Direct observation of the CVD growth of monolayer MoS₂ using in situ optical spectroscopy

• Claudia Beatriz López-Posadas,
• Yaxu Wei,
• Wanfu Shen,
• Daniel Kahr,
• Michael Hohage and
• Lidong Sun

Beilstein J. Nanotechnol. 2019, 10, 557–564, doi:10.3762/bjnano.10.57

• the temperature distribution in the CVD reactor has been revealed. Our results demonstrate the great potential of real time, in situ optical spectroscopy to assist the precisely controlled growth of 2D semiconductor materials. Keywords: chemical vapor deposition (CVD); in situ differential optical

• spectroscopy; molybdenum disulfide (MoS2) monolayer; two-dimensional transition-metal dichalcogenides (2D TMDC); Introduction Two-dimensional transition metal dichalcogenide (2D TMDC) materials have drawn wide attention because of their fascinating physical and chemical properties [1][2][3][4][5][6]. Given