Soft materials nanoarchitectonics: liquid crystals, polymers, gels, biomaterials, and others

• Katsuhiko Ariga

Beilstein J. Nanotechnol. 2025, 16, 1025–1067, doi:10.3762/bjnano.16.77

• photoisomerization of azobenzene monolayers can be amplified to the material level. Azobenzene molecules present at the molecular level on a substrate can alter the orientation of nematic liquid crystals over a micrometer-level thickness in the overlying liquid crystal cell (Figure 8B). As a consequence of this

• between the phosphate groups of the complexes and the positively charged ammonium groups of the polyelectrolyte. The alignment of lamellae in a parallel orientation to the substrate is significantly influenced by the percentage of surfactant present. An increase in surfactant concentration results in the

• substrate prepared by sulfonation (Figure 16). The material, which exhibits a bifunctional system of antioxidants and antibacterial properties on its surface, was employed as a model implant to effectively treat diabetic bone defects and restore the integration and remodeling of the implant and surrounding

Time-resolved probing of laser-induced nanostructuring processes in liquids

• Maximilian Spellauge,
• David Redka,
• Mianzhen Mo,
• Changyong Song,
• Heinz Paul Huber and
• Anton Plech

Beilstein J. Nanotechnol. 2025, 16, 968–1002, doi:10.3762/bjnano.16.74

Shape, membrane morphology, and morphodynamic response of metabolically active human mitochondria revealed by scanning ion conductance microscopy

• Eric Lieberwirth,
• Anja Schaeper,
• Regina Lange,
• Ingo Barke,
• Simone Baltrusch and
• Sylvia Speller

Beilstein J. Nanotechnol. 2025, 16, 951–967, doi:10.3762/bjnano.16.73

• , from zero (indicating the substrate level, corresponding to the temporary absence of the mitochondrion at that position) to the maximum height of the mitochondrion. Interestingly, this height intermittency also occurs at positions several hundred nanometers away from the mitochondrion’s edge (see

• to the substrate prevents movement. In contrast, mitochondria, due to their spherical shape, make only minimal contact with the immobilising substrate. As a result, they may “tilt” when the nanopipette approaches too quickly, then relax back to their original position when the pipette moves away

• field originating from the ζ-potential acting as the mediating stimulus. The intermittency effect: This phenomenon is attributed to the geometry of the mitochondria, which are only weakly in contact with the substrate due to their spherical or ellipsoidal shapes. Additionally, the lack of adhesion

Focused ion beam-induced platinum deposition with a low-temperature cesium ion source

• Thomas Henning Loeber,
• Bert Laegel,
• Meltem Sezen,
• Feray Bakan Misirlioglu,
• Edgar J. D. Vredenbregt and
• Yang Li

Beilstein J. Nanotechnol. 2025, 16, 910–920, doi:10.3762/bjnano.16.69

• time, and refresh time, precursor material and substrate have an influence on the effective deposition rate. Gallium (Ga+) and helium (He+) are the most often utilized ion species for FIBID [1][2][5]. Besides these standard FIB systems, new kinds of laser-cooled ion sources have been developed in the

• density of 6 pA·μm−2 . Before deposition, a small part of the Si substrate was gently milled with the Cs+ FIB at 16 kV, such that any native oxide and other contaminations were completely removed at this location. With that, the influence of oxygen molecules on the deposited layer can be excluded. The

• from the data provided by TEM-EDS analysis. An exemplary EDS map for 16 kV 54 pA Cs+ FIBID-Pt is shown in Figure 5. The Si-rich region shown as the red area in the upper-right corner of the Si map corresponds to the Si substrate. Before the TEM sample preparation process, a C layer was deposited on top

Characterization of ion track-etched conical nanopores in thermal and PECVD SiO₂ using small angle X-ray scattering

• Shankar Dutt,
• Rudradeep Chakraborty,
• Christian Notthoff,
• Pablo Mota-Santiago,
• Christina Trautmann and
• Patrick Kluth

Beilstein J. Nanotechnol. 2025, 16, 899–909, doi:10.3762/bjnano.16.68

• the undamaged material, which can be exploited for the fabrication of nanopores with narrow size distribution [13][29][40]. The geometry of the resulting nanopores is determined by several factors, including the substrate material, the type and concentration of the etchant, the density of the material

• can only be grown on a Si substrate. PECVD, in contrast, allows for the deposition at much lower temperatures on many different substrates with control over the film properties, such as stoichiometry, density, refractive index, and residual stress. As these fabrication methods involve fundamentally

• as is, and the Si substrate was not removed before SAXS measurements. The sample-to-detector distances ranged between 7.2 and 7.6 m. Data collection was performed using Pilatus 1M and Pilatus 2M detectors during different measurement cycles. A silver behenate (AgBeh) standard was used to calibrate

Heat-induced transformation of nickel-coated polycrystalline diamond film studied in situ by XPS and NEXAFS

• Olga V. Sedelnikova,
• Yuliya V. Fedoseeva,
• Dmitriy V. Gorodetskiy,
• Yuri N. Palyanov,
• Elena V. Shlyakhova,
• Eugene A. Maksimovskiy,
• Anna A. Makarova,
• Lyubov G. Bulusheva and
• Aleksandr V. Okotrub

Beilstein J. Nanotechnol. 2025, 16, 887–898, doi:10.3762/bjnano.16.67

• %) could be associated with the heat-induced reorganization of the Ni layer into particles, which can penetrate into the diamond substrate due to the counter-diffusion of carbon and nickel [19]. The immersing of metal particles into diamond was discussed in detail in previous works [27][28]. The XPS C 1s

• 68.1 eV corresponds to the oxidized states of nickel (Ni–O). The appearance of these states may be due to the interaction of nickel with residual water in the vacuum chamber or with oxygen desorbed from the silicon substrate during annealing [47]. The low-energy doublet with the Ni 3p3/2 component at

• crystallinity of the sp2 carbon coating was observed in the case of the SCD substrate. Changing the angle between the synchrotron beam and the flat surface of Ni-SCD revealed a significant increase in the π*(sp2) peak intensity at normal incidence. This behavior indicates an anisotropic texture of sp2 carbon

Ar⁺ implantation-induced tailoring of RF-sputtered ZnO films: structural, morphological, and optical properties

• Manu Bura,
• Divya Gupta,
• Arun Kumar and
• Sanjeev Aggarwal

Beilstein J. Nanotechnol. 2025, 16, 872–886, doi:10.3762/bjnano.16.66

• are versatile in developing high-performance electro-optical and spintronic devices [18]. Experimental ZnO films are grown on a quartz substrate (1 × 1 cm2) using a ZnO (99.99%) target (2″ diameter and 3 mm thickness) in a radio frequency (RF) sputtering system. The quartz substrate is ultrasonically

• strain in the implanted layers; thus, the microstrain values increase with fluence [24]. Strain in implanted ZnO films arises primarily from lattice mismatch, which is due to the difference in thermal expansion coefficients between film and substrate. Also, when argon ions are implanted into the ZnO

• the Si substrate, the oxygen content contains contributions from both SiO2 and ZnO. The variations in grain size and RMS roughness of ZnO films with increase in ion fluence follow the same trend in AFM and FESEM analyses, but with different magnitudes. This is because of the greater sensitivity of AFM

Insights into the electronic and atomic structures of cerium oxide-based ultrathin films and nanostructures using high-brilliance light sources

• Paola Luches and
• Federico Boscherini

Beilstein J. Nanotechnol. 2025, 16, 860–871, doi:10.3762/bjnano.16.65

• of ultrathin epitaxial cerium oxide films on Pt(111) demonstrated the influence of the substrate in 2 monolayer (ML) films. Figure 4a shows the Ce–O in-plane and out-of-plane distances obtained from the analysis of EXAFS data acquired on a 2 ML and on a 10 ML ceria film. Figure 4a also reports the

• calculated assuming the bulk elastic constants. The 2 ML film adopts an epitaxial in-plane compression to match the substrate in a dominant 3aCeO2 = 4aPt (Figure 4a). The out-of-plane Ce–O bonds in the ultrathin film appear shorter than expected considering the bulk elastic constants, possibly because of the

• associated to the formation of a Ce–Pt alloyed interfacial phase exhibiting a (2 × 2) periodicity [47]. The influence of the substrate on the stability and reactivity of supported ceria nanoislands has also been investigated by Ce M5 XANES in the case of Au(111) [48]. A loss of redox activity accompanied by

Synchrotron X-ray photoelectron spectroscopy study of sodium adsorption on vertically arranged MoS₂ layers coated with pyrolytic carbon

• Alexander V. Okotrub,
• Anastasiya D. Fedorenko,
• Anna A. Makarova,
• Veronica S. Sulyaeva,
• Yuliya V. Fedoseeva and
• Lyubov G. Bulusheva

Beilstein J. Nanotechnol. 2025, 16, 847–859, doi:10.3762/bjnano.16.64

• . In this work, to reveal the effect of carbon coating on the interaction of sodium with the MoS2 layers located vertically relative to the substrate, model experiments were carried out using synchrotron-radiation-induced X-ray photoelectron spectroscopy (XPS). Sodium vapor obtained by heating a sodium

• decomposition residues. Results and Discussion Figure 1a shows the schematic diagram of the synthesis route of a hybrid film consisting of MoS2 coated with PyC. A molybdenum layer is deposited on a SiO2/Si substrate by magnetron sputtering for a short time of 10 s. This layer interacts with sulfur vapor at a

• wet transfer method (see the Experimental section for details). The resulting hybrid, designated PyC-MoS2, together with a surface-cleaned MoS2/SiO2/Si sample and a PyC film transferred onto a SiO2/Si substrate, were used to comparatively study the ability to adsorb and accumulate evaporated sodium

Facile one-step radio frequency magnetron sputtering of Ni/NiO on stainless steel for an efficient electrode for hydrogen evolution reaction

• Ha Huu Do,
• Khac Binh Nguyen,
• Phuong N. Nguyen and
• Hoai Phuong Pham

Beilstein J. Nanotechnol. 2025, 16, 837–846, doi:10.3762/bjnano.16.63

• preserved substrate are definite advantages. Although studies have recognized the effectiveness of magnetron sputtering, research has yet to systematically investigate the effect of the O2 flow rate on the HER efficiency of Ni/NiO catalysts. Commercial stainless steel (SS) costs less than other conductive

• carried out to analyze the morphology of the Ni/NiO thin film on the SS substrate. The as-synthesized Ni/NiO film at 5 sccm of O2 flow rate showed uniform and continuous appearance on the entire surface of the SS substrate (Figure 2a,e). However, at high O2 flow rates, the surface of Ni/NiO/SS-10, Ni/NiO

• with a thickness of 1 mm was used as a substrate for catalyst growth. Fabrication of the Ni/NiO/SS samples Grade 304 SS was cut into pieces of 60 mm × 25 mm, washed with soap, and then sonicated in a mixture of acetone and ethanol to remove the impurities left on the SS template. After that, thin films

Synthesis and magnetic transitions of rare-earth-free Fe–Mn–Ni–Si-based compositionally complex alloys at bulk and nanoscale

• Shabbir Tahir,
• Tatiana Smoliarova,
• Carlos Doñate-Buendía,
• Michael Farle,
• Natalia Shkodich and
• Bilal Gökce

Beilstein J. Nanotechnol. 2025, 16, 823–836, doi:10.3762/bjnano.16.62

• successful in producing CCA NPs, they come with certain drawbacks. For instance, carbothermal synthesis requires an electrically conductive substrate, making it unsuitable for large-scale production [37]. Pyrolysis requires purification steps to eliminate polymer impurities and also result in phase

Supramolecular hydration structure of graphene-based hydrogels: density functional theory, green chemistry and interface application

• Hon Nhien Le,
• Duy Khanh Nguyen,
• Minh Triet Dang,
• Huyen Trinh Nguyen,
• Thi Bang Tam Dao,
• Trung Do Nguyen,
• Chi Nhan Ha Thuc and
• Van Hieu Le

Beilstein J. Nanotechnol. 2025, 16, 806–822, doi:10.3762/bjnano.16.61

• , leading to facile brush coating on plastic films of polylactide (PLA). Dehydrated GO-SG-ZH coating is adhered to the PLA substrate through interfacial interactions. Furthermore, antibacterial activities, coating stability, and mechanical properties of the nanocomposite materials were investigated and

• graphene-based nanosheets adhere to the substrate through electrostatic interaction, hydrogen bonding, and van der Waals interaction (Figure 2d). Experimentally, GO nanosheets, SG, nanoparticles, and SG-ZH nanoparticles were synthesized and separately characterized as exhibited in SEM images in Figure 3a–c

• resulted in the transparency decline of 19% due to the white color of ZH nanoparticles and black color of GO nanosheets. Microscopic structures of the GO-SG-ZH coating on a PLA film were observed and imaged using the optical stereo microscope. Since the PLA substrate was almost transparent, pictures in

Morphology and properties of pyrite nanoparticles obtained by pulsed laser ablation in liquid and thin films for photodetection

• Akshana Parameswaran Sreekala,
• Bindu Krishnan,
• Rene Fabian Cienfuegos Pelaes,
• David Avellaneda Avellaneda,
• Josué Amílcar Aguilar-Martínez and
• Sadasivan Shaji

Beilstein J. Nanotechnol. 2025, 16, 785–805, doi:10.3762/bjnano.16.60

• synthesized by PLAL. FeS2 NPs were successfully synthesized in five different solvents, along with a minor phase of iron sulfide (FeS). Additionally, by combining electrophoretic deposition and spin-coating techniques, thin film photodiodes of FeS2 were fabricated on an n-type Si substrate utilizing the

• a large range of applications. This method does not require expensive equipment or expert labor, and the coatings produced are generally quite homogenous. Other benefits include quick deposition, no substrate shape constraint, application to any material that is available as a fine powder or charged

• film deposition technique where a substrate surface can be uniformly coated by spreading an evenly distributed layer of a desired material ink (in this case, NPs in a solvent) across the surface of the rotating substrate [30]. With these benefits, EPD and spin coating can be described as

Thickness dependent oxidation in CrCl₃: a scanning X-ray photoemission and Kelvin probe microscopies study

• Shafaq Kazim,
• Rahul Parmar,
• Maryam Azizinia,
• Matteo Amati,
• Muhammad Rauf,
• Andrea Di Cicco,
• Seyed Javid Rezvani,
• Dario Mastrippolito,
• Luca Ottaviano,
• Tomasz Klimczuk,
• Luca Gregoratti and
• Roberto Gunnella

Beilstein J. Nanotechnol. 2025, 16, 749–761, doi:10.3762/bjnano.16.58

• [2][11][8][10], focusing on thin layered flakes and the role of the layer thicknesses obtained by spectro- and scanning microscopy with a lateral resolution of a few tens of nanometers. The interaction with the supporting substrate is a crucial factor [3][12] regarding the properties of the flakes

• optical microscope. Therefore, we opted for an alternative substrate, indium tin oxide (ITO), to conduct the SPEM measurements on thinner layers. Figure 1 gives a direct comparison of AFM images and O.C. on the 1 nm SiO2/Si substrate. Optical contrast, AFM image, and a complete series of profiles showing

• layer thicknesses are given. To overcome the visibility barrier, systematic optical and AFM studies were performed for CrCl3 flakes on an ITO substrate and are reported for comparison in Figure 2a,b. Based on the colors of the flakes seen in the optical microscope images, an interval of thickness values

Serum heat inactivation diminishes ApoE-mediated uptake of D-Lin-MC3-DMA lipid nanoparticles

• Demian van Straten,
• Luuk van de Schepop,
• Rowan Frunt,
• Pieter Vader and
• Raymond M. Schiffelers

Beilstein J. Nanotechnol. 2025, 16, 740–748, doi:10.3762/bjnano.16.57

• short, after LNP uptake, the first reagent is added to the cells to lyse them and provide firefly luciferase substrate. After 10 min incubation at rt, the lysates are transferred to white lumitrac 96-well plates (Greiner) and firefly luminescence is measured using a Spectramax iD3 plate reader

• (Molecular Devices). Subsequently, the second reagent is added which quenches firefly luminescence and provides the Renilla substrate. After 10 min, Renilla luminescence is measured as an internal control to account for any non-specific luciferase activity knockdown such as treatment induced cell death. A

Nanostructured materials characterized by scanning photoelectron spectromicroscopy

• Matteo Amati,
• Alexey S. Shkvarin,
• Alexander I. Merentsov,
• Alexander N. Titov,
• María Taeño,
• David Maestre,
• Sarah R. McKibbin,
• Zygmunt Milosz,
• Ana Cremades,
• Rainer Timm and
• Luca Gregoratti

Beilstein J. Nanotechnol. 2025, 16, 700–710, doi:10.3762/bjnano.16.54

• expensive III–V materials to the active device area. The flexible geometry of nanowires standing upright on their growth substrate directly leads to gate-all-around metal-oxide-semiconductor stacks [23][24], and advanced electronic device designs such as nanowire tunneling field-effect transistors [24] or

• few nanometers along the entire nanowire. For operando SPEM measurements, nanowires were transferred onto a prepatterned device template with flat, individually contacted Au/Ti electrodes deposited onto a SiO2/Si substrate, separated by a 1.5 µm wide insulating gap. Optical microscopy images of the

High-temperature epitaxial growth of tantalum nitride thin films on MgO: structural evolution and potential for SQUID applications

• Michelle Cedillo Rosillo,
• Oscar Contreras López,
• Jesús Antonio Díaz,
• Agustín Conde Gallardo and
• Harvi A. Castillo Cuero

Beilstein J. Nanotechnol. 2025, 16, 690–699, doi:10.3762/bjnano.16.53

• using pulsed laser deposition (PLD). This research investigates the influence of varying deposition parameters, including substrate temperature and ambient gas composition, on the structural, morphological, and superconducting properties of the films. X-ray photoelectron spectroscopy, X-ray diffraction

• diffusion barrier with potential application for microelectronics were fabricated [10][11]. In contrast, the stoichiometric mononitride TaN phase with face-centered cubic (FCC) structure exhibits superconductivity with a Tc of 8.15 K [12]; when the thin films were grown epitaxially on an FCC substrate, Tc

• the present work, superconducting TaN thin films were synthesized using PLD. A high-purity Ta target was ablated in a N2 atmosphere while the N2 pressure was varied to investigate its effect on film properties. The substrate temperature was systematically altered to explore its impact on the growth

Colloidal few layered graphene–tannic acid preserves the biocompatibility of periodontal ligament cells

• Teissir Ben Ammar,
• Naji Kharouf,
• Dominique Vautier,
• Housseinou Ba,
• Nivedita Sudheer,
• Philippe Lavalle and
• Vincent Ball

Beilstein J. Nanotechnol. 2025, 16, 664–677, doi:10.3762/bjnano.16.51

• research indicating that TA coatings markedly enhanced the adhesion and proliferation of human liver cancer cells, specifically HepG2, on the PDMS substrate when compared to pristine PDMS [37]. TA may possibly play a role in cellular adhesion mechanisms, potentially through surface protein interactions

• . The cellular response on different graphene surfaces was previously studied, and it was demonstrated that substrate characteristics such as surface roughness, surface chemistry, and electronic properties can influence cell response [38]. The implications of these results are particularly significant

• recognized as a reliable metric for cellular health and substrate attachment quality [39][40]. Confocal micrographs (Figure 7A) demonstrated a well-preserved actin filament architecture across all evaluated FLG–TA concentrations (1, 25, and 200 µg·mL−1), thereby substantiating our prior assessments of

Nanoscale capacitance spectroscopy based on multifrequency electrostatic force microscopy

• Pascal N. Rohrbeck,
• Lukas D. Cavar,
• Franjo Weber,
• Peter G. Reichel,
• Mara Niebling and
• Stefan A. L. Weber

Beilstein J. Nanotechnol. 2025, 16, 637–651, doi:10.3762/bjnano.16.49

• mechanical resonance. All spectra were normalized against a reference spectrum recorded on the bare substrate far away from the capacitors to compensate any frequency response arising from the stray capacitance in the signal paths and cantilever. The electrostatic signal of the capacitor C3 showed a drop at

• parts [93], leading to a strong nanoscale contrast in the dielectric signal. On the silicon substrate, F14H20 formed groups of spherical particles with a diameter of 40 ± 5 nm (Figure 7a) [94][95]. Simultaneously with the topography, we recorded the C″ amplitude and phase at electrical excitation

• frequencies of 1.59 and 1.98 MHz. In the dielectric spectroscopy images, we see a sharp contrast between the F14H20 particles and the silicon substrate, both in C′ (Figure 7b,c) and C″ (Figure 7d,e). Within all images, the particles exhibit a lower amplitude signal than the surroundings [95]. The latter is

Focused ion and electron beams for synthesis and characterization of nanomaterials

• Aleksandra Szkudlarek

Beilstein J. Nanotechnol. 2025, 16, 613–616, doi:10.3762/bjnano.16.47

• the substrate. Metallic structures can be fabricated directly or through post-purification methods, such as water-assisted treatment, which has been effective for Au and Pt deposits [10]. Interestingly, morphological changes in the underlying SiO2 layer were observed during the process, resembling

Feasibility analysis of carbon nanofiber synthesis and morphology control using a LPG premixed flame

• Iftikhar Rahman Bishal,
• Muhammad Hilmi Ibrahim,
• Norikhwan Hamzah,
• Mohd Zamri Mohd Yusop,
• Faizuan Bin Abdullah,
• I Putu Tedy Indrayana and
• Mohd Fairus Mohd Yasin

Beilstein J. Nanotechnol. 2025, 16, 581–590, doi:10.3762/bjnano.16.45

• optimization of CNT/CNF synthesis in flame environments. An ethylene/air co-flow, non-premixed flame was used with a catalyst substrate of iron, nickel, and platinum wires of 0.1–0.25 mm diameter. The study found that carbon monoxide is a major contributor to CNT formation in flames, and the model also showed

• sidewalls, while the G′ peak at 2500–2900 cm−1 represents photon–phonon interactions [22]. To the best of our knowledge, the present study describes the first flame synthesis using a LPG premixed flame and a spherical substrate for CNF growth. The characteristics of the LPG premixed flame are studied with

• impregnated beads Zirconia beads of 0.30 mm diameter were selected as a substrate. The beads were cleaned by sonication in ethanol followed by rinsing with distilled water; the rinsed beads were dried in an oven to remove contaminants. The cleaned zirconia beads were impregnated with nickel catalyst to be

Retrieval of B1 phase from high-pressure B2 phase for CdO nanoparticles by electronic excitations in Cd_xZn_1−xO composite thin films

• Arkaprava Das,
• Marcin Zając and
• Carla Bittencourt

Beilstein J. Nanotechnol. 2025, 16, 551–560, doi:10.3762/bjnano.16.43

• are predominantly attributed to the silicon substrate, with notable peaks at 303, 520, 620, and 671 cm−1. The peak at 435.9 cm−1 corresponds to the E2(H) mode characteristic of the wurtzite ZnO phase [17]. The persistence of the E2(high) mode across all O and Ag ion irradiated thin films, indicates

• interdiffusion at the interface between the CdxZn1−xO (x = 0.4) alloy film and the Si wafer substrate [24]. This process initiates significant diffusion of Si atoms, starting at the film–substrate interface and extending into the thin film layer, leading to the formation of Si–O bonds. At an annealing

• temperature of 900 °C, Si diffusion intensifies, resulting in an increased thickness of the amorphous silicon oxide layer at the film–substrate interface [24]. The interdiffusion of Si, O, Cd, and Zn atoms near the SiOx layer (i.e., at the substrate–film interface) facilitates the formation of willemite

Electron beam-based direct writing of nanostructures using a palladium β-ketoesterate complex

• Chinmai Sai Jureddy,
• Krzysztof Maćkosz,
• Aleksandra Butrymowicz-Kubiak,
• Iwona B. Szymańska,
• Patrik Hoffmann and
• Ivo Utke

Beilstein J. Nanotechnol. 2025, 16, 530–539, doi:10.3762/bjnano.16.41

• ][11][12] properties at the nanometer scale. One method that is capable of creating such nanostructures is focused electron beam-induced deposition (FEBID) [13][14][15][16][17][18][19][20][21][22][23]. In this technique, a focused electron beam decomposes adsorbed molecules on a substrate in vacuum

• , resulting in a localized deposit at the irradiated area. When the precursor is delivered to the substrate in its gaseous form through a gas injection system (GIS), the process is termed as gas-assisted FEBID [23], commonly called FEBID. Variants such as liquid FEBID [24] and cryo-FEBID [25] also exist

• , though they follow a two-step process similar to lithography techniques [26]. Since the dissociation of molecules under an electron beam on the substrate can follow multiple pathways, the deposition parameters can greatly influence the composition, leading to the creation of novel materials [27

N₂⁺-implantation-induced tailoring of structural, morphological, optical, and electrical characteristics of sputtered molybdenum thin films

• Usha Rani,
• Kafi Devi,
• Divya Gupta and
• Sanjeev Aggarwal

Beilstein J. Nanotechnol. 2025, 16, 495–509, doi:10.3762/bjnano.16.38

• of the as-deposited and N2+-implanted Mo films increases from 13.22 to 15.24 nm and from 11.92 to 14.42 nm with an increase in thickness from 150 to 300 nm, respectively. This variation may relate to several factors involving film growth and substrate interactions. Thicker films (i.e., 250 and 300 nm

• the formation of certain planes [41]. Furthermore, the interaction between the substrate and the thin film can generate stress and strain, affecting the growth of specific planes. If the substrate promotes the (111) orientation through lattice compatibility, the resultant Mo thin film exhibits a

Performance optimization of a microwave-coupled plasma-based ultralow-energy ECR ion source for silicon nanostructuring

• Joy Mukherjee,
• Safiul Alam Mollick,
• Tanmoy Basu and
• Tapobrata Som

Beilstein J. Nanotechnol. 2025, 16, 484–494, doi:10.3762/bjnano.16.37

• maximum eccentric tilt angle of ±70°. Sample preparation for cross sectional TEM measurement involved mechanically grinding the substrate into a circular disk with a diameter of 3 mm and a thickness of approximately 100 μm. The disk was then subjected to dimpling to achieve uniform thinning. To further