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Search for "low-k dielectric spacer" in Full Text gives 1 result(s) in Beilstein Journal of Nanotechnology.

Reduced subthreshold swing in a vertical tunnel FET using a low-work-function live metal strip and a low-k material at the drain

  • Kalai Selvi Kanagarajan and
  • Dhanalakshmi Krishnan Sadhasivan

Beilstein J. Nanotechnol. 2024, 15, 713–718, doi:10.3762/bjnano.15.59

Graphical Abstract
  • excellent improvement in TFETs, an on-current of 1.00 × 10−5 A/μm, an Ion/Ioff ratio of 7.14 × 1011, and a threshold voltage of 0.28 V. Keywords: dual low-work-function live strip (DLWLS); low-k dielectric spacer; low-work-function live strip (LWLS); Miller capacitance; molybdenum; subthreshold swing (SS
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Published 19 Jun 2024
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