N₂⁺-implantation-induced tailoring of structural, morphological, optical, and electrical characteristics of sputtered molybdenum thin films

• Usha Rani,
• Kafi Devi,
• Divya Gupta and
• Sanjeev Aggarwal

Beilstein J. Nanotechnol. 2025, 16, 495–509, doi:10.3762/bjnano.16.38

• electron beam evaporation [10] have been reported in the literature. RF sputtering is the predominant technique for thin film deposition because of its benefits regarding layer adhesion, uniformity, composition, and deposition rate compared to other methods [11]. In the deposition of molybdenum films, RF

Tailoring of physical properties of RF-sputtered ZnTe films: role of substrate temperature

• Kafi Devi,
• Usha Rani,
• Arun Kumar,
• Divya Gupta and
• Sanjeev Aggarwal

Beilstein J. Nanotechnol. 2025, 16, 333–348, doi:10.3762/bjnano.16.25

• physical and chemical methods such as molecular beam epitaxy [8], electron-beam evaporation [9], thermal evaporation [10], pulsed laser deposition (PLD) [11], and RF sputtering [12]. RF sputtering is a versatile technique because various process parameters such as RF power, deposition time, substrate

Interface properties of nanostructured carbon-coated biological implants: an overview

• Mattia Bartoli,
• Francesca Cardano,
• Erik Piatti,
• Stefania Lettieri,
• Andrea Fin and
• Alberto Tagliaferro

Beilstein J. Nanotechnol. 2024, 15, 1041–1053, doi:10.3762/bjnano.15.85

• which the deposition occurs. During electron beam evaporation, an electron beam is used to vaporize the target material, while during sputtering, a high-energy ion beam is used to bombard the target. In both cases, atoms are ejected from the target and subsequently condense onto the substrate. The

Superconducting spin valve effect in Co/Pb/Co heterostructures with insulating interlayers

• Andrey A. Kamashev,
• Nadir N. Garif’yanov,
• Aidar A. Validov,
• Vladislav Kataev,
• Alexander S. Osin,
• Yakov V. Fominov and
• Ilgiz A. Garifullin

Beilstein J. Nanotechnol. 2024, 15, 457–464, doi:10.3762/bjnano.15.41

• the magnetization of the Co1 layer. The layers were deposited using electron beam evaporation (Co, Pb) and AC sputtering (Si3N4). The deposition setup had a load-lock station with vacuum shutters, allowing one to transfer the sample holder without breaking the ultrahigh vacuum in the deposition

Design, fabrication, and characterization of kinetic-inductive force sensors for scanning probe applications

• August K. Roos,
• Ermes Scarano,
• Elisabet K. Arvidsson,
• Erik Holmgren and
• David B. Haviland

Beilstein J. Nanotechnol. 2024, 15, 242–255, doi:10.3762/bjnano.15.23

• expose with a dose of 450 mJ/cm2 using an MLA150 from Heidelberg Instruments. We develop the pattern in maD533s for roughly 45 s and then deposit 10 nm chromium and 40 nm of gold by electron-beam evaporation in an Auto306 from Edwards Vacuum. Lift-off in mrREM700 removes the resist mask, and the

• adhesion of the following 150 nm deposition of chromium with electron-beam evaporation in the Auto306 from Edwards. After the lift-off in mrREM700, we also strip the protective PMMA layer on the front side with AR600–71, and we clean the wafer in isopropanol (IPA). (d) Coarse circuit pattern. A layer of

Measurements of dichroic bow-tie antenna arrays with integrated cold-electron bolometers using YBCO oscillators

• Leonid S. Revin,
• Dmitry A. Pimanov,
• Alexander V. Chiginev,
• Anton V. Blagodatkin,
• Viktor O. Zbrozhek,
• Andrey V. Samartsev,
• Anastasia N. Orlova,
• Dmitry V. Masterov,
• Alexey E. Parafin,
• Victoria Yu. Safonova,
• Anna V. Gordeeva,
• Andrey L. Pankratov,
• Leonid S. Kuzmin,
• Anatolie S. Sidorenko,
• Silvia Masi and
• Paolo de Bernardis

Beilstein J. Nanotechnol. 2024, 15, 26–36, doi:10.3762/bjnano.15.3

• for the 240 GHz channel is 34.8 GHz, and the maximum absorption occurs at a frequency of 239.6 GHz. Fabrication of samples of receiving systems with CEBs The samples and the sample blanks with electronic lithography, ready for electron beam evaporation, were fabricated at the Chalmers University of

• /20 nm was deposited with an electron-beam evaporation machine. After lift-off, a double layer of MMA and ARP electron resist was deposited, which is necessary to form an aluminum oxide dielectric layer without breaking the vacuum. Then the electron lithography was made, but the resist was not

N-Heterocyclic carbene-based gold etchants

• Robert B. Chevalier,
• Justin Pantano,
• Matthew K. Kiesewetter and
• Jason R. Dwyer

Beilstein J. Nanotechnol. 2023, 14, 865–871, doi:10.3762/bjnano.14.71

• Information File 1. Gold-coated glass slides were purchased from Electron Microscopy Sciences (71892-05, Hatfield, PA, USA). The films were 50 nm of gold deposited by electron beam evaporation onto a 2–7 nm chromium adhesion layer. Slides were cut into ca. 1 × 1 cm2 tokens and immersed in 2 mL of the relevant

Formation of nanoflowers: Au and Ni silicide cores surrounded by SiO_x branches

• Feitao Li,
• Siyao Wan,
• Dong Wang and
• Peter Schaaf

Beilstein J. Nanotechnol. 2023, 14, 133–140, doi:10.3762/bjnano.14.14

• small pieces were ready for thin film deposition. Metallic bilayers of Au and Ni of three different thickness ratios and a total thickness of 20 nm were deposited onto the SiO2/Si substrate by electron beam evaporation (CS400ES, VON ARDENNE) at a working pressure of 1 × 10−6 mbar. The Au layer was

DNA aptamer selection and construction of an aptasensor based on graphene FETs for Zika virus NS1 protein detection

• Nathalie B. F. Almeida,
• Thiago A. S. L. Sousa,
• Viviane C. F. Santos,
• Camila M. S. Lacerda,
• Thais G. Silva,
• Rafaella F. Q. Grenfell,
• Flavio Plentz and
• Antero S. R. Andrade

Beilstein J. Nanotechnol. 2022, 13, 873–881, doi:10.3762/bjnano.13.78

• previously described by our group elsewhere [24]. The dimensions of the sensing region (100 μm × 100 μm) were defined by O2 plasma etching. The source and drain electrodes were fabricated by electron-beam evaporation of 2 nm/100 nm of Ti/Au, and we covered the metal contacts with a 10 μm thick passivation

Zinc oxide nanostructures for fluorescence and Raman signal enhancement: a review

• Ioana Marica,
• Fran Nekvapil,
• Maria Ștefan,
• Cosmin Farcău and
• Alexandra Falamaș

Beilstein J. Nanotechnol. 2022, 13, 472–490, doi:10.3762/bjnano.13.40

• allowed for the decoration of vertically aligned cone-shaped ZnO nanorods with Ag NPs on their sides and their top ends [35], and magnetron sputtering [7][36]. Electron beam evaporation of, for example, a 30 nm Au layer on ZnO nanopillars arrays [37] or of ZnO-elevated Au dimer nanostructures (Figure 2a,b

• needed to develop efficient SERS substrates. The combination of several methods including nanosphere lithography, atomic layer deposition, electrodeposition, and electron-beam evaporation resulted in Au-covered hollow urchin-like ZnO structures (Figure 2e–k) [16]. The ZnO layer was deposited on a

• substrate covered with polystyrene spheres by atomic layer deposition, followed by electrodeposition, which was used to grow ZnO nanowires onto the surface. The Au layer was deposited after burning off the polystyrene spheres by electron beam evaporation while monitoring its thickness. Considering the

TiO_x/Pt₃Ti(111) surface-directed formation of electronically responsive supramolecular assemblies of tungsten oxide clusters

• Marco Moors,
• Yun An,
• Agnieszka Kuc and
• Kirill Yu. Monakhov

Beilstein J. Nanotechnol. 2021, 12, 203–212, doi:10.3762/bjnano.12.16

• points, identical oxide phases by electron beam evaporation of Ti on Pt(111) at increased oxygen partial pressures. However, the direct oxidation of the Pt3Ti alloy surface has the advantage of an easier reproducibility and an increased long-range order of the individual oxide phases [22]. For this study

Walking energy harvesting and self-powered tracking system based on triboelectric nanogenerators

• Mingliang Yao,
• Guangzhong Xie,
• Qichen Gong and
• Yuanjie Su

Beilstein J. Nanotechnol. 2020, 11, 1590–1595, doi:10.3762/bjnano.11.141

• terephthalate) (PET) substrate. The Kapton film was fixed with a row of steel rods and heated, for 4 h in an oven at 100 °C, to achieve a wavy configuration. Copper foils were deposited onto both sides of the Kapton film by electron beam evaporation to form the wave-shaped electrode. The lead was connected to

Proximity effect in [Nb(1.5 nm)/Fe(x)]₁₀/Nb(50 nm) superconductor/ferromagnet heterostructures

• Yury Khaydukov,
• Sabine Pütter,
• Laura Guasco,
• Roman Morari,
• Gideok Kim,
• Thomas Keller,
• Anatolie Sidorenko and
• Bernhard Keimer

Beilstein J. Nanotechnol. 2020, 11, 1254–1263, doi:10.3762/bjnano.11.109

• thermal evaporation from an effusion cell while Nb and Pt were grown by electron beam evaporation. Reflection high-energy electron diffraction (RHEED) was measured in situ during deposition to trace the structure of the atomic layer being deposited. For the RHEED experiment, an electron beam of 15 keV

Gram-scale synthesis of splat-shaped Ag–TiO₂ nanocomposites for enhanced antimicrobial properties

• Mohammad Jaber,
• Asim Mushtaq,
• Kebiao Zhang,
• Jindan Wu,
• Dandan Luo,
• Zihan Yi,
• M. Zubair Iqbal and
• Xiangdong Kong

Beilstein J. Nanotechnol. 2020, 11, 1119–1125, doi:10.3762/bjnano.11.96

• , antimicrobial and photocatalytic activities [3]. The main challenges of using the nanocomposites in the biomedical and textile-coating fields are to keep the synthesis processes at a low cost and to control for yield and stability issues. Currently, a number of techniques such as electron beam evaporation

Formation of metal/semiconductor Cu–Si composite nanostructures

• Natalya V. Yumozhapova,
• Andrey V. Nomoev,
• Vyacheslav V. Syzrantsev and
• Erzhena C. Khartaeva

Beilstein J. Nanotechnol. 2019, 10, 2497–2504, doi:10.3762/bjnano.10.240

• . Furthermore, the effective cooling rate of the Cu–SiOx core–shell nanoparticles experimentally obtained by the electron beam evaporation method has been estimated. Funding This work was supported by the Russian Scientific Foundation [project number 18-79-10143]. Diagram of the installation for the production

The importance of design in nanoarchitectonics: multifractality in MACE silicon nanowires

• Stefania Carapezzi and
• Anna Cavallini

Beilstein J. Nanotechnol. 2019, 10, 2094–2102, doi:10.3762/bjnano.10.204

• the cleaned surfaces by electron beam evaporation. These gold films do not coat the substrates uniformly. The uncovered parts of the Si surfaces become the seeds of the NWs in the subsequent etching step. For the etching step, the substrates are immersed in an aqueous solution of HF (5 M) and H2O2

• Si substrate by electron beam evaporation. The conditions during the growth of the gold thin film were similar to the ones during the growth of the samples SiNW1 and SiNW2. The black regions correspond to the uncovered silicon areas, while the white region represents the deposited Au. It is evident

Rapid thermal annealing for high-quality ITO thin films deposited by radio-frequency magnetron sputtering

• Petronela Prepelita,
• Ionel Stavarache,
• Doina Craciun,
• Florin Garoi,
• Catalin Negrila,
• Beatrice Gabriela Sbarcea and
• Valentin Craciun

Beilstein J. Nanotechnol. 2019, 10, 1511–1522, doi:10.3762/bjnano.10.149

• deposited by rfMS, the thermal treatments show superior performance in terms of the optical properties, such as an increase of the bandgap by 0.41 eV. On the other hand, ITO films deposited by electron beam evaporation do not exhibit an improvement of their optical properties even after thermal treatment

Fabrication of silver nanoisland films by pulsed laser deposition for surface-enhanced Raman spectroscopy

• Bogusław Budner,
• Mariusz Kuźma,
• Barbara Nasiłowska,
• Bartosz Bartosewicz,
• Malwina Liszewska and
• Bartłomiej J. Jankiewicz

Beilstein J. Nanotechnol. 2019, 10, 882–893, doi:10.3762/bjnano.10.89

• physical methods include fabrication of nanostructured silver films by electron-beam evaporation [16], gas aggregation [17] and radio-frequency sputtering [18]. The advantages of certain physical methods over chemical methods include that there is no reagent contamination and that the monodispersity of

Zn/F-doped tin oxide nanoparticles synthesized by laser pyrolysis: structural and optical properties

• Florian Dumitrache,
• Iuliana P. Morjan,
• Elena Dutu,
• Ion Morjan,
• Claudiu Teodor Fleaca,
• Monica Scarisoreanu,
• Alina Ilie,
• Marius Dumitru,
• Cristian Mihailescu,
• Adriana Smarandache and
• Gabriel Prodan

Beilstein J. Nanotechnol. 2019, 10, 9–21, doi:10.3762/bjnano.10.2

• solutions [13] and iv.) iron by laser pyrolysis [14][15] or by electron beam evaporation [16]. Cobalt-doped tin oxide has also been reported, and the resulting polycrystalline films were prepared by spin-coating and annealing from chloride ethanolic solutions resulted in lower bandgap values than pure SnO2

Optimization of Mo/Cr bilayer back contacts for thin-film solar cells

• Nima Khoshsirat,
• Fawad Ali,
• Vincent Tiing Tiong,
• Mojtaba Amjadipour,
• Hongxia Wang,
• Mahnaz Shafiei and
• Nunzio Motta

Beilstein J. Nanotechnol. 2018, 9, 2700–2707, doi:10.3762/bjnano.9.252

• silver collection grid was deposited on top using electron-beam evaporation. It is worth mentioning that the fabrication of a cell on a single-layer Mo-coated glass also has been tried. However, the Mo films were peeled-off from the substrate during CdS CBD. Thus, herein only the performance of a cell

Block copolymers for designing nanostructured porous coatings

• Roberto Nisticò

Beilstein J. Nanotechnol. 2018, 9, 2332–2344, doi:10.3762/bjnano.9.218

• , where the titanium assembly is driven by the microphase separation of the PS-b-PEO layer underneath [99]. When the titanium coating procedure is performed by electron beam evaporation onto a previously self-assembled PS-b-PEO substrate, Ti preferentially deposits and diffuses inside the PS matrix, thus

Metal–dielectric hybrid nanoantennas for efficient frequency conversion at the anapole mode

• Valerio F. Gili,
• Lavinia Ghirardini,
• Davide Rocco,
• Giuseppe Marino,
• Ivan Favero,
• Iännis Roland,
• Giovanni Pellegrini,
• Lamberto Duò,
• Marco Finazzi,
• Luca Carletti,
• Andrea Locatelli,
• Aristide Lemaître,
• Dragomir Neshev,
• Costantino De Angelis,
• Giuseppe Leo and
• Michele Celebrano

Beilstein J. Nanotechnol. 2018, 9, 2306–2314, doi:10.3762/bjnano.9.215

• electron beam evaporation and lift-off, defines the gold nanorings. Optical setup The nonlinear optical microscope employed in our experiment is depicted in Figure 7. The radiation from a 150 fs-laser centered at 1554 nm is sent to the sample through a high-NA (0.85) air objective, after setting the linear

• SiOx are deposited on the surface via plasma-enhanced chemical vapor deposition (PECVD) to later improve the adhesion of the negative-tone HSQ resist on the III–V layer. A first positive-tone lithography step with PMMA resist is performed to realize the alignment structures, followed by electron beam

• evaporation of 5 nm of Ti and 80 nm of Au. Finally, a standard lift-off procedure reveals the gold alignment structures. The choice of gold as a material at this stage is crucial to ensure the highest possible contrast and precision in the successive lithography step. HSQ resist is then spun and nanoantenna

Optical near-field mapping of plasmonic nanostructures prepared by nanosphere lithography

• Gitanjali Kolhatkar,
• Alexandre Merlen,
• Jiawei Zhang,
• Chahinez Dab,
• Gregory Q. Wallace,
• François Lagugné-Labarthet and
• Andreas Ruediger

Beilstein J. Nanotechnol. 2018, 9, 1536–1543, doi:10.3762/bjnano.9.144

• coverslip and distributed homogeneously. After the sample dried, 3 nm of Ti followed by 30 nm of Au were deposited using electron beam evaporation. The sample was then sonicated in ethanol for 1 min to remove the polystyrene particles. A pattern of gold plasmonic nanotriangles (side length ≈350 nm

Cathodoluminescence as a probe of the optical properties of resonant apertures in a metallic film

• Kalpana Singh,
• Evgeniy Panchenko,
• Babak Nasr,
• Amelia Liu,
• Lukas Wesemann,
• Timothy J. Davis and
• Ann Roberts

Beilstein J. Nanotechnol. 2018, 9, 1491–1500, doi:10.3762/bjnano.9.140

• nominally 100 nm thickness is deposited using electron beam evaporation (Intvac Nanochrome I) onto a high quality borosilicate glass slide with 5 nm of chromium as an adhesive layer. The rate of deposition of the gold was set to 0.3 Å/s. High quality azimuthal arrangements of three slot apertures with

Tailoring polarization and magnetization of absorbing terahertz metamaterials using a cut-wire sandwich structure

• Hadi Teguh Yudistira,
• Shuo Liu,
• Tie Jun Cui and
• Han Zhang

Beilstein J. Nanotechnol. 2018, 9, 1437–1447, doi:10.3762/bjnano.9.136

• on a silicon wafer and then baked on a hot plate at 80 °C, 120 °C, 180 °C and 250 °C for 5, 5, 5 and 20 min, respectively. Then, standard photolithography was performed [34][35], and another Ti/Au layer (30/100 nm) was deposited onto the PI substrate by electron beam evaporation. A standard lift-off