody absorption; CNT microbolometer; high responsivity; high spatial resolution; Introduction Non-cryogenic infrared (IR) microbolometers represent a cutting-edge technology with

• , the NEP value will be improved with increased ℜV, allowing for the detection of weaker IR signals. These calculations indicate that the new CNT microbolometer could achieve superior performance in optimized micro-nano architectures with more efficient absorber region and under vacuum measurement

• reduction as well as sensitive and versatile thermal detection devices suitable for a wide range of high-tech applications. Fabrication process of the pixel-based CNT microbolometer. (a) AlOx deposition, (b) lithography process and metal contact evaporation, (c) iron catalyst evaporation, and (d) CNT growth