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Search for "vapor deposition" in Full Text gives 282 result(s) in Beilstein Journal of Nanotechnology. Showing first 200.

Electrostatic force microscopy for the accurate characterization of interphases in nanocomposites

  • Diana El Khoury,
  • Richard Arinero,
  • Jean-Charles Laurentie,
  • Mikhaël Bechelany,
  • Michel Ramonda and
  • Jérôme Castellon

Beilstein J. Nanotechnol. 2018, 9, 2999–3012, doi:10.3762/bjnano.9.279

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  • . ALD is a smooth chemical vapor deposition technique, expected to leave hydroxide OH groups on the surface. Conversely, PSD might induce a more homogeneous ionic surface state; O− and O2− could be typically introduced due to the small amount of reactive oxygen gas that is added to the neutral argon gas
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Published 07 Dec 2018

Investigation of CVD graphene as-grown on Cu foil using simultaneous scanning tunneling/atomic force microscopy

  • Majid Fazeli Jadidi,
  • Umut Kamber,
  • Oğuzhan Gürlü and
  • H. Özgür Özer

Beilstein J. Nanotechnol. 2018, 9, 2953–2959, doi:10.3762/bjnano.9.274

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  • an inequivalent electronic structure in HOPG or multilayer graphene due to the presence of a carbon atom or a hollow site underneath. In this work, we report small-amplitude, simultaneous STM/AFM imaging using a metallic (tungsten) tip, of the graphene surface as-grown by chemical vapor deposition
  • surface, and A is the measured amplitude during tip–surface interactions [34]. Graphene layers were grown on Cu foils using chemical vapor deposition (CVD) [35]. A custom-built atmospheric CVD system was used. Cu foils were heated under H2 + Ar atmosphere up to 950 °C. Upon reaching the process
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Published 28 Nov 2018

Site-controlled formation of single Si nanocrystals in a buried SiO2 matrix using ion beam mixing

  • Xiaomo Xu,
  • Thomas Prüfer,
  • Daniel Wolf,
  • Hans-Jürgen Engelmann,
  • Lothar Bischoff,
  • René Hübner,
  • Karl-Heinz Heinig,
  • Wolfhard Möller,
  • Stefan Facsko,
  • Johannes von Borany and
  • Gregor Hlawacek

Beilstein J. Nanotechnol. 2018, 9, 2883–2892, doi:10.3762/bjnano.9.267

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  • -oxide-semiconductor (CMOS) technology and thus have yet to be integrated into a cost-efficient Si-based technology. Multiple methods have been proposed and optimized for Si NC fabrication, including plasma-enhanced chemical vapor deposition (PECVD) [4][10], magnetron sputtering [11][12], laser-induced
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Published 16 Nov 2018

Controlling surface morphology and sensitivity of granular and porous silver films for surface-enhanced Raman scattering, SERS

  • Sherif Okeil and
  • Jörg J. Schneider

Beilstein J. Nanotechnol. 2018, 9, 2813–2831, doi:10.3762/bjnano.9.263

Graphical Abstract
  • ], anisotropically etched single-crystal silicon [47], plasma-treated plastic [48] and anodic aluminum oxide films [49][50][51][52]. Some methods aim at the fabrication of three -dimensional silver or gold structures, such as oblique-angle vapor deposition used for the fabrication of silver nanorod arrays [53][54
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Published 07 Nov 2018

Near-infrared light harvesting of upconverting NaYF4:Yb3+/Er3+-based amorphous silicon solar cells investigated by an optical filter

  • Daiming Liu,
  • Qingkang Wang and
  • Qing Wang

Beilstein J. Nanotechnol. 2018, 9, 2788–2793, doi:10.3762/bjnano.9.260

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  • and ethanol for several times, and dried at 70 °C. The a-Si:H solar cell with an intrinsic p–i–n configuration was deposited on a 3 mm glass substrate by plasma-enhanced chemical vapor deposition. The front and back contact electrodes were deposited as AZO transparent conductive films. Then, the
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Published 31 Oct 2018

Oriented zinc oxide nanorods: A novel saturable absorber for lasers in the near-infrared

  • Pavel Loiko,
  • Tanujjal Bora,
  • Josep Maria Serres,
  • Haohai Yu,
  • Magdalena Aguiló,
  • Francesc Díaz,
  • Uwe Griebner,
  • Valentin Petrov,
  • Xavier Mateos and
  • Joydeep Dutta

Beilstein J. Nanotechnol. 2018, 9, 2730–2740, doi:10.3762/bjnano.9.255

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  • epitaxy, metal-organic chemical vapor deposition, pulsed laser deposition), or by wet-chemical processes (e.g., the hydrothermal method, electrochemical deposition) [4]. The hydrothermal growth of ZnO NRs is a relatively simple, versatile and low temperature process [5]. ZnO NRs are used in gas sensors
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Published 23 Oct 2018

Low cost tips for tip-enhanced Raman spectroscopy fabricated by two-step electrochemical etching of 125 µm diameter gold wires

  • Antonino Foti,
  • Francesco Barreca,
  • Enza Fazio,
  • Cristiano D’Andrea,
  • Paolo Matteini,
  • Onofrio Maria Maragò and
  • Pietro Giuseppe Gucciardi

Beilstein J. Nanotechnol. 2018, 9, 2718–2729, doi:10.3762/bjnano.9.254

Graphical Abstract
  • deposition (EBID) and focused ion beam (FIB) milling [41][42][43] (see [30][44] for reviews). Fabrication methods capable of guaranteeing high reproducibility, cost-effectiveness and scalability to industrial production are, however, still not available at present. Metal vapor deposition on AFM tips is
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Published 22 Oct 2018

Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition

  • Lukas Keller and
  • Michael Huth

Beilstein J. Nanotechnol. 2018, 9, 2581–2598, doi:10.3762/bjnano.9.240

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  • uses a layer-by-layer based technique [4]. The design of the desired 3D structure is partitioned into horizontal slices parallel to the substrate surface. For each slice a full set of structure-definition steps, typically combining physical vapor deposition and UV or electron beam lithography, are
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Published 27 Sep 2018

Magnetism and magnetoresistance of single Ni–Cu alloy nanowires

  • Andreea Costas,
  • Camelia Florica,
  • Elena Matei,
  • Maria Eugenia Toimil-Molares,
  • Ionel Stavarache,
  • Andrei Kuncser,
  • Victor Kuncser and
  • Ionut Enculescu

Beilstein J. Nanotechnol. 2018, 9, 2345–2355, doi:10.3762/bjnano.9.219

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  • -resistance and magneto-thermopower measurements on single Co–Ni alloy nanowires have been reported [10]. Several methods have been reported for the controlled fabrication of magnetic nanowires including lithographical techniques, chemical vapor deposition and hydrothermal growth [11][12][13]. The main
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Published 30 Aug 2018

Metal–dielectric hybrid nanoantennas for efficient frequency conversion at the anapole mode

  • Valerio F. Gili,
  • Lavinia Ghirardini,
  • Davide Rocco,
  • Giuseppe Marino,
  • Ivan Favero,
  • Iännis Roland,
  • Giovanni Pellegrini,
  • Lamberto Duò,
  • Marco Finazzi,
  • Luca Carletti,
  • Andrea Locatelli,
  • Aristide Lemaître,
  • Dragomir Neshev,
  • Costantino De Angelis,
  • Giuseppe Leo and
  • Michele Celebrano

Beilstein J. Nanotechnol. 2018, 9, 2306–2314, doi:10.3762/bjnano.9.215

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  • SiOx are deposited on the surface via plasma-enhanced chemical vapor deposition (PECVD) to later improve the adhesion of the negative-tone HSQ resist on the III–V layer. A first positive-tone lithography step with PMMA resist is performed to realize the alignment structures, followed by electron beam
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Published 27 Aug 2018

Dumbbell gold nanoparticle dimer antennas with advanced optical properties

  • Janning F. Herrmann and
  • Christiane Höppener

Beilstein J. Nanotechnol. 2018, 9, 2188–2197, doi:10.3762/bjnano.9.205

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  • -nanometer precision in space. Briefly, the fabrication of tip-supported nanoparticle antennas includes at first the attachment of a single spherical AuNP to the pointed end of a glass tip. For this, the glass surface is functionalized with 3-aminopropoyl-trimethoxy silane (APTMS) by means of vapor
  • deposition. Controlled interaction of the glass tip with loosely adhered Au nanoparticles on a glass surface leads to an attachment of the AuNP at the pointed end. This tip-supported AuNP is sequentially functionalized with the corresponding linker molecule, i.e., by dipping the tip-supported AuNP into an
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Published 17 Aug 2018

Metal-free catalysis based on nitrogen-doped carbon nanomaterials: a photoelectron spectroscopy point of view

  • Mattia Scardamaglia and
  • Carla Bittencourt

Beilstein J. Nanotechnol. 2018, 9, 2015–2031, doi:10.3762/bjnano.9.191

Graphical Abstract
  • -synthetic treatments. The most common technique for doping during the synthesis is chemical vapor deposition (CVD), similar to the synthesis of the pristine material [36][69][70], albeit using nitrogen-containing precursors such as benzylamine [71], acetonitrile [72][73], phthalocyanines [74][75] or ammonia
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Published 18 Jul 2018

Electromigrated electrical optical antennas for transducing electrons and photons at the nanoscale

  • Arindam Dasgupta,
  • Mickaël Buret,
  • Nicolas Cazier,
  • Marie-Maxime Mennemanteuil,
  • Reinaldo Chacon,
  • Kamal Hammani,
  • Jean-Claude Weeber,
  • Juan Arocas,
  • Laurent Markey,
  • Gérard Colas des Francs,
  • Alexander Uskov,
  • Igor Smetanin and
  • Alexandre Bouhelier

Beilstein J. Nanotechnol. 2018, 9, 1964–1976, doi:10.3762/bjnano.9.187

Graphical Abstract
  • connected optical antenna is a Au constriction formed between two fan-out electrodes laying on a glass cover slip. We use electron-beam lithography and standard physical vapor deposition to produce gold constrictions and the proximity electrodes. The thickness of the Au layer is typically 50 nm, and we use
  • processing. We realize the implementation of tunneling antennas on a TiO2 waveguide through a multi-step process. First, a 85 to 110 nm thick titanium dioxide layer is deposited by physical vapor deposition on a clean glass substrate. Then, the Au backbone that will subsequently define the electrically
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Published 11 Jul 2018

Synthesis of carbon nanowalls from a single-source metal-organic precursor

  • André Giese,
  • Sebastian Schipporeit,
  • Volker Buck and
  • Nicolas Wöhrl

Beilstein J. Nanotechnol. 2018, 9, 1895–1905, doi:10.3762/bjnano.9.181

Graphical Abstract
  • vapor deposition (ICP-PECVD) is investigated. The CNWs are electrically conducting and show a large specific surface area, which is a key characteristic to make them interesting for sensors, catalytic applications or energy-storage systems. It was recently discovered that CNW films can be deposited by
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Published 29 Jun 2018

SO2 gas adsorption on carbon nanomaterials: a comparative study

  • Deepu J. Babu,
  • Divya Puthusseri,
  • Frank G. Kühl,
  • Sherif Okeil,
  • Michael Bruns,
  • Manfred Hampe and
  • Jörg J. Schneider

Beilstein J. Nanotechnol. 2018, 9, 1782–1792, doi:10.3762/bjnano.9.169

Graphical Abstract
  • vapor deposition [56][57]. The bimetallic catalyst system for the VACNT growth was prepared by depositing a thin layer of aluminum (13–15 nm) over the substrate through thermal evaporation in a vacuum of 10−6 mbar, followed by the sputter deposition of 1.2 nm of an iron catalyst layer. The synthesis was
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Published 13 Jun 2018

Toward the use of CVD-grown MoS2 nanosheets as field-emission source

  • Geetanjali Deokar,
  • Nitul S. Rajput,
  • Junjie Li,
  • Francis Leonard Deepak,
  • Wei Ou-Yang,
  • Nicolas Reckinger,
  • Carla Bittencourt,
  • Jean-Francois Colomer and
  • Mustapha Jouiad

Beilstein J. Nanotechnol. 2018, 9, 1686–1694, doi:10.3762/bjnano.9.160

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  • the fabricated MoS2 NSs could have a great potential as robust high-performance electron-emitter material for various applications such as microelectronics and nanoelectronics, flat-panel displays and electron-microscopy emitter tips. Keywords: chemical vapor deposition (CVD); field emission
  • ][16] and the number of layers [16]. Various methods have been used to synthesize vertically aligned MoS2 NSs: liquid-phase exfoliation [17], hydrothermal synthesis [8] or chemical vapor deposition (CVD) [15][17][18]. CVD is regarded as the most promising method to synthesize high-quality MoS2 with
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Published 07 Jun 2018

Light extraction efficiency enhancement of flip-chip blue light-emitting diodes by anodic aluminum oxide

  • Yi-Ru Huang,
  • Yao-Ching Chiu,
  • Kuan-Chieh Huang,
  • Shao-Ying Ting,
  • Po-Jui Chiang,
  • Chih-Ming Lai,
  • Chun-Ping Jen,
  • Snow H. Tseng and
  • Hsiang-Chen Wang

Beilstein J. Nanotechnol. 2018, 9, 1602–1612, doi:10.3762/bjnano.9.152

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  • reflected by the surface roughness of LEDs. RCWA analysis indicated that surface plasmon waves are not involved in LEE enhancement. Experimental To produce a typical LED chip with a single-sided PSS, InGaN/GaN MQW LEDs were grown on c-plane (0001)-oriented PSSs using a metal–organic chemical vapor
  • deposition apparatus. An inductively coupled plasma etcher was used to prepare periodic arrays with a depth of 1.5 μm on the PSS. Trimethylgallium, trimethylindium, ammonia, bicyclopentadienyl magnesium, and silane served as the precursors of Ga, In, N, Mg, and Si, respectively. The epitaxial structure of
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Published 30 May 2018

Nanoporous silicon nitride-based membranes of controlled pore size, shape and areal density: Fabrication as well as electrophoretic and molecular filtering characterization

  • Axel Seidenstücker,
  • Stefan Beirle,
  • Fabian Enderle,
  • Paul Ziemann,
  • Othmar Marti and
  • Alfred Plettl

Beilstein J. Nanotechnol. 2018, 9, 1390–1398, doi:10.3762/bjnano.9.131

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  • membrane. Experimental details are summarized in Table S1 in Supporting Information File 1. First, in Figure 1a an approximately 55 nm thick sacrificial layer of silicon oxide is deposited on top of the SiN membrane by electron beam physical vapor deposition (EBPVD). After that, Au NPs (typical diameter ca
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Published 09 May 2018

Electrostatically actuated encased cantilevers

  • Benoit X. E. Desbiolles,
  • Gabriela Furlan,
  • Adam M. Schwartzberg,
  • Paul D. Ashby and
  • Dominik Ziegler

Beilstein J. Nanotechnol. 2018, 9, 1381–1389, doi:10.3762/bjnano.9.130

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  • . Beginning with gold-coated silicon cantilevers (NSC 19, Mikromasch) (1), we use chemical vapor deposition to coat a 11 μm thick sacrificial polymer layer followed by a 2 μm thick parylene layer. The first layer serves as sacrificial film that defines the air gap and the parylene builds the encasement. Next
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Published 08 May 2018

Chemistry for electron-induced nanofabrication

  • Petra Swiderek,
  • Hubertus Marbach and
  • Cornelis W. Hagen

Beilstein J. Nanotechnol. 2018, 9, 1317–1320, doi:10.3762/bjnano.9.124

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  • chemical vapor deposition (CVD), which is a thermally driven process [6]. Consequently, these precursors are optimized with respect to thermal chemistry and do not necessarily perform well in the electron-driven FEBID process. In fact, they often experience incomplete fragmentation so that material from
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Published 30 Apr 2018

Formation mechanisms of boron oxide films fabricated by large-area electron beam-induced deposition of trimethyl borate

  • Aiden A. Martin and
  • Philip J. Depond

Beilstein J. Nanotechnol. 2018, 9, 1282–1287, doi:10.3762/bjnano.9.120

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  • at rates comparable to conventional techniques such as laser-induced chemical vapor deposition. The deposition rate and stoichiometry of boron oxide fabricated by EBID using trimethyl borate (TMB) as precursor is found to be critically dependent on the substrate temperature. By comparing the
  • and undergoes subsequent reaction with an electron beam. The process has major advantages over thermal chemical vapor deposition (CVD) processes one of which being that the substrate is not exposed to the elevated temperatures required for the thermal decomposition of precursor molecules. To date, the
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Published 24 Apr 2018

A novel copper precursor for electron beam induced deposition

  • Caspar Haverkamp,
  • George Sarau,
  • Mikhail N. Polyakov,
  • Ivo Utke,
  • Marcos V. Puydinger dos Santos,
  • Silke Christiansen and
  • Katja Höflich

Beilstein J. Nanotechnol. 2018, 9, 1220–1227, doi:10.3762/bjnano.9.113

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  • deposition should furthermore provide for conductive deposits with a preferably high copper content. Here, the metal-organic precursor bis(tert-butylacetoacetato)Cu(II) (CAS: 23670-45-3, C16H26CuO6) is introduced as a fluorine-free alternative. This precursor is known from chemical vapor deposition (CVD
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Published 18 Apr 2018

Review on nanoparticles and nanostructured materials: history, sources, toxicity and regulations

  • Jaison Jeevanandam,
  • Ahmed Barhoum,
  • Yen S. Chan,
  • Alain Dufresne and
  • Michael K. Danquah

Beilstein J. Nanotechnol. 2018, 9, 1050–1074, doi:10.3762/bjnano.9.98

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  • morphologies such as hollow tubes, ellipsoids or spheres. Fullerenes (C60), carbon nanotubes (CNTs), carbon nanofibers, carbon black, graphene (Gr), and carbon onions are included under the carbon-based NMs category. Laser ablation, arc discharge, and chemical vapor deposition (CVD) are the important
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Published 03 Apr 2018

Single-crystalline FeCo nanoparticle-filled carbon nanotubes: synthesis, structural characterization and magnetic properties

  • Rasha Ghunaim,
  • Maik Scholz,
  • Christine Damm,
  • Bernd Rellinghaus,
  • Rüdiger Klingeler,
  • Bernd Büchner,
  • Michael Mertig and
  • Silke Hampel

Beilstein J. Nanotechnol. 2018, 9, 1024–1034, doi:10.3762/bjnano.9.95

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  • the filling material due to the confinement of the material within the hollow tubular cavity. Chemical vapor deposition (CVD) is a technique used to fill MNPs into CNTs via in situ filling, in which metallocene precursors are used as a carbon source and MNPs [22][30][37] or hydrocarbons (such as
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Published 29 Mar 2018

Effect of annealing treatments on CeO2 grown on TiN and Si substrates by atomic layer deposition

  • Silvia Vangelista,
  • Rossella Piagge,
  • Satu Ek and
  • Alessio Lamperti

Beilstein J. Nanotechnol. 2018, 9, 890–899, doi:10.3762/bjnano.9.83

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  • sputtering [7], e-beam [16], physical vapor deposition [17], chemical vapor deposition (CVD) [18], and atomic layer deposition (ALD). The latter has been explored by using different precursors, e.g., Ce(thd)4, Ce(iPrCp)3 and Ce(mmp)4) [19][20][21][22][23], obtaining as-deposited film with polycrystalline
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Published 15 Mar 2018
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