Uniform arrays of gold nanoelectrodes with tuneable recess depth

• Elena O. Gordeeva,
• Ilya V. Roslyakov,
• Alexey P. Leontiev,
• Alexey A. Klimenko and
• Kirill S. Napolskii

Beilstein J. Nanotechnol. 2021, 12, 957–964, doi:10.3762/bjnano.12.72

• direct-writing using electron beam lithography [11][12] or ion beam milling [13][14]) are limited by the ensemble area and expensive in mass production, but allow one to precisely tune the parameters of an array (a geometry of individual electrodes and the distance between them) over a wide range. An

Recent progress in actuation technologies of micro/nanorobots

• Ke Xu and
• Bing Liu

Beilstein J. Nanotechnol. 2021, 12, 756–765, doi:10.3762/bjnano.12.59

• towards the platinum end, and a maximum movement speed of 4 μm/s was achieved. After that, Chen et al. [40] designed a Z-shaped platinum hybrid nanorobot in order to meet the growing demand for micro/nanorobots in the biomedical field. It was manufactured using a combination of focused ion beam and plasma

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

• Frances I. Allen

Beilstein J. Nanotechnol. 2021, 12, 633–664, doi:10.3762/bjnano.12.52

• multifaceted instrument enabling a broad range of applications beyond imaging in which the finely focused helium ion beam is used for a variety of defect engineering, ion implantation, and nanofabrication tasks. Operation of the ion source with neon has extended the reach of this technology even further. This

• ; focused helium ion beam-induced deposition; focused helium ion beam milling; helium ion beam lithography; helium ion implantation; Introduction Since the helium ion microscope (HIM) was introduced 15 years ago [1][2][3], over one hundred HIMs have been installed worldwide and over one thousand research

• focused ion beam as it is scanned across the sample. Compared with the scanning electron microscope (SEM), the HIM offers enhanced surface sensitivity, greater topographic contrast, and a larger depth of field [4][5]. A charge-neutralization system based on flooding the scanned region with low-energy

Spontaneous shape transition of Mn_xGe_1−x islands to long nanowires

• S. Javad Rezvani,
• Luc Favre,
• Gabriele Giuli,
• Yiming Wubulikasimu,
• Isabelle Berbezier,
• Augusto Marcelli,
• Luca Boarino and
• Nicola Pinto

Beilstein J. Nanotechnol. 2021, 12, 366–374, doi:10.3762/bjnano.12.30

• and 25 mA with a graphite monochromator. Step-scan diffractograms were collected in the 2θ range of 3–70° with 0.02° step and 3 s/step counting time. For HRTEM analysis, focused ion beam (FIB) lamellae were prepared using a dual-beam FIB. The lamellae were oriented along the elongation direction. The

Structural and optical characteristics determined by the sputtering deposition conditions of oxide thin films

• Petronela Prepelita,
• Florin Garoi and
• Valentin Craciun

Beilstein J. Nanotechnol. 2021, 12, 354–365, doi:10.3762/bjnano.12.29

• -frequency magnetron sputtering (rfMS) [27][28][29][30], vacuum thermal evaporation (VTE) [31][32][33], chemical methods [34], reactive ion beam sputter deposition [35], among others. For example, SiO2 and ZnO films obtained by rfMS can be either used as dielectric materials in metasurface structures or as

The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

• Victor Deinhart,
• Lisa-Marie Kern,
• Jan N. Kirchhof,
• Sabrina Juergensen,
• Joris Sturm,
• Enno Krauss,
• Thorsten Feichtner,
• Sviatoslav Kovalchuk,
• Michael Schneider,
• Dieter Engel,
• Bastian Pfau,
• Bert Hecht,
• Kirill I. Bolotin,
• Stephanie Reich and
• Katja Höflich

Beilstein J. Nanotechnol. 2021, 12, 304–318, doi:10.3762/bjnano.12.25

• geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o

• -mat are presented. Keywords: automated patterning; focused He ion beam; graphene; magnetic multilayers; mechanical resonator; pattern generation; plasmonic antennas; two-dimensional materials; Introduction Future breakthroughs in nanotechnology will rely on the ability to fabricate materials and

• nanometer range is heavily sought after. One promising candidate for ultraprecise nanofabrication is focused ion beam (FIB) machining. Focused ion beams locally remove material based on physical sputtering with a large degree of flexibility due to advanced beam control. FIB patterning is a direct single

Scanning transmission helium ion microscopy on carbon nanomembranes

• Daniel Emmrich,
• Annalena Wolff,
• Nikolaus Meyerbröker,
• Jörg K. N. Lindner,
• André Beyer and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2021, 12, 222–231, doi:10.3762/bjnano.12.18

• detector in the dark field [20]. Kavanagh et al. used a silicon diode array as a pixelated sensor for transmission imaging to observe ion beam scattering with a static beam and as an end-point detection for pore milling into graphite sheets [21]. This work presents the design and capabilities of a dark

• the set. Figure 4a shows a freestanding membrane that was intentionally ruptured by a high-flux helium ion beam prior to imaging. The image shows the rupture, the membrane, and a folded layer of the CNM. At small acceptance angles, the membrane yields a high-intensity signal, while the overall

Imaging of SARS-CoV-2 infected Vero E6 cells by helium ion microscopy

• Natalie Frese,
• Patrick Schmerer,
• Martin Wortmann,
• Matthias Schürmann,
• Matthias König,
• Michael Westphal,
• Friedemann Weber,
• Holger Sudhoff and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2021, 12, 172–179, doi:10.3762/bjnano.12.13

• of its sub-nanometer imaging and ion-beam nanofabrication capabilities in materials science and engineering [1]. Although HIM soon proved to be a promising tool in the life sciences, the examination of biological samples by HIM proceeded at a much slower pace. In recent years, it has been used in the

• addition to the improved conductivity of the specimen, the deposited layer may contribute to the electron density of the surface, thus increasing secondary electron yield. This effect, commonly referred to as electron- and/or ion beam-induced deposition, is commonly observed in charged-particle microscopes

Mapping the local dielectric constant of a biological nanostructured system

• Wescley Walison Valeriano,
• Rodrigo Ribeiro Andrade,
• Juan Pablo Vasco,
• Angelo Malachias,
• Bernardo Ruegger Almeida Neves,
• Paulo Sergio Soares Guimarães and
• Wagner Nunes Rodrigues

Beilstein J. Nanotechnol. 2021, 12, 139–150, doi:10.3762/bjnano.12.11

• . The scanning electron microscopy (SEM) image presented in Figure 2 shows the nanostructured section of a fragment of the red region indicated in Figure 1a. The section was partially polished using a focused ion beam (FIB) and the multilayered structure is clearly visible. The corrugated surface is the

Bio-imaging with the helium-ion microscope: A review

• Matthias Schmidt,
• James M. Byrne and
• Ilari J. Maasilta

Beilstein J. Nanotechnol. 2021, 12, 1–23, doi:10.3762/bjnano.12.1

• that HIM is compatible with the powerful technique of immunogold labelling. Secondly, Joens et al. introduced the ion-beam milling capabilities of the HIM to biological applications when they opened up the mouth cavity of a nematode [6]. In the same paper, Joens et al. furthermore demonstrated on

• published in 2018 by Sato et al., who used the ionoluminescense generated by the He ion beam to detect ZnO nanoparticles which were incubated with COS7 cells [25]. Today HIM-SIMS is possible via two different approaches. The first, a sector-field mass-spectrometer SIMS, was developed by Dowsett, Wirtz, et

• contrast mechanism occurs when HIM is used to study insulating or poorly conducting materials such as most biological specimens. Here, differences in local conductivity result in the accumulation of positive charges under the ion beam, which hampers the emission of secondary electrons and results in a

Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector

• Eduardo Serralta,
• Nico Klingner,
• Olivier De Castro,
• Michael Mousley,
• Santhana Eswara,
• Serge Duarte Pinto,
• Tom Wirtz and
• Gregor Hlawacek

Beilstein J. Nanotechnol. 2020, 11, 1854–1864, doi:10.3762/bjnano.11.167

• Eduardo Serralta Nico Klingner Olivier De Castro Michael Mousley Santhana Eswara Serge Duarte Pinto Tom Wirtz Gregor Hlawacek Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstr. 400, 01328 Dresden, Germany Technische Universität Dresden

• temporal resolution, is sensitive to both ions and neutral particles over a wide energy range, and shows robustness against ion beam-induced damage. A special in-vacuum movable support gives the possibility of moving the detector vertically, placing the detector closer to the sample for the detection of

• microscopy; scanning transmission ion microscopy; Introduction The helium ion microscope (HIM) is an instrument that has already proven its value for high-resolution imaging, compositional analysis, nanofabrication, and materials modification [1][2]. It generates a focused helium (or neon) ion beam with sub

Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources

• Nico Klingner,
• Gregor Hlawacek,
• Paul Mazarov,
• Wolfgang Pilz,
• Fabian Meyer and
• Lothar Bischoff

Beilstein J. Nanotechnol. 2020, 11, 1742–1749, doi:10.3762/bjnano.11.156

• Nico Klingner Gregor Hlawacek Paul Mazarov Wolfgang Pilz Fabian Meyer Lothar Bischoff Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund, Germany 10.3762

• /bjnano.11.156 Abstract While the application of focused ion beam (FIB) techniques has become a well-established technique in research and development for patterning and prototyping on the nanometer scale, there is still a large underused potential with respect to the usage of ion species other than

• resolution of Ne+ from a gas field ion source. The comparison allows one to select the best possible ion species for the specific demands in terms of resolution, beam current, and volume to be drilled. Keywords: focused ion beam; gas field ion source; liquid metal alloy ion source; resolution; Introduction

Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams

• Serguei Chiriaev,
• Luciana Tavares,
• Vadzim Adashkevich,
• Arkadiusz J. Goszczak and
• Horst-Günter Rubahn

Beilstein J. Nanotechnol. 2020, 11, 1693–1703, doi:10.3762/bjnano.11.151

• Southern Denmark, Alsion 2, Sønderborg, 6400, Denmark 10.3762/bjnano.11.151 Abstract This work explores a new technique for the out-of-plane patterning of metal thin films prefabricated on the surface of a polymer substrate. This technique is based on an ion-beam-induced material modification in the bulk

• of the polymer. Effects of subsurface and surface processes on the surface morphology have been studied for three polymer materials: poly(methyl methacrylate), polycarbonate, and polydimethylsiloxane, by using focused ion beam irradiation with He+, Ne+, and Ga+. Thin films of a Pt60Pd40 alloy and of

• irradiation-induced mechanical strain in the patterning process are elaborated and discussed. Keywords: direct patterning; focused helium ion beam; out-of-plane nanopatterning; polymers; thin films; Introduction Micro- and nanofabrication with focused ion beams (FIBs) is currently a subject of strong

Oxidation of Au/Ag films by oxygen plasma: phase separation and generation of nanoporosity

• Abdel-Aziz El Mel,
• Said A. Mansour,
• Mujaheed Pasha,
• Atef Zekri,
• Janarthanan Ponraj,
• Akshath Shetty and
• Yousef Haik

Beilstein J. Nanotechnol. 2020, 11, 1608–1614, doi:10.3762/bjnano.11.143

• increased in size (Figure 3e,f). To investigate whether the formed nanoporous microspheres have a hollow interior or not, a cross-section SEM specimen from the sample oxidized for 30 min was prepared using focused ion beam (FIB) (Figure 3e). According to the results, the microspheres were not hollow and the

Fabrication of nano/microstructures for SERS substrates using an electrochemical method

• Jingran Zhang,
• Tianqi Jia,
• Xiaoping Li,
• Junjie Yang,
• Zhengkai Li,
• Guangfeng Shi,
• Xinming Zhang and
• Zuobin Wang

Beilstein J. Nanotechnol. 2020, 11, 1568–1576, doi:10.3762/bjnano.11.139

• ion beam (FIB) technology can also be used to directly fabricate high-precision nanostructures on surfaces made of silicon, silicon dioxide and metal [27][28][29][30][31][32][33]. FIB technology is therefore used as a processing method for SERS substrates. Using the FIB method, Lin et al. [29

Helium ion microscope – secondary ion mass spectrometry for geological materials

• Matthew R. Ball,
• Richard J. M. Taylor,
• Joshua F. Einsle,
• Fouzia Khanom,
• Christelle Guillermier and
• Richard J. Harrison

Beilstein J. Nanotechnol. 2020, 11, 1504–1515, doi:10.3762/bjnano.11.133

• Carl Zeiss SMT Inc., Peabody, MA, USA 10.3762/bjnano.11.133 Abstract The helium ion microscope (HIM) is a focussed ion beam instrument with unprecedented spatial resolution for secondary electron imaging but has traditionally lacked microanalytical capabilities. With the addition of the secondary ion

• focussed ion beam (FIB) instrument, which uses a gas field ion source (GFIS) to create highly focussed beams of noble gas ions, utilising the same working principle as the field ion microscope (FIM). This was originally used to form a primary helium beam [1], but the principle of the GFIS has since been

• extended to the heavier noble gas neon [2] and may be applicable for even heavier noble gases such as argon. Whilst the HIM was shown to achieve exceptional imaging resolution using secondary electrons generated by the primary ion beam [3][4][5][6], it lacked microanalytical capabilities. There were

Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir

• Mathias Franz,
• Romy Junghans,
• Paul Schmitt,
• Adriana Szeghalmi and
• Stefan E. Schulz

Beilstein J. Nanotechnol. 2020, 11, 1439–1449, doi:10.3762/bjnano.11.128

• PVD methods. The deposition of gold and palladium was done by magnetron sputtering. The film thickness has been adjusted by the use of a calibrated deposition rate. Ion beam sputter deposition (IBSD) has been used to deposit platinum and copper. For copper deposition, the thickness has been controlled

Effect of localized helium ion irradiation on the performance of synthetic monolayer MoS₂ field-effect transistors

• Jakub Jadwiszczak,
• Pierce Maguire,
• Conor P. Cullen,
• Georg S. Duesberg and
• Hongzhou Zhang

Beilstein J. Nanotechnol. 2020, 11, 1329–1335, doi:10.3762/bjnano.11.117

• study of the electrical performance of chemically synthesized monolayer molybdenum disulfide (MoS2) field-effect transistors irradiated with a focused helium ion beam as a function of increasing areal irradiation coverage. We determine an optimal coverage range of approx. 10%, which allows for the

• improvement of both the carrier mobility in the transistor channel and the electrical conductance of the MoS2, due to doping with ion beam-created sulfur vacancies. Larger areal irradiations introduce a higher concentration of scattering centers, hampering the electrical performance of the device. In addition

• , we find that irradiating the electrode–channel interface has a deleterious impact on charge transport when contrasted with irradiations confined only to the transistor channel. Keywords: 2D materials; contacts; defect engineering; helium ion microscope; ion beam doping; vacancies; two-dimensional

An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization

• Santiago H. Andany,
• Gregor Hlawacek,
• Stefan Hummel,
• Charlène Brillard,
• Mustafa Kangül and
• Georg E. Fantner

Beilstein J. Nanotechnol. 2020, 11, 1272–1279, doi:10.3762/bjnano.11.111

• Santiago H. Andany Gregor Hlawacek Stefan Hummel Charlene Brillard Mustafa Kangul Georg E. Fantner Laboratory for Bio- and Nano-Instrumentation, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne CH-1015, Switzerland Institute of Ion Beam Physics and Materials Research, Helmholtz

• for nanomechanical property mapping, as well as for electrical and magnetic characterization of the sample after focused ion beam materials modification with the HIM. The experimental setup is described and evaluated through a series of correlative experiments, demonstrating the feasibility of the

• technique with electron beam and ion beam techniques for correlative nanoscale characterization and nanoscale fabrication. The motivation was driven by the new opportunity to investigate and transform features in situ with complementary techniques, thus revealing maximum information without breaking the

3D superconducting hollow nanowires with tailored diameters grown by focused He⁺ beam direct writing

• Rosa Córdoba,
• Alfonso Ibarra,
• Dominique Mailly,
• Isabel Guillamón,
• Hermann Suderow and
• José María De Teresa

Beilstein J. Nanotechnol. 2020, 11, 1198–1206, doi:10.3762/bjnano.11.104

• tungsten carbide nanowires with tailored diameters by tuning two key growth parameters, namely current and dose of the ion beam. Our results show the control of geometry in 3D hollow nanowires, with outer and inner diameters ranging from 36 to 142 nm and from 5 to 28 nm, respectively; and lengths from 0.5

• nano-antennas and sensors, based on 3D superconducting architectures. Keywords: electron tomography; focused ion beam induced deposition (FIBID); helium ion microscope; magneto-transport measurements; nano-superconductors; tungsten carbide (WC); Introduction Superconductors are dissipationless

• dramatically, mostly due to the complex fabrication and characterization. A technique successfully utilized for fabricating 3D nano-objects is direct writing by a focused beam of positively charged particles, the so-called focused-ion-beam induced deposition (FIBID) [20]. A very promising development of FIBID

A Josephson junction based on a highly disordered superconductor/low-resistivity normal metal bilayer

• Pavel M. Marychev and
• Denis Yu. Vodolazov

Beilstein J. Nanotechnol. 2020, 11, 858–865, doi:10.3762/bjnano.11.71

• -thickness SN-N-SN bilayer in which the superconducting layer is partially (or entirely) etched by means of a focused ion beam. A sufficiently thick normal metal layer act as a good thermal bath, which yields a nonhysteretic current–voltage characteristic even at low temperatures. However, the increase of

• about 5 nm, which is smaller than ξc in NbN, with the help of helium ion beam lithography. The successful implementation of this method could lead to the creation of low-temperature nanoscale Josephson junctions and arrays of them. For example, SN-S-SN junctions can be promising to use in programmable

A set of empirical equations describing the observed colours of metal–anodic aluminium oxide–Al nanostructures

• Cristina V. Manzano,
• Jakob J. Schwiedrzik,
• Gerhard Bürki,
• Laszlo Pethö,
• Johann Michler and
• Laetitia Philippe

Beilstein J. Nanotechnol. 2020, 11, 798–806, doi:10.3762/bjnano.11.64

• (yielding to the same porosity), changing only the second anodization time (from 120 to 600 s) to obtain different film thicknesses (from 209 ± 12 nm to 380 ± 15 nm). Focused ion beam (FIB) milling and field-emission scanning electron microscopy (FESEM) imaging were used to accurately determine the

• focused ion beam (FIB) instrument (TESCAN Lyra, Brno, Czech Republic) with a gallium source at 30 kV and 180–400 pA. 2 µm of platinum was deposited to protect the surface prior to FIB cutting. FESEM images were taken in three different areas of the films and three different measurements were carried out

Hexagonal boron nitride: a review of the emerging material platform for single-photon sources and the spin–photon interface

• Stefania Castelletto,
• Faraz A. Inam,
• Shin-ichiro Sato and
• Alberto Boretti

Beilstein J. Nanotechnol. 2020, 11, 740–769, doi:10.3762/bjnano.11.61

• the BNNTs, the PL is photostable, althougt the SPE purity is still not exceptional. In [118] SPE in a ball-like 0D BN allotrope with dimensions ≈1–100 nm, known as nanococoon BNNC, is shown. The density of the SPEs was increased by dual-beam focused ion beam and SEM to selectively irradiate the sample

• controlled formation and properties. Random generation in the material using bubble strain-induced SPEs is also demonstrated in [125]. Focused ion beam irradiation was used to mill holes in the h-BN to achieve array-like SPEs around the perimeter of the holes [126]. This method yield is very high compared to

• grown on copper, nickel and iron substrates, with a high density of SPEs of ≈100−200 per 10 × 10 µm2 with more defined ZPLs at (580 ± 10) nm. The most promising approaches seem to be the strain-induced methods and the focused ion beam method, possibly combined with low-pressure CVD for more controlled

Electromigration-induced directional steps towards the formation of single atomic Ag contacts

• Atasi Chatterjee,
• Christoph Tegenkamp and
• Herbert Pfnür

Beilstein J. Nanotechnol. 2020, 11, 680–687, doi:10.3762/bjnano.11.55

• shell effects, can be discriminated. Although the directional motion of atoms during EM leads to specific properties such as the instabilities mentioned, similarities to mechanically opened contacts with respect to cross-sectional stability were found. Keywords: electromigration; focussed ion beam

• could not be identified visually nor be reproducibly generated. This contrasts with experiments where the smallest constriction was reduced by one order of magnitude down to about 15 nm using a focused ion beam (FIB), i.e., far below the average grain size in the Ag film, in which complex morphological

Comparison of fresh and aged lithium iron phosphate cathodes using a tailored electrochemical strain microscopy technique

• Matthias Simolka,
• Hanno Kaess and
• Kaspar Andreas Friedrich

Beilstein J. Nanotechnol. 2020, 11, 583–596, doi:10.3762/bjnano.11.46

• spectroscopy (EDS or EDX) it adds chemical information on the elemental distribution to the structural analysis. Further methods that have been applied to study ageing in LFP are X-ray photoelectron spectroscopy (XPS), inductively coupled plasma (ICP), transmission electron microscopy (TEM), focused ion beam