Mapping of integrated PIN diodes with a 3D architecture by scanning microwave impedance microscopy and dynamic spectroscopy

• Rosine Coq Germanicus,
• Peter De Wolf,
• Florent Lallemand,
• Catherine Bunel,
• Serge Bardy,
• Hugues Murray and
• Ulrike Lüders

Beilstein J. Nanotechnol. 2020, 11, 1764–1775, doi:10.3762/bjnano.11.159

• complete parametric investigation, is performed with a dynamic spectroscopy method. The results emphasize the strong impact, in terms of distinction and location, of the applied bias on the local sMIM measurements for both FEOL and BEOL layers. Keywords: atomic force microscopy (AFM); DataCube; doping

• new multidimensional approach [33] (also called DataCube (DCUBE)), which combines sMIM imaging and dynamic sMIM point spectroscopy (at each pixel). This combined mode produces an integrated and complete 3D dataset in which, for every pixel of the mapping, the local variation of the sMIM parameters as

• properties of doped semiconductors layers from FEOL processing as well as details of the BEOL layers of the processed device. By varying the applied voltage in every pixel of the image, the multidimensional sMIM method (dynamic spectroscopy mode in DataCube) is applied and provides a more complete electrical