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Search for "FIB-induced deposition (FIBID)" in Full Text gives 2 result(s) in Beilstein Journal of Nanotechnology.

Focused ion beam-induced platinum deposition with a low-temperature cesium ion source

Beilstein J. Nanotechnol. 2025, 16, 910–920, doi:10.3762/bjnano.16.69

conditions, but the deposit has lower Pt content for Cs+. The electrical resistivity of the deposit is found to be higher for Cs+ than for Ga+ and decreasing with increasing acceleration voltage. Keywords: cesium ion source; cold atom ion source; focused ion beam (FIB); FIB-induced deposition (FIBID

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Full Research Paper

Published 16 Jun 2025

Beilstein J. Nanotechnol. 2021, 12, 633–664, doi:10.3762/bjnano.12.52

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Review

Published 02 Jul 2021

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