Bolometric IR photoresponse based on a 3D micro-nano integrated CNT architecture

• Yasameen Al-Mafrachi,
• Sandeep Yadav,
• Sascha Preu,
• Jörg J. Schneider and
• Oktay Yilmazoglu

Beilstein J. Nanotechnol. 2024, 15, 1030–1040, doi:10.3762/bjnano.15.84

• integration techniques make it important for real-time broadband imaging systems. Keywords: 3D micro-nano architecture; blackbody absorption; CNT microbolometer; high responsivity; high spatial resolution; Introduction Non-cryogenic infrared (IR) microbolometers represent a cutting-edge technology with

• for non-cryogenic IR microbolometer technology, carbon nanotubes (CNTs) have emerged as highly promising candidates [2] with broadband blackbody absorption [3], high resistance perpendicular to the CNT orientation [4], low lateral thermal conductivity [5], a high temperature coefficient of resistance