Performance optimization of a microwave-coupled plasma-based ultralow-energy ECR ion source for silicon nanostructuring

• Joy Mukherjee,
• Safiul Alam Mollick,
• Tanmoy Basu and
• Tapobrata Som

Beilstein J. Nanotechnol. 2025, 16, 484–494, doi:10.3762/bjnano.16.37

• generating ion beams in a microwave-coupled plasma-based ultralow-energy electron cyclotron resonance ion source, generally used for nanostructuring solid surfaces. The investigation focuses on developing, accelerating, and extracting Ar ions from a magnetron-coupled plasma cup utilizing a three-grid ion

• current with the target position, known as the beam profile, is also presented in Figure 4e. The beam profile is Gaussian for concave grid beam extraction optics. Nanostructuring on Si surface by 450 eV Ar-ion bombardment The morphological evolution of Si after the off-normal bombardment with 450 eV Ar

• bombardment time (10 h), nanofacet-like structures with larger dimensions develop, although the facets are not well organized. It is also evident that the rms roughness increases with bombardment time. Surface nanostructuring by energetic ion bombardment is a consequence of ion-beam-induced off-normal (60

Impact of adsorbate–substrate interaction on nanostructured thin films growth during low-pressure condensation

• Alina V. Dvornichenko,
• Vasyl O. Kharchenko and
• Dmitrii O. Kharchenko

Beilstein J. Nanotechnol. 2025, 16, 473–483, doi:10.3762/bjnano.16.36

• elastic adsorbate–substrate interactions in processes of nanostructuring of thin films during low-pressure condensation in the framework of theoretical approaches and numerical simulations. It will be shown that an increase in the elastic interaction strength induces first-order transitions and pattern

Size control of nanoparticles synthesized by pulsed laser ablation in liquids using donut-shaped beams

• Abdel Rahman Altakroury,
• Oleksandr Gatsa,
• Farbod Riahi,
• Zongwen Fu,
• Miroslava Flimelová,
• Andrei Samokhvalov,
• Stephan Barcikowski,
• Carlos Doñate-Buendía,
• Alexander V. Bulgakov and
• Bilal Gökce

Beilstein J. Nanotechnol. 2025, 16, 407–417, doi:10.3762/bjnano.16.31

• been recently demonstrated to be very efficient in surface micro- and nanostructuring [33][34][35][36][37] and in laser additive manufacturing [38]. They enable the formation of different structures whose size and shape can be precisely controlled. Furthermore, donut-shaped beams enable a considerable

Interface properties of nanostructured carbon-coated biological implants: an overview

• Mattia Bartoli,
• Francesca Cardano,
• Erik Piatti,
• Stefania Lettieri,
• Andrea Fin and
• Alberto Tagliaferro

Beilstein J. Nanotechnol. 2024, 15, 1041–1053, doi:10.3762/bjnano.15.85

• hydrophobicity and nanostructuring [128][129]. Kang et al. [130] suggested that the main mechanism of action is cell disruption due to the mechanical effect of CNTs themselves via surface polarity changes. Rodrigues et al. [131] dwelled more deeply into CNT coatings and found a correlation between the exopolymer

Level set simulation of focused ion beam sputtering of a multilayer substrate

• Alexander V. Rumyantsev,
• Nikolai I. Borgardt,
• Roman L. Volkov and
• Yuri A. Chaplygin

Beilstein J. Nanotechnol. 2024, 15, 733–742, doi:10.3762/bjnano.15.61

• ; multilayer substrate; silicon; silicon dioxide; sputtering; Introduction The focused ion beam (FIB) technique is an effective method for surface nanostructuring. It is based on the local removal of material by sputtering with a narrow beam of, typically, gallium ions. This feature of the FIB method makes it

Combining physical vapor deposition structuration with dealloying for the creation of a highly efficient SERS platform

• Adrien Chauvin,
• Walter Puglisi,
• Damien Thiry,
• Cristina Satriano,
• Rony Snyders and
• Carla Bittencourt

Beilstein J. Nanotechnol. 2023, 14, 83–94, doi:10.3762/bjnano.14.10

• rhodamine B. Keywords: dealloying; magnetron sputtering; nanoporous thin film; nanostructuring; SERS; Introduction Pollutant residues are strictly regulated in most countries to ensure water and food safety. In this context, there is an increasing demand for pollutant analysis tools with practical and

A non-enzymatic electrochemical hydrogen peroxide sensor based on copper oxide nanostructures

• Irena Mihailova,
• Vjaceslavs Gerbreders,
• Marina Krasovska,
• Eriks Sledevskis,
• Valdis Mizers,
• Andrejs Bulanovs and
• Andrejs Ogurcovs

Beilstein J. Nanotechnol. 2022, 13, 424–436, doi:10.3762/bjnano.13.35

• thermally oxidised film, which indicates a significant contribution of the electrode nanostructuring process to an increase in the sensitivity of the sensor. This can be explained by the fact that petal-like CuO nanostructures provide a much larger surface area, with an increased number of active bonds and

First-principles study of the structural, optoelectronic and thermophysical properties of the π-SnSe for thermoelectric applications

• Muhammad Atif Sattar,
• Najwa Al Bouzieh,
• Maamar Benkraouda and
• Noureddine Amrane

Beilstein J. Nanotechnol. 2021, 12, 1101–1114, doi:10.3762/bjnano.12.82

• hierarchical architecture [2][11][12] as well as through nanostructuring [13][14][15]), retaining the hole mobility [16][17], and by improving the value of the Seebeck coefficient (by tuning the band structure [18] along with a large conduction (valence) band convergence [19][20], electron energy barrier

Progress and innovation of nanostructured sulfur cathodes and metal-free anodes for room-temperature Na–S batteries

• Marina Tabuyo-Martínez,
• Bernd Wicklein and
• Pilar Aranda

Beilstein J. Nanotechnol. 2021, 12, 995–1020, doi:10.3762/bjnano.12.75

• , Na dendrite growth, and slow reaction kinetics by nanostructuring both the sulfur cathode and the Na anode. Moreover, a survey of recent patents on room temperature (RT) Na–S batteries revealed that nanostructured sulfur and sodium electrodes are still in the minority, which suggests that much

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

• Frances I. Allen

Beilstein J. Nanotechnol. 2021, 12, 633–664, doi:10.3762/bjnano.12.52

• was the band structure degraded. Based on these results, the authors determined a critical dose for nanostructuring MoS2 below which the optical and valleytronic properties of the material are conserved. In subsequent work, the formation of arrays of optically active defects in monolayer MoS2 was

Gas-sensing features of nanostructured tellurium thin films

• Dumitru Tsiulyanu

Beilstein J. Nanotechnol. 2020, 11, 1010–1018, doi:10.3762/bjnano.11.85

• applications in development in advanced gas sensors and, so far, are the only Te-based nanostructured sensors tested with this purpose. Besides, it can also be observed that nanostructuring is mostly performed via phase transformations, such as hydrothermal recrystallization and growth of Te nanocrystals

• , nanotubes or nanowires from the gas phase under vacuum or argon atmosphere. On the other hand, nanostructuring can be performed mechanically as indicated by the possibility of growth of nanocrystalline gas sensors via rf sputtering (13.6 MHz) of Te in an ultra-high-purity argon atmosphere [24]. The main

• aims of the present work were to investigate and improve the gas-sensing parameters of nanostructured Te films by using a mechanical nanostructuring approach. Crystalline and amorphous Te films were grown, respectively, on glass or porous, nanostructured, dielectric substrates. These two physically

Electrochemical nanostructuring of (111) oriented GaAs crystals: from porous structures to nanowires

• Elena I. Monaico,
• Eduard V. Monaico,
• Veaceslav V. Ursaki,
• Shashank Honnali,
• Vitalie Postolache,
• Karin Leistner,
• Kornelius Nielsch and
• Ion M. Tiginyanu

Beilstein J. Nanotechnol. 2020, 11, 966–975, doi:10.3762/bjnano.11.81

Comparison of fresh and aged lithium iron phosphate cathodes using a tailored electrochemical strain microscopy technique

• Matthias Simolka,
• Hanno Kaess and
• Kaspar Andreas Friedrich

Beilstein J. Nanotechnol. 2020, 11, 583–596, doi:10.3762/bjnano.11.46

• locations, which points towards the importance of nanostructuring of battery materials to increase the boundary density. Moreover, the results from Figure 3 indicate that by using a |3| V dc-voltage amplitude for further measurements, the limiting factor for the resulting ESM signal intensity is not the

Design of a nanostructured mucoadhesive system containing curcumin for buccal application: from physicochemical to biological aspects

• Sabrina Barbosa de Souza Ferreira,
• Gustavo Braga,
• Évelin Lemos Oliveira,
• Jéssica Bassi da Silva,
• Hélen Cássia Rosseto,
• Lidiane Vizioli de Castro Hoshino,
• Mauro Luciano Baesso,
• Wilker Caetano,
• Craig Murdoch,
• Helen Elizabeth Colley and
• Marcos Luciano Bruschi

Beilstein J. Nanotechnol. 2019, 10, 2304–2328, doi:10.3762/bjnano.10.222

• chain. This is provided by the nanostructuring of polymer blends at body temperature, and hence, a P407 micelle structure with a hydrophobic nucleus and hydrophilic shell, which interacts with a mucoadhesive polymer in the external portion of polymeric micelles [10]. Moreover, these results are

Charged particle single nanometre manufacturing

• Philip D. Prewett,
• Cornelis W. Hagen,
• Claudia Lenk,
• Steve Lenk,
• Marcus Kaestner,
• Tzvetan Ivanov,
• Ahmad Ahmad,
• Ivo W. Rangelow,
• Xiaoqing Shi,
• Stuart A. Boden,
• Alex P. G. Robinson,
• Dongxu Yang,
• Sangeetha Hari,
• Marijke Scotuzzi and
• Ejaz Huq

Beilstein J. Nanotechnol. 2018, 9, 2855–2882, doi:10.3762/bjnano.9.266

• ; electron; field emission; ion; nanolithography; Review 1 Introduction Methods for nanostructuring – the fabrication of structures with sizes on the nanoscale – are required for the fabrication of next-generation nanoelectronics, such as quantum-based devices, for nanophotonics, nanobiotechnology

• lithography are the leading top-down methods. In this review we focus on another top-down generic technology, namely nanostructuring by charged particle beams used to expose a resist, which can be used as a mask for pattern transfer etching and metal deposition etc. Nanolithography using charged particle

High-throughput micro-nanostructuring by microdroplet inkjet printing

• Hendrikje R. Neumann and
• Christine Selhuber-Unkel

Beilstein J. Nanotechnol. 2018, 9, 2372–2380, doi:10.3762/bjnano.9.222

• steps that are only achievable with clean-room methods. For example, so-called “micro-nanostructures” have been fabricated by combining BCML with electron-beam lithography and photolithography [20][21]. A different approach was proposed based on topography-induced micro-nanostructuring, but this method

• BCML micro-nanostructuring strategies is the time for the patterning itself – it is much shorter and less complicated than other approaches that employ additional steps such as electron-beam lithography or photolithography [20][21]. A further result of the plasma treatment could be a rough surface

Localized photodeposition of catalysts using nanophotonic resonances in silicon photocathodes

• Evgenia Kontoleta,
• Sven H. C. Askes,
• Lai-Hung Lai and
• Erik C. Garnett

Beilstein J. Nanotechnol. 2018, 9, 2097–2105, doi:10.3762/bjnano.9.198

• carrier. Nanostructuring the main photoactive material, e.g., a semiconductor, has proven to be a promising method for increasing the efficiency of solar fuel generation [7][8]. The higher surface to volume ratio in nanostructured semiconductors ensures the use of less material, reduces the requirements

Laser-assisted fabrication of gold nanoparticle-composed structures embedded in borosilicate glass

• Nikolay Nedyalkov,
• Mihaela Koleva,
• Nadya Stankova,
• Rosen Nikov,
• Mitsuhiro Terakawa,
• Yasutaka Nakajima,
• Lyubomir Aleksandrov and
• Reni Iordanova

Beilstein J. Nanotechnol. 2017, 8, 2454–2463, doi:10.3762/bjnano.8.244

• glass; laser nanostructuring; optical properties of composite materials; Introduction The unique optical properties of noble-metal nanoparticles continue to attract the attention of researchers, especially in view of the potential industrial applications. The basic characteristics of the interaction of

Au nanostructure fabrication by pulsed laser deposition in open air: Influence of the deposition geometry

• Rumen G. Nikov,
• Anna Og. Dikovska,
• Nikolay N. Nedyalkov,
• Georgi V. Avdeev and
• Petar A. Atanasov

Beilstein J. Nanotechnol. 2017, 8, 2438–2445, doi:10.3762/bjnano.8.242

• particles (Figure 4d). In this case, the deposition of the nanoparticles, aggregates and droplets, and their growth by accumulation of material, were the main mechanism driving the nanostructuring process. It could be concluded that the morphology of the structures obtained by PLD in open air depends

Systematic control of α-Fe₂O₃ crystal growth direction for improved electrochemical performance of lithium-ion battery anodes

• Nan Shen,
• Miriam Keppeler,
• Barbara Stiaszny,
• Holger Hain,
• Filippo Maglia and
• Madhavi Srinivasan

Beilstein J. Nanotechnol. 2017, 8, 2032–2044, doi:10.3762/bjnano.8.204

• for micrometer-sized materials, but becomes feasible for their nanostructured derivatives [9][11][16][17][18][19][20]. Therefore, morphology control and nanostructuring of α-Fe2O3 is of great topical importance. Among several synthesis methods for α-Fe2O3 crystal phases, including precipitation and

Synthesis of [Fe(L_eq)(L_ax)]_n coordination polymer nanoparticles using blockcopolymer micelles

• Christoph Göbel,
• Ottokar Klimm,
• Florian Puchtler,
• Sabine Rosenfeldt,
• Stephan Förster and
• Birgit Weber

Beilstein J. Nanotechnol. 2017, 8, 1318–1327, doi:10.3762/bjnano.8.133

• molecules included in the crystal packing [46][47][48][49]. To allow a comparison between bulk material and nanoparticles and to study the influence of nanostructuring on magnetism, the bulk complexes were synthesised in THF and their magnetic properties were investigated. [FeLeq(bpea)]n and [FeLeq(bpee)]n

Thickness-modulated tungsten–carbon superconducting nanostructures grown by focused ion beam induced deposition for vortex pinning up to high magnetic fields

• Ismael García Serrano,
• Javier Sesé,
• Isabel Guillamón,
• Hermann Suderow,
• Sebastián Vieira,
• Manuel Ricardo Ibarra and
• José María De Teresa

Beilstein J. Nanotechnol. 2016, 7, 1698–1708, doi:10.3762/bjnano.7.162

• potential. Our measurements on the flat sample show that our films have very weak intrinsic pinning, so that the matching effect is largely dominated by the artificial sample nanostructuring. Thus, the combination of the absence of intrinsic pinning and the capability of making very small structures using

Nano- and microstructured materials for in vitro studies of the physiology of vascular cells

• Alexandra M. Greiner,
• Adria Sales,
• Hao Chen,
• Sarah A. Biela,
• Dieter Kaufmann and
• Ralf Kemkemer

Beilstein J. Nanotechnol. 2016, 7, 1620–1641, doi:10.3762/bjnano.7.155

• - and nanostructuring are glass [119], ceramics [119][120][121][122] or natural polymers that can also be synthetically modified by, e.g., functionalizing with an artificial polymeric group [113][123]. Coating of these materials with silicon carbide, expanded polytetrafluoroethylene, tantalum, and

• nanostructuring of medical implants for the in vivo control and stimulation of (vascular) cells behavior [8][9][10][12][201][202]. For example, it has been demonstrated that an efficient approach to improve the functions of a medical stent is the application of a morphological texture to the stent surface

Nanostructured germanium deposited on heated substrates with enhanced photoelectric properties

• Ionel Stavarache,
• Valentin Adrian Maraloiu,
• Petronela Prepelita and
• Gheorghe Iordache

Beilstein J. Nanotechnol. 2016, 7, 1492–1500, doi:10.3762/bjnano.7.142

• thin films during deposition at temperatures lower than those necessary for nanostructuring Ge-nps by thermal annealing after deposition. To optimize the substrate temperature, Al/n-Si/Ge:SiO2/ITO photodetector test structures have been fabricated by magnetron sputtering at low temperatures of 300, 400

Linear and nonlinear optical properties of hybrid metallic–dielectric plasmonic nanoantennas

• Mario Hentschel,
• Bernd Metzger,
• Bastian Knabe,
• Karsten Buse and
• Harald Giessen

Beilstein J. Nanotechnol. 2016, 7, 111–120, doi:10.3762/bjnano.7.13

• chemical synthesis and subsequent nanostructuring [74]. In order to increase a possible signal from the LiNbO3 particles, which intrinsically break inversion symmetry, we have to align them with respect to the antenna axis. As the particles are ferroelectric and exhibit a spontaneous macroscopic electric