New design of operational MEMS bridges for measurements of properties of FEBID-based nanostructures

• Bartosz Pruchnik,
• Krzysztof Kwoka,
• Ewelina Gacka,
• Dominik Badura,
• Piotr Kunicki,
• Andrzej Sierakowski,
• Paweł Janus,
• Tomasz Piasecki and
• Teodor Gotszalk

Beilstein J. Nanotechnol. 2024, 15, 1273–1282, doi:10.3762/bjnano.15.103

• nanostructure. Keywords: FEBID; MEMS; MEMS bridge; nanowires; opMEMS; Introduction Nanoelectronics is the fastest developing branch of modern electronic technology. Reduced dimensions allow for lower power consumption of the circuit and higher operating speeds [1][2]. Even more advantages (e.g., developed

• shown to work as traceable displacement generators [34]. When a MEMS bridge is cut in the middle to form two separate cantilevers (Figure 2a), the two coincident edges create a region of interest (RoI) where the distance between the cantilevers is a function of the structure deflection (Figure 2a

• analyser to assess the properties of the active device. The measured level of vibration of the MEMS bridge at a known temperature allows its stiffness to be determined with an accuracy of 5% [38]. First, the thermomechanical noise of the structure vibration was measured, then the displacement of the